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Tsutomu Higashiura

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  • Yamanashi, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20080257498
    • Publication date Oct 23, 2008
    • TOKYO ELECTRON LIMITED
    • Tsutomu Higashiura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND CONTROL METHOD THEREOF
    • Publication number 20080179005
    • Publication date Jul 31, 2008
    • TOKYO ELECTRON LIMITED
    • Naoto Sagae
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20070236148
    • Publication date Oct 11, 2007
    • Yohei Yamazawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma process apparatus
    • Publication number 20070113787
    • Publication date May 24, 2007
    • TOKYO ELECTRON LIMITED
    • Tsutomu Higashiura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing apparatus and mounting unit thereof
    • Publication number 20050274324
    • Publication date Dec 15, 2005
    • TOKYO ELECTRON LIMITED
    • Syuichi Takahashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Processing apparatus
    • Publication number 20050236111
    • Publication date Oct 27, 2005
    • TOKYO ELECTRON LIMITED
    • Tsutomu Higashiura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing apparatus and control method thereof
    • Publication number 20050205208
    • Publication date Sep 22, 2005
    • TOKYO ELECTRON LIMITED
    • Naoto Sagae
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20050139321
    • Publication date Jun 30, 2005
    • TOKYO ELECTRON LIMITED
    • Tsutomu Higashiura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma processing system
    • Publication number 20050069651
    • Publication date Mar 31, 2005
    • TOKYO ELECTRON LIMITED
    • Hideaki Miyoshi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma treatment apparatus and control method thereof
    • Publication number 20050061442
    • Publication date Mar 24, 2005
    • Tsutomu Higashiura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma treatment apparatus, matching box, impedance matching device...
    • Publication number 20050011450
    • Publication date Jan 20, 2005
    • Tsutomu Higashiura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma process apparatus
    • Publication number 20040255863
    • Publication date Dec 23, 2004
    • Tsutomu Higashiura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20040035365
    • Publication date Feb 26, 2004
    • Yohei Yamazawa
    • H01 - BASIC ELECTRIC ELEMENTS