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Yamanashi-Ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Particle-measuring system and particle-measuring method
Patent number
8,100,147
Issue date
Jan 24, 2012
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method
Patent number
7,931,945
Issue date
Apr 26, 2011
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film formation processing apparatus and method for determining an e...
Patent number
7,894,059
Issue date
Feb 22, 2011
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Particle-measuring system and particle-measuring method
Patent number
7,667,840
Issue date
Feb 23, 2010
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Particle-measuring system and particle-measuring method
Patent number
7,515,264
Issue date
Apr 7, 2009
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Particle-measuring system and particle-measuring method
Patent number
7,511,814
Issue date
Mar 31, 2009
Tokyo Electron Limited
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for cleaning substrate processing chamber
Patent number
7,456,109
Issue date
Nov 25, 2008
Tokyo Electron Limited
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming a ruthenium metal layer on a patterned substrate
Patent number
7,273,814
Issue date
Sep 25, 2007
Tokyo Electron Limited
Tsukasa Matsuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing metal layers from metal-carbonyl precursors
Patent number
7,078,341
Issue date
Jul 18, 2006
Tokyo Electron Limited
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
CVD process capable of reducing incubation time
Patent number
7,063,871
Issue date
Jun 20, 2006
Tokyo Electron Limited
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming film
Patent number
7,060,614
Issue date
Jun 13, 2006
Tokyo Electron Limited
Hotaka Ishizuka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Low-pressure deposition of metal layers from metal-carbonyl precursors
Patent number
6,989,321
Issue date
Jan 24, 2006
Tokyo Electron Limited
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a metal layer using an intermittent precursor gas...
Patent number
6,924,223
Issue date
Aug 2, 2005
Tokyo Electron Limited
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Particle-measuring system and particle-measuring method
Patent number
6,532,069
Issue date
Mar 11, 2003
Tokyo Electron Limited
Hayashi Otsuki
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
PARTICLE-MEASURING SYSTEM AND PARTICLE-MEASURING METHOD
Publication number
20100139565
Publication date
Jun 10, 2010
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PARTICLE-MEASURING SYSTEM AND PARTICLE-MEASURING METHOD
Publication number
20080264338
Publication date
Oct 30, 2008
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESSING SYSTEM CONTAINING A HOT FILAMENT HYDROGEN RADICAL SOURCE...
Publication number
20080078325
Publication date
Apr 3, 2008
TOKYO ELECTRON LIMITED
Tsukasa Matsuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF INTEGRATED SUBSTRATED PROCESSING USING A HOT FILAMENT HYD...
Publication number
20080081464
Publication date
Apr 3, 2008
TOKYO ELECTRON LIMITED
Tsukasa Matsuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE-MEASURING SYSTEM AND PARTICLE-MEASURING METHOD
Publication number
20080069671
Publication date
Mar 20, 2008
TOKYO ELECTRON LIMITED
Hayashi OTSUKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PARTICLE-MEASURING SYSTEM AND PARTICLE-MEASURING METHOD
Publication number
20080065340
Publication date
Mar 13, 2008
TOKYO ELECTRON LIMITED
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PARTICLE-MEASURING SYSTEM AND PARTICLE-MEASURING METHOD
Publication number
20070264444
Publication date
Nov 15, 2007
TOKYO ELECTRON LIMITED
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PARTICLE-MEASURING SYSTEM AND PARTICLE-MEASURING METHOD
Publication number
20070261740
Publication date
Nov 15, 2007
TOKYO ELECTRON LIMITED
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PARTICLE-MEASURING SYSTEM AND PARTICLE-MEASURING METHOD
Publication number
20070263217
Publication date
Nov 15, 2007
TOKYO ELECTRON LIMITED
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
A METHOD FOR FORMING A RUTHENIUM METAL LAYER ON A PATTERNED SUBSTRATE
Publication number
20060211228
Publication date
Sep 21, 2006
TOKYO ELECTRON LIMITED
Tsukasa Matsuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for cleaning substrate processing chamber
Publication number
20060124151
Publication date
Jun 15, 2006
TOKYO ELECTRON LIMITED
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of forming a metal layer
Publication number
20050221000
Publication date
Oct 6, 2005
TOKYO ELECTRON LIMITED
Taro Ikeda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of depositing metal layers from metal-carbonyl precursors
Publication number
20050079708
Publication date
Apr 14, 2005
TOKYO ELECTRON LIMITED
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Low-pressure deposition of metal layers from metal-carbonyl precursors
Publication number
20050070100
Publication date
Mar 31, 2005
TOKYO ELECTRON LIMITED
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of forming a metal layer using an intermittent precursor gas...
Publication number
20050069632
Publication date
Mar 31, 2005
TOKYO ELECTRON LIMITED
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for depositing metal layers using sequential flow deposition
Publication number
20050069641
Publication date
Mar 31, 2005
TOKYO ELECTRON LIMITED
Tsukasa Matsuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CVD process capable of reducing incubation time
Publication number
20040025789
Publication date
Feb 12, 2004
TOKYO ELECTRON LIMITED
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for forming film
Publication number
20030170981
Publication date
Sep 11, 2003
Hotaka Ishizuka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Particle-measuring system and particle-measuring method
Publication number
20030147075
Publication date
Aug 7, 2003
Hayashi Otsuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...