Tsuneyuki OKABE

Person

Oshu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Raw material supply apparatus and raw material supply method
- Patent number 11,965,242
- Issue date Apr 23, 2024
- Tokyo Electron Limited
- Seishi Murakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pipe joint
- Patent number 11,774,015
- Issue date Oct 3, 2023
- Fujikin Incorporated
- Akihiro Harada
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Fluid heater, fluid control apparatus, and production method for fl...
- Patent number 11,402,124
- Issue date Aug 2, 2022
- Fujikin Incorporated
- Tsuneyuki Okabe
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
Gasket for fluid coupling, and fluid coupling
- Patent number 11,255,468
- Issue date Feb 22, 2022
- Fujikin Incorporated
- Keisuke Ishibashi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,208,721
- Issue date Dec 28, 2021
- Tokyo Electron Limited
- Kohei Fukushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shutoff-opening device
- Patent number 10,753,497
- Issue date Aug 25, 2020
- Fujikin Incorporated
- Keisuke Ishibashi
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Grant
Processing apparatus
- Patent number 10,669,632
- Issue date Jun 2, 2020
- Tokyo Electron Limited
- Masahiro Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, gas supply method, substrate proces...
- Patent number 10,287,682
- Issue date May 14, 2019
- Tokyo Electron Limited
- Kazuyuki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pipe joint
- Patent number 9,435,470
- Issue date Sep 6, 2016
- Fujikin Incorporated
- Tsuneyuki Okabe
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Pipe joint
- Patent number 9,371,946
- Issue date Jun 21, 2016
- Tokyo Electron Limited
- Tsuneyuki Okabe
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Semiconductor processing system including vaporizer and method for...
- Patent number 9,159,548
- Issue date Oct 13, 2015
- Tokyo Electron Limited
- Tsuneyuki Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluid control device
- Patent number 8,973,615
- Issue date Mar 10, 2015
- Tokyo Electron Limited
- George Hoshi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Gas supply apparatus for semiconductor manufacturing apparatus
- Patent number 8,944,095
- Issue date Feb 3, 2015
- Tokyo Electron Limited
- Tsuneyuki Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flow rate controller and processing apparatus
- Patent number 8,893,743
- Issue date Nov 25, 2014
- Tokyo Electron Limited
- Tsuneyuki Okabe
- G05 - CONTROLLING REGULATING
Information Patent Grant
Gas supplying apparatus, cylinder cabinet provided with the same, v...
- Patent number 8,851,106
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Tsuneyuki Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing plant
- Patent number 8,387,559
- Issue date Mar 5, 2013
- Toyo Tanso Co., Ltd.
- Jiro Hiraiwa
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Vaporizer and semiconductor processing system
- Patent number 8,382,903
- Issue date Feb 26, 2013
- Tokyo Electron Limited
- Tsuneyuki Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotary switching valve
- Patent number 8,371,334
- Issue date Feb 12, 2013
- CKD Corporation
- Yukio Ozawa
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Removal of metal contaminant deposited on quartz member of vertical...
- Patent number 8,298,341
- Issue date Oct 30, 2012
- Tokyo Electron Limited
- Hitoshi Katoh
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Thermal type mass flow meter, and thermal type mass flow control de...
- Patent number 8,219,329
- Issue date Jul 10, 2012
- Horiba Stec, Co., Ltd.
- Hiroyuki Ebi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Vaporizer and semiconductor processing system
- Patent number 8,197,600
- Issue date Jun 12, 2012
- Tokyo Electron Limited
- Ken Nakao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply unit and gas supply system
- Patent number 8,104,516
- Issue date Jan 31, 2012
- CKD Corporation
- Shuji Moriya
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Film formation apparatus for semiconductor process and method for u...
- Patent number 7,954,452
- Issue date Jun 7, 2011
- Tokyo Electron Limited
- Tsuneyuki Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing system and vaporizer
- Patent number 7,883,076
- Issue date Feb 8, 2011
- Tokyo Electron Limited
- Tsuneyuki Okabe
- F22 - STEAM GENERATION
Information Patent Grant
Purge gas unit and purge gas supply integrated unit
- Patent number 7,874,316
- Issue date Jan 25, 2011
- CKD Corporation
- Tsuneyuki Okabe
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Grant
Fluid controller
- Patent number 7,726,333
- Issue date Jun 1, 2010
- CKD Corporation
- George Hoshi
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
Semiconductor fabrication system, and flow rate correction method a...
- Patent number 7,682,843
- Issue date Mar 23, 2010
- Tokyo Electron Limited
- Shuji Moriya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizing apparatus and semiconductor processing system
- Patent number 7,547,003
- Issue date Jun 16, 2009
- Tokyo Electron Limited
- Tsuneyuki Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer
- Patent number 7,452,424
- Issue date Nov 18, 2008
- Tokyo Electron Limited
- Tsuneyuki Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid raw material supply unit for vaporizer
- Patent number 7,343,926
- Issue date Mar 18, 2008
- CKD Corporation
- Tsuneyuki Okabe
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230087577
- Publication date Mar 23, 2023
- TOKYO ELECTRON LIMITED
- Eiichi KOMORI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230093077
- Publication date Mar 23, 2023
- TOKYO ELECTRON LIMITED
- Eiichi KOMORI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PIPE JOINT
- Publication number 20230024126
- Publication date Jan 26, 2023
- Fujikin Incorporated
- Akihiro HARADA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, RAW MATERIAL CARTRIDGE, SUBSTRATE P...
- Publication number 20220411929
- Publication date Dec 29, 2022
- TOKYO ELECTRON LIMITED
- Muneo HARADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL GAS SUPPLY SYSTEM AND RAW MATERIAL GAS SUPPLY METHOD
- Publication number 20220396873
- Publication date Dec 15, 2022
- TOKYO ELECTRON LIMITED
- Tsuneyuki OKABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING GAS CONCENTRATING APPARA...
- Publication number 20220372623
- Publication date Nov 24, 2022
- TOKYO ELECTRON LIMITED
- Muneo HARADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD
- Publication number 20220341038
- Publication date Oct 27, 2022
- TOKYO ELECTRON LIMITED
- Tsuneyuki OKABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD
- Publication number 20220341037
- Publication date Oct 27, 2022
- TOKYO ELECTRON LIMITED
- Seishi MURAKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL GAS SUPPLY SYSTEM AND RAW MATERIAL GAS SUPPLY METHOD
- Publication number 20220333237
- Publication date Oct 20, 2022
- Tokyo Electron Limited
- Tsuneyuki OKABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND DEPOSITION METHOD
- Publication number 20220178029
- Publication date Jun 9, 2022
- TOKYO ELECTRON LIMITED
- Yuji OBATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLUID HEATER, FLUID CONTROL APPARATUS, AND PRODUCTION METHOD FOR FL...
- Publication number 20200018519
- Publication date Jan 16, 2020
- Fujikin Incorporated
- Tsuneyuki OKABE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
GASKET FOR FLUID COUPLING, AND FLUID COUPLING
- Publication number 20180299042
- Publication date Oct 18, 2018
- FUJIKIN INCORPORATED
- Keisuke ISHIBASHI
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180258528
- Publication date Sep 13, 2018
- TOKYO ELECTRON LIMITED
- Kohei FUKUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHUTOFF-OPENING DEVICE
- Publication number 20180112788
- Publication date Apr 26, 2018
- FUJIKIN INCORPORATED
- Keisuke Ishibashi
- F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information Patent Application
Substrate Processing Apparatus, Gas Supply Method, Substrate Proces...
- Publication number 20170275757
- Publication date Sep 28, 2017
- TOKYO ELECTRON LIMITED
- Kazuyuki KIKUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRESSURE MEASURING DEVICE AND EXHAUST SYSTEM USING THE SAME, AND SU...
- Publication number 20170268952
- Publication date Sep 21, 2017
- TOKYO ELECTRON TOHOKU LIMITED
- Satoshi KIKUCHI
- G01 - MEASURING TESTING
Information Patent Application
PROCESSING APPARATUS
- Publication number 20170137942
- Publication date May 18, 2017
- TOKYO ELECTRON LIMITED
- Masahiro KIKUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
JOINT
- Publication number 20140333067
- Publication date Nov 13, 2014
- FUJIKIN INCORPORATED
- Tsuneyuki Okabe
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
PIPE JOINT
- Publication number 20140312617
- Publication date Oct 23, 2014
- FUJIKIN INCORPORATED
- Tsuneyuki Okabe
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
PIPE JOINT
- Publication number 20140110937
- Publication date Apr 24, 2014
- FUJIKIN INCORPORATED
- Tsuneyuki OKABE
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SEMICONDUCTOR PROCESSING SYSTEM INCLUDING VAPORIZER AND METHOD FOR...
- Publication number 20140080320
- Publication date Mar 20, 2014
- TOKYO ELECTRON LIMITED
- Tsuneyuki Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLOW RATE CONTROLLER AND PROCESSING APPARATUS
- Publication number 20130092264
- Publication date Apr 18, 2013
- TOKYO ELECTRON LIMITED
- Tsuneyuki OKABE
- G01 - MEASURING TESTING
Information Patent Application
GAS SUPPLYING APPARATUS, CYLINDER CABINET PROVIDED WITH THE SAME, V...
- Publication number 20120222751
- Publication date Sep 6, 2012
- TOKYO ELECTRON LIMITED
- Tsuneyuki OKABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS
- Publication number 20120222615
- Publication date Sep 6, 2012
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
- Publication number 20120094011
- Publication date Apr 19, 2012
- TOKYO ELECTRON LIMITED
- Katsuyuki HISHIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY APPARATUS FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20110265895
- Publication date Nov 3, 2011
- TOKYO ELECTRON LIMITED
- Tsuneyuki OKABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL TYPE MASS FLOW METER, AND THERMAL TYPE MASS FLOW CONTROL DE...
- Publication number 20110125445
- Publication date May 26, 2011
- Hiroyuki Ebi
- G05 - CONTROLLING REGULATING
Information Patent Application
ROTARY SWITCHING VALVE
- Publication number 20100229984
- Publication date Sep 16, 2010
- CKD CORPORATION
- Yukio OZAWA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SEMICONDUCTOR MANUFACTURING PLANT
- Publication number 20100064969
- Publication date Mar 18, 2010
- Toyo Tanso Co., Ltd.
- Jiro Hiraiwa
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
REMOVAL OF METAL CONTAMINANT DEPOSITED ON QUARTZ MEMBER OF VERTICAL...
- Publication number 20090293908
- Publication date Dec 3, 2009
- TOKYO ELECTRON LIMITED
- Hitoshi KATOH
- C03 - GLASS MINERAL OR SLAG WOOL

Tsuneyuki OKABE

Person

Patents Grantslast 30 patents

Raw material supply apparatus and raw material supply method

Pipe joint

Fluid heater, fluid control apparatus, and production method for fl...

Gasket for fluid coupling, and fluid coupling

Substrate processing apparatus

Shutoff-opening device

Processing apparatus

Substrate processing apparatus, gas supply method, substrate proces...

Pipe joint

Pipe joint

Semiconductor processing system including vaporizer and method for...

Fluid control device

Gas supply apparatus for semiconductor manufacturing apparatus

Flow rate controller and processing apparatus

Gas supplying apparatus, cylinder cabinet provided with the same, v...

Semiconductor manufacturing plant

Vaporizer and semiconductor processing system

Rotary switching valve

Removal of metal contaminant deposited on quartz member of vertical...

Thermal type mass flow meter, and thermal type mass flow control de...

Vaporizer and semiconductor processing system

Gas supply unit and gas supply system

Film formation apparatus for semiconductor process and method for u...

Semiconductor processing system and vaporizer

Purge gas unit and purge gas supply integrated unit

Fluid controller

Semiconductor fabrication system, and flow rate correction method a...

Vaporizing apparatus and semiconductor processing system

Vaporizer

Liquid raw material supply unit for vaporizer

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

PIPE JOINT

SUBSTRATE PROCESSING APPARATUS, RAW MATERIAL CARTRIDGE, SUBSTRATE P...

RAW MATERIAL GAS SUPPLY SYSTEM AND RAW MATERIAL GAS SUPPLY METHOD

SUBSTRATE PROCESSING APPARATUS, PROCESSING GAS CONCENTRATING APPARA...

RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD

RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD

RAW MATERIAL GAS SUPPLY SYSTEM AND RAW MATERIAL GAS SUPPLY METHOD

DEPOSITION APPARATUS AND DEPOSITION METHOD

FLUID HEATER, FLUID CONTROL APPARATUS, AND PRODUCTION METHOD FOR FL...

GASKET FOR FLUID COUPLING, AND FLUID COUPLING

SUBSTRATE PROCESSING APPARATUS

SHUTOFF-OPENING DEVICE

Substrate Processing Apparatus, Gas Supply Method, Substrate Proces...

PRESSURE MEASURING DEVICE AND EXHAUST SYSTEM USING THE SAME, AND SU...

PROCESSING APPARATUS

JOINT

PIPE JOINT

PIPE JOINT

SEMICONDUCTOR PROCESSING SYSTEM INCLUDING VAPORIZER AND METHOD FOR...

FLOW RATE CONTROLLER AND PROCESSING APPARATUS

GAS SUPPLYING APPARATUS, CYLINDER CABINET PROVIDED WITH THE SAME, V...

FILM DEPOSITION APPARATUS

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

GAS SUPPLY APPARATUS FOR SEMICONDUCTOR MANUFACTURING APPARATUS

THERMAL TYPE MASS FLOW METER, AND THERMAL TYPE MASS FLOW CONTROL DE...

ROTARY SWITCHING VALVE

SEMICONDUCTOR MANUFACTURING PLANT

REMOVAL OF METAL CONTAMINANT DEPOSITED ON QUARTZ MEMBER OF VERTICAL...