Tsutomu HIROKI

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and stage cleaning method
- Patent number 12,261,060
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Tsutomu Hiroki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stage, stage manufacturing method, and heat exchanger
- Patent number 11,437,259
- Issue date Sep 6, 2022
- Tokyo Electron Limited
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device and substrate transfer method
- Patent number 11,139,185
- Issue date Oct 5, 2021
- TOKYO ELECTRON LIMI TED
- Tsutomu Hiroki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Heat transfer medium supply system and substrate processing apparatus
- Patent number 11,004,664
- Issue date May 11, 2021
- Tokyo Electron Limited
- Tsutomu Hiroki
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Stage and substrate processing apparatus
- Patent number 10,763,764
- Issue date Sep 1, 2020
- Tokyo Electron Limited
- Tsutomu Hiroki
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Stage and substrate processing apparatus
- Patent number 10,658,160
- Issue date May 19, 2020
- Tokyo Electron Limited
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System including temperature-controllable stage, semiconductor manu...
- Patent number 10,502,508
- Issue date Dec 10, 2019
- Tokyo Electron Limited
- Tsutomu Hiroki
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Stage, stage manufacturing method, and heat exchanger
- Patent number 10,475,686
- Issue date Nov 12, 2019
- Tokyo Electron Limited
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature control system and temperature control method
- Patent number 10,312,062
- Issue date Jun 4, 2019
- Tokyo Electron Limited
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Drive device and substrate processing system
- Patent number 9,995,378
- Issue date Jun 12, 2018
- Tokyo Electron Limited
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conveyance base and conveyance system
- Patent number 9,947,564
- Issue date Apr 17, 2018
- Tokyo Electron Limited
- Tsutomu Hiroki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,520,309
- Issue date Dec 13, 2016
- Tokyo Electron Limited
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus
- Patent number 9,406,539
- Issue date Aug 2, 2016
- Tokyo Electron Limited
- Tsutomu Hiroki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate processing system, transfer module, substrate processing...
- Patent number 9,312,153
- Issue date Apr 12, 2016
- Tokyo Electron Limited
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device for substrate processing system
- Patent number 9,230,840
- Issue date Jan 5, 2016
- Tokyo Electron Limited
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer device and transfer method
- Patent number 9,227,320
- Issue date Jan 5, 2016
- Tokyo Electron Limited
- Tsutomu Hiroki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,209,055
- Issue date Dec 8, 2015
- TOKYO ELECTRONICS LIMITED
- Tsutomu Hiroki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Conveyance device and substrate processing system
- Patent number 9,165,810
- Issue date Oct 20, 2015
- Tokyo Electron Limited
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer device, substrate processing system and posture control unit
- Patent number 9,138,901
- Issue date Sep 22, 2015
- Tokyo Electron Limited
- Tsutomu Hiroki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Bevel/backside polymer removing method and device, substrate proces...
- Patent number 8,821,644
- Issue date Sep 2, 2014
- Tokyo Electron Limited
- Isamu Sakuragi
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate conveyer for a substrate processing device
- Patent number D704753
- Issue date May 13, 2014
- Tokyo Electron Limited
- Tsutomu Hiroki
- D15 - Machines not elsewhere specified
Information Patent Grant
Gate valve and substrate processing apparatus equipped with the same
- Patent number 8,590,861
- Issue date Nov 26, 2013
- Tokyo Electron Limited
- Tsutomu Hiroki
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Transfer device and semiconductor processing system
- Patent number 8,562,275
- Issue date Oct 22, 2013
- Tokyo Electron Limited
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and vacuum transfer apparatus
- Patent number 8,380,337
- Issue date Feb 19, 2013
- Tokyo Electron Limited
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device, substrate processing apparatus and subst...
- Patent number 8,057,153
- Issue date Nov 15, 2011
- Tokyo Electron Limited
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing system
- Patent number 7,857,569
- Issue date Dec 28, 2010
- Tokyo Electron Limited
- Tsutomu Hiroki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Transportation apparatus and drive mechanism
- Patent number 7,837,425
- Issue date Nov 23, 2010
- Tokyo Electron Limited
- Hiroaki Saeki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing device
- Patent number 7,780,391
- Issue date Aug 24, 2010
- Tokyo Electron Limited
- Takaaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum container apparatus used for manufacturing semiconductor dev...
- Patent number 7,762,425
- Issue date Jul 27, 2010
- Tokyo Electron Limited
- Toru Kimura
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Substrate processing apparatus, substrate processing method, comput...
- Patent number 7,706,907
- Issue date Apr 27, 2010
- Tokyo Electron Limited
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250207250
- Publication date Jun 26, 2025
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEAL STRUCTURE, CHAMBER, SUBSTRATE PROCESSING APPARATUS, AND METHOD...
- Publication number 20250066909
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VALVE DEVICE, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURI...
- Publication number 20250043879
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE VALVE, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF OPERATING GA...
- Publication number 20230094622
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD
- Publication number 20220341033
- Publication date Oct 27, 2022
- TOKYO ELECTRON LIMITED
- Shinichi IKE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND STAGE CLEANING METHOD
- Publication number 20210098269
- Publication date Apr 1, 2021
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE TRANSFER METHOD
- Publication number 20200365431
- Publication date Nov 19, 2020
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE, STAGE MANUFACTURING METHOD, AND HEAT EXCHANGER
- Publication number 20190385881
- Publication date Dec 19, 2019
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
STAGE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180138835
- Publication date May 17, 2018
- Tsutomu HIROKI
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
HEAT TRANSFER MEDIUM SYSTEM AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180130645
- Publication date May 10, 2018
- Tsutomu HIROKI
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
STAGE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170316923
- Publication date Nov 2, 2017
- TOKYO ELECTRON LIMITED
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE
- Publication number 20160293454
- Publication date Oct 6, 2016
- TOKYO ELECTRON LIMITED
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL SYSTEM AND TEMPERATURE CONTROL METHOD
- Publication number 20160104605
- Publication date Apr 14, 2016
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Device and Substrate Processing Device-Use Cou...
- Publication number 20160035604
- Publication date Feb 4, 2016
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SYSTEM INCLUDING TEMPERATURE-CONTROLLABLE STAGE, SEMICONDUCTOR MANU...
- Publication number 20150377571
- Publication date Dec 31, 2015
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
BEARING MECHANISM AND TRANSFER DEVICE
- Publication number 20150316098
- Publication date Nov 5, 2015
- Tsutomu HIROKI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
CONVEYANCE BASE AND CONVEYANCE SYSTEM
- Publication number 20150318197
- Publication date Nov 5, 2015
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
STAGE, STAGE MANUFACTURING METHOD, AND HEAT EXCHANGER
- Publication number 20150179485
- Publication date Jun 25, 2015
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CONVEYANCE DEVICE AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20150125238
- Publication date May 7, 2015
- TOKYO ELECTRON LIMITED
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONVEYOR
- Publication number 20150078863
- Publication date Mar 19, 2015
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TRANSFER DEVICE AND TRANSFER METHOD
- Publication number 20150019004
- Publication date Jan 15, 2015
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Maintenance System, and Substrate Processing Device
- Publication number 20150012124
- Publication date Jan 8, 2015
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE TRANSFER DEVICE FOR SUBSTRATE PROCESSING SYSTEM
- Publication number 20140271052
- Publication date Sep 18, 2014
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20140271051
- Publication date Sep 18, 2014
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRIVE DEVICE AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20140209241
- Publication date Jul 31, 2014
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS
- Publication number 20140093336
- Publication date Apr 3, 2014
- TOKYO ELECTRON LIMITED
- Tsutomu Hiroki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140044505
- Publication date Feb 13, 2014
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
TRANSFER DEVICE, SUBSTRATE PROCESSING SYSTEM AND POSTURE CONTROL UNIT
- Publication number 20130216335
- Publication date Aug 22, 2013
- SANKYO SEISAKUSHO CORPORATION
- Tsutomu Hiroki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, TRANSFER MODULE, SUBSTRATE PROCESSING...
- Publication number 20130202387
- Publication date Aug 8, 2013
- TOKYO ELECTRON LIMITED
- Tsutomu Hiroki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER, SUBSTRATE TRANSFER APPARATUS, AND SUBSTRATE PROCE...
- Publication number 20120315113
- Publication date Dec 13, 2012
- TOKYO ELECTRON LIMITED
- Tsutomu Hiroki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Tsutomu HIROKI

Person

Patents Grantslast 30 patents

Substrate processing apparatus and stage cleaning method

Stage, stage manufacturing method, and heat exchanger

Substrate processing device and substrate transfer method

Heat transfer medium supply system and substrate processing apparatus

Stage and substrate processing apparatus

Stage and substrate processing apparatus

System including temperature-controllable stage, semiconductor manu...

Stage, stage manufacturing method, and heat exchanger

Temperature control system and temperature control method

Drive device and substrate processing system

Conveyance base and conveyance system

Substrate processing apparatus and substrate processing method

Substrate transfer apparatus

Substrate processing system, transfer module, substrate processing...

Substrate transfer device for substrate processing system

Transfer device and transfer method

Substrate processing apparatus

Conveyance device and substrate processing system

Transfer device, substrate processing system and posture control unit

Bevel/backside polymer removing method and device, substrate proces...

Substrate conveyer for a substrate processing device

Gate valve and substrate processing apparatus equipped with the same

Transfer device and semiconductor processing system

Vacuum processing apparatus and vacuum transfer apparatus

Substrate transfer device, substrate processing apparatus and subst...

Semiconductor processing system

Transportation apparatus and drive mechanism

Substrate processing device

Vacuum container apparatus used for manufacturing semiconductor dev...

Substrate processing apparatus, substrate processing method, comput...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SEAL STRUCTURE, CHAMBER, SUBSTRATE PROCESSING APPARATUS, AND METHOD...

VALVE DEVICE, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURI...

GATE VALVE, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF OPERATING GA...

FILM-FORMING METHOD

SUBSTRATE PROCESSING APPARATUS AND STAGE CLEANING METHOD

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE TRANSFER METHOD

STAGE, STAGE MANUFACTURING METHOD, AND HEAT EXCHANGER

STAGE AND SUBSTRATE PROCESSING APPARATUS

HEAT TRANSFER MEDIUM SYSTEM AND SUBSTRATE PROCESSING APPARATUS

STAGE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING DEVICE

TEMPERATURE CONTROL SYSTEM AND TEMPERATURE CONTROL METHOD

Substrate Processing Device and Substrate Processing Device-Use Cou...

SYSTEM INCLUDING TEMPERATURE-CONTROLLABLE STAGE, SEMICONDUCTOR MANU...

BEARING MECHANISM AND TRANSFER DEVICE

CONVEYANCE BASE AND CONVEYANCE SYSTEM

STAGE, STAGE MANUFACTURING METHOD, AND HEAT EXCHANGER

CONVEYANCE DEVICE AND SUBSTRATE PROCESSING SYSTEM

CONVEYOR

TRANSFER DEVICE AND TRANSFER METHOD

Maintenance System, and Substrate Processing Device

SUBSTRATE TRANSFER DEVICE FOR SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DRIVE DEVICE AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE TRANSFER APPARATUS

SUBSTRATE PROCESSING APPARATUS

TRANSFER DEVICE, SUBSTRATE PROCESSING SYSTEM AND POSTURE CONTROL UNIT

SUBSTRATE PROCESSING SYSTEM, TRANSFER MODULE, SUBSTRATE PROCESSING...

SUBSTRATE HOLDER, SUBSTRATE TRANSFER APPARATUS, AND SUBSTRATE PROCE...