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Troy Kim
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Mountain View, CA, US
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last 30 patents
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Patent Grant
Boron diffusion barrier by nitrogen incorporation in spacer dielect...
Patent number
7,132,353
Issue date
Nov 7, 2006
Applied Materials, Inc.
Li-Qun Xia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heated gas distribution plate for a processing chamber
Patent number
6,946,033
Issue date
Sep 20, 2005
Applied Materials Inc.
Lun Tsuei
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cleaning of CVD chambers using remote source with cxfyoz based chem...
Patent number
6,923,189
Issue date
Aug 2, 2005
Applied Materials, Inc.
Annamalai Lakshmanan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Cleaning of CVD chambers using remote source with CXFYOZ based chem...
Publication number
20040139983
Publication date
Jul 22, 2004
APPLIED MATERIALS, INC.
Annamalai Lakshmanan
B08 - CLEANING
Information
Patent Application
Methods for operating a chemical vapor deposition chamber using a h...
Publication number
20040052969
Publication date
Mar 18, 2004
APPLIED MATERIALS, INC.
Ju-Hyung Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Heated gas distribution plate for a processing chamber
Publication number
20040050492
Publication date
Mar 18, 2004
APPLIED MATERIALS, INC.
Lun Tsuei
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Reacting an organosilicon compound with an oxidizing gas to form an...
Publication number
20030211244
Publication date
Nov 13, 2003
APPLIED MATERIALS, INC.
Lihua Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...