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Tsutomu Tetsuka

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  • Niihari, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20190287770
    • Publication date Sep 19, 2019
    • Hitachi High-Technologies Corporation
    • Taku IWASE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20190189396
    • Publication date Jun 20, 2019
    • Hitachi High-Technologies Corporation
    • Taku IWASE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSOR
    • Publication number 20170186587
    • Publication date Jun 29, 2017
    • Hitachi High-Technologies Corporation
    • Tetsuo KAWANABE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20150311040
    • Publication date Oct 29, 2015
    • Hitachi High-Technologies Corporation
    • TADAYOSHI KAWAGUCHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING APPARATUS
    • Publication number 20150270148
    • Publication date Sep 24, 2015
    • Hitachi High-Technologies Corporation
    • Kazunori Shinoda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20150068681
    • Publication date Mar 12, 2015
    • Hitachi High-Technologies Corporation
    • Tsutomu Tetsuka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF MANUFACTURING MAGNETORESISTIVE ELEMENT
    • Publication number 20140116985
    • Publication date May 1, 2014
    • Hitachi High-Technologies Corporation
    • Makoto SATAKE
    • B82 - NANO-TECHNOLOGY
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20130299091
    • Publication date Nov 14, 2013
    • Hitachi High-Technologies Corporation
    • Yusaku SAKKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
    • Publication number 20130200042
    • Publication date Aug 8, 2013
    • Makoto SATAKE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20130000847
    • Publication date Jan 3, 2013
    • Hitachi High-Technologies Corporation
    • Tsutomu TETSUKA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20110139370
    • Publication date Jun 16, 2011
    • Hitachi High-Technologies Corporation
    • Naoshi Itabashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
    • Publication number 20110100954
    • Publication date May 5, 2011
    • Hitachi High-Technologies Corporation
    • Makoto SATAKE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Cleaning Method
    • Publication number 20100294315
    • Publication date Nov 25, 2010
    • Kazuyuki Ikenaga
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20100282414
    • Publication date Nov 11, 2010
    • Hitachi High-Technologies Corp
    • Naoshi ITABASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma Processing Apparatus and Plasma Processing Method
    • Publication number 20100258529
    • Publication date Oct 14, 2010
    • Masahito MORI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Cleaning apparatus and cleaning method
    • Publication number 20100050349
    • Publication date Mar 4, 2010
    • Hitachi High-Technologies Corporation
    • Kazuyuki Ikenaga
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20100050938
    • Publication date Mar 4, 2010
    • Hitachi High-Technologies Corporation
    • Tsutomu Tetsuka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS CAPABLE OF SUPPRESSING VARIATION OF PRO...
    • Publication number 20090165951
    • Publication date Jul 2, 2009
    • Naoshi Itabashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND METHOD FOR DETECTING STATUS OF SAID...
    • Publication number 20090105980
    • Publication date Apr 23, 2009
    • Tsutomu TETSUKA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20080180030
    • Publication date Jul 31, 2008
    • Tsutomu Tetsuka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20070215282
    • Publication date Sep 20, 2007
    • Hitachi High-Technologies Corporation
    • Naoshi Itabashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma Processing Apparatus And Plasma Processing Method
    • Publication number 20070175586
    • Publication date Aug 2, 2007
    • Tsutomu Tetsuka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20070044716
    • Publication date Mar 1, 2007
    • Tsutomu Tetsuka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma processing apparatus capable of suppressing variation of pro...
    • Publication number 20060032584
    • Publication date Feb 16, 2006
    • Naoshi Itabashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20050199183
    • Publication date Sep 15, 2005
    • Masatsugu Arai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma processing apparatus and plasma processing method
    • Publication number 20050133162
    • Publication date Jun 23, 2005
    • Tsutomu Tetsuka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Diagnosis method for semiconductor processing apparatus
    • Publication number 20040159401
    • Publication date Aug 19, 2004
    • Go Miya
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Semiconductor manufacturing apparatus and method of processing semi...
    • Publication number 20040149384
    • Publication date Aug 5, 2004
    • Seiichiro Kanno
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Semiconductor processing apparatus and a diagnosis method therefor
    • Publication number 20030205326
    • Publication date Nov 6, 2003
    • Go Miya
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma processing apparatus and method
    • Publication number 20020134510
    • Publication date Sep 26, 2002
    • Hideyuki Kazumi
    • H01 - BASIC ELECTRIC ELEMENTS