Tung Yaw Kang

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Taipei, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method for repair of photomasks
- Patent number 7,097,948
- Issue date Aug 29, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wu Hung Ko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Utilizing vacuum ultraviolet (VUV) exposure to remove halos of carb...
- Patent number 6,627,363
- Issue date Sep 30, 2003
- Taiwan Semiconductor Manufacturing Company
- Vincent Wen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Photomask cleaning using vacuum ultraviolet (VUV) light cleaning
- Publication number 20070012335
- Publication date Jan 18, 2007
- Hsiao Chih Chang
- B08 - CLEANING
Information Patent Application
Photomask cleaning using vacuum ultraviolet (VUV) light cleaning
- Publication number 20070012336
- Publication date Jan 18, 2007
- Taiwan Semiconductor Manufacturing Co., LTD
- Yih-Chen Su
- B08 - CLEANING
Information Patent Application
Method for repair of photomasks
- Publication number 20050045584
- Publication date Mar 3, 2005
- Wu Hung Ko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY