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Tsutomu Takaku
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Nishigou-mura, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Polishing pad, polishing method, and polishing machine for mirror-p...
Patent number
6,306,021
Issue date
Oct 23, 2001
Shin-Etsu Handotai Co., Ltd.
Hisashi Masumura
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad, method and apparatus for treating polishing pad and...
Patent number
6,190,238
Issue date
Feb 20, 2001
Shin-Etsu Handotai Co., Ltd.
Koichi Tanaka
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing agent used for polishing semiconductor silicon wafers and...
Patent number
6,060,396
Issue date
May 9, 2000
Shin-Etsu Handotai Co., Ltd.
Teruaki Fukami
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Method for polishing thin plate and apparatus for polishing
Patent number
5,934,981
Issue date
Aug 10, 1999
Shin-Etsu Handotai Co., Ltd.
Koichi Tanaka
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing system
Patent number
5,797,789
Issue date
Aug 25, 1998
Shin-Etsu Handotai Co., Ltd.
Koichi Tanaka
B24 - GRINDING POLISHING
Information
Patent Grant
Process of polishing wafers
Patent number
5,733,177
Issue date
Mar 31, 1998
Shin-Etsu Handotai Co., Ltd.
Toshihiro Tsuchiya
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Polishing pad, polishing method, and polishing machine for mirror-p...
Publication number
20020031990
Publication date
Mar 14, 2002
Shin-Estu Handotai Co., Ltd.
Hisashi Masumura
B24 - GRINDING POLISHING