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Tuo-Chuan Huang
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Cupertino, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Cleaning of multicompositional etchant residues
Patent number
6,852,242
Issue date
Feb 8, 2005
Zhi-Wen Sun
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Cleaning of multicompositional etchant residues
Publication number
20020117472
Publication date
Aug 29, 2002
APPLIED MATERIALS, INC.
Zhi-Wen Sun
H01 - BASIC ELECTRIC ELEMENTS