Tsuyoshi Ohtsuki

Person

Annaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Silicon single crystal substrate and silicon epitaxial wafer for so...
- Patent number 11,824,070
- Issue date Nov 21, 2023
- Shin-Etsu Handotai Co., Ltd.
- Takao Abe
- C30 - CRYSTAL GROWTH
Information Patent Grant
Anodic-oxidation equipment, anodic-oxidation method, and method for...
- Patent number 11,248,306
- Issue date Feb 15, 2022
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method for manufacturing semiconductor device and method for evalua...
- Patent number 10,886,129
- Issue date Jan 5, 2021
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for evaluating a semiconductor wafer
- Patent number 9,935,021
- Issue date Apr 3, 2018
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for evaluating SOI substrate
- Patent number 9,780,006
- Issue date Oct 3, 2017
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for evaluating semiconductor substrate
- Patent number 9,748,151
- Issue date Aug 29, 2017
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate evaluating method, semiconductor substrate...
- Patent number 9,696,368
- Issue date Jul 4, 2017
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bonded substrate and manufacturing method thereof
- Patent number 8,900,971
- Issue date Dec 2, 2014
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing bonded substrate having an insulator layer...
- Patent number 8,877,609
- Issue date Nov 4, 2014
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate having multilayer film and method to reuse...
- Patent number 8,575,722
- Issue date Nov 5, 2013
- Shin-Etsu Handotai Co., Ltd.
- Kiyoshi Mitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for evaluating oxide dielectric breakdown voltage of a silic...
- Patent number 8,551,246
- Issue date Oct 8, 2013
- Shin-Etsu Handotai Co., Ltd.
- Fumio Tahara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for forming oxide film on silicon wafer
- Patent number 8,043,871
- Issue date Oct 25, 2011
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for evaluating semiconductor wafer and apparatus for evaluat...
- Patent number 7,633,305
- Issue date Dec 15, 2009
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for evaluating semiconductor wafer
- Patent number 7,525,327
- Issue date Apr 28, 2009
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- G01 - MEASURING TESTING
Information Patent Grant
Silicon epitaxial wafer and a method for producing it
- Patent number 6,541,117
- Issue date Apr 1, 2003
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING THERMAL OXIDE FILM ON SEMICONDUCTOR SUBSTRATE AN...
- Publication number 20240274477
- Publication date Aug 15, 2024
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi OHTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING NITRIDE SEMICONDUCTOR WAFER
- Publication number 20240162041
- Publication date May 16, 2024
- Shin-Etsu Handotai Co., Ltd.
- Kazunori HAGIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING SEMICONDUCTOR APPARATUS FOR QUANTUM COMPUTER
- Publication number 20230276716
- Publication date Aug 31, 2023
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi OHTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING THERMAL OXIDE FILM ON SEMICONDUCTOR SUBSTRATE
- Publication number 20230268175
- Publication date Aug 24, 2023
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi OHTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING SEMICONDUCTOR APPARATUS AND SEMICONDUCTOR APPA...
- Publication number 20230230926
- Publication date Jul 20, 2023
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi OHTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DRY-ETCHING SEMICONDUCTOR SUBSTRATE AND METHOD FOR DRY-E...
- Publication number 20230207399
- Publication date Jun 29, 2023
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi OHTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING THERMAL OXIDE FILM ON SEMICONDUCTOR SUBSTRATE
- Publication number 20230170208
- Publication date Jun 1, 2023
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi OHTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR EVALUATING SEMICONDUCTOR SUBSTRATE
- Publication number 20220285228
- Publication date Sep 8, 2022
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi OHTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANODIC-OXIDATION EQUIPMENT, ANODIC-OXIDATION METHOD, AND METHOD FOR...
- Publication number 20210238762
- Publication date Aug 5, 2021
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi OHTSUKI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SILICON SINGLE CRYSTAL SUBSTRATE AND SILICON EPITAXIAL WAFER FOR SO...
- Publication number 20210159259
- Publication date May 27, 2021
- Shin-Etsu Handotai Co., Ltd.
- Takao ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR EVALUA...
- Publication number 20190267239
- Publication date Aug 29, 2019
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi OHTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR EVALUATING SOI SUBSTRATE
- Publication number 20170047258
- Publication date Feb 16, 2017
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi OHTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR EVALUATING SEMICONDUCTOR SUBSTRATE
- Publication number 20160365293
- Publication date Dec 15, 2016
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi OHTSUKI
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR SUBSTRATE FOR FLASH LAMP ANNEAL, ANNEAL SUBSTRATE, SE...
- Publication number 20160351415
- Publication date Dec 1, 2016
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi OHTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR EVALUATING A SEMICONDUCTOR WAFER
- Publication number 20160079130
- Publication date Mar 17, 2016
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi OHTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE EVALUATING METHOD, SEMICONDUCTOR SUBSTRATE...
- Publication number 20150145551
- Publication date May 28, 2015
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MANUFACTURING BONDED SUBSTRATE HAVING AN INSULATOR LAYER...
- Publication number 20140120695
- Publication date May 1, 2014
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BONDED SUBSTRATE AND MANUFACTURING METHOD THEREOF
- Publication number 20130341763
- Publication date Dec 26, 2013
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER HAVING MULTILAYER FILM, METHOD FOR PRODUCING TH...
- Publication number 20110266655
- Publication date Nov 3, 2011
- Shin-Etsu Handotai Co., Ltd.
- Kiyoshi Mitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON SINGLE CRYSTAL WAFER AND METHOD FOR MANUFACTURING SILICON S...
- Publication number 20110045246
- Publication date Feb 24, 2011
- Shin-Etsu Handotai Co., Ltd.
- Fumio Tahara
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR FORMING OXIDE FILM ON SILICON WAFER
- Publication number 20110033958
- Publication date Feb 10, 2011
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for evaluating semiconductor wafer
- Publication number 20100022038
- Publication date Jan 28, 2010
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method For Evaluating Soi Wafer
- Publication number 20080054920
- Publication date Mar 6, 2008
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- G01 - MEASURING TESTING
Information Patent Application
Method For Evaluating Semiconductor Wafer And Apparatus For Evaluat...
- Publication number 20070279080
- Publication date Dec 6, 2007
- SHIN-ETSU HANDOTAI CO.,LTD
- Tsuyoshi Ohtsuki
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for Evaluating Semiconductor Wafer
- Publication number 20070273397
- Publication date Nov 29, 2007
- Shin-Etsu Handotai Co., Ltd.
- Tsuyoshi Ohtsuki
- G01 - MEASURING TESTING

Tsuyoshi Ohtsuki

Person

Patents Grantslast 30 patents

Silicon single crystal substrate and silicon epitaxial wafer for so...

Anodic-oxidation equipment, anodic-oxidation method, and method for...

Method for manufacturing semiconductor device and method for evalua...

Method for evaluating a semiconductor wafer

Method for evaluating SOI substrate

Method for evaluating semiconductor substrate

Semiconductor substrate evaluating method, semiconductor substrate...

Bonded substrate and manufacturing method thereof

Method for manufacturing bonded substrate having an insulator layer...

Semiconductor substrate having multilayer film and method to reuse...

Method for evaluating oxide dielectric breakdown voltage of a silic...

Method for forming oxide film on silicon wafer

Method for evaluating semiconductor wafer and apparatus for evaluat...

Apparatus for evaluating semiconductor wafer

Silicon epitaxial wafer and a method for producing it

Patents Applicationslast 30 patents

METHOD FOR FORMING THERMAL OXIDE FILM ON SEMICONDUCTOR SUBSTRATE AN...

METHOD FOR PRODUCING NITRIDE SEMICONDUCTOR WAFER

METHOD FOR PRODUCING SEMICONDUCTOR APPARATUS FOR QUANTUM COMPUTER

METHOD FOR FORMING THERMAL OXIDE FILM ON SEMICONDUCTOR SUBSTRATE

METHOD FOR PRODUCING SEMICONDUCTOR APPARATUS AND SEMICONDUCTOR APPA...

METHOD FOR DRY-ETCHING SEMICONDUCTOR SUBSTRATE AND METHOD FOR DRY-E...

METHOD FOR FORMING THERMAL OXIDE FILM ON SEMICONDUCTOR SUBSTRATE

METHOD FOR EVALUATING SEMICONDUCTOR SUBSTRATE

ANODIC-OXIDATION EQUIPMENT, ANODIC-OXIDATION METHOD, AND METHOD FOR...

SILICON SINGLE CRYSTAL SUBSTRATE AND SILICON EPITAXIAL WAFER FOR SO...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD FOR EVALUA...

METHOD FOR EVALUATING SOI SUBSTRATE

METHOD FOR EVALUATING SEMICONDUCTOR SUBSTRATE

SEMICONDUCTOR SUBSTRATE FOR FLASH LAMP ANNEAL, ANNEAL SUBSTRATE, SE...

METHOD FOR EVALUATING A SEMICONDUCTOR WAFER

SEMICONDUCTOR SUBSTRATE EVALUATING METHOD, SEMICONDUCTOR SUBSTRATE...

METHOD FOR MANUFACTURING BONDED SUBSTRATE HAVING AN INSULATOR LAYER...

BONDED SUBSTRATE AND MANUFACTURING METHOD THEREOF

SEMICONDUCTOR WAFER HAVING MULTILAYER FILM, METHOD FOR PRODUCING TH...

SILICON SINGLE CRYSTAL WAFER AND METHOD FOR MANUFACTURING SILICON S...

METHOD FOR FORMING OXIDE FILM ON SILICON WAFER

Method for evaluating semiconductor wafer

Method For Evaluating Soi Wafer

Method For Evaluating Semiconductor Wafer And Apparatus For Evaluat...

Apparatus for Evaluating Semiconductor Wafer