Tuung Luoh

Person

Kaohsiung City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor substrate and semiconductor device
- Patent number 10,497,652
- Issue date Dec 3, 2019
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuit device with layered trench conductors
- Patent number 10,388,664
- Issue date Aug 20, 2019
- Macronix International Co., Ltd.
- Yukai Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for detecting defects of wafer by wafer sort
- Patent number 9,869,712
- Issue date Jan 16, 2018
- Macronix International Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring and analyzing surface structure of chip or wafer
- Patent number 9,589,086
- Issue date Mar 7, 2017
- Macronix International Co., Ltd.
- Tuung Luoh
- G02 - OPTICS
Information Patent Grant
Method for detecting an electrical defect of contact/via plugs
- Patent number 9,244,112
- Issue date Jan 26, 2016
- Macronix International Co., Ltd.
- Hsiang-Chou Liao
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam inspection optimization
- Patent number 9,116,108
- Issue date Aug 25, 2015
- Macronix International Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Grant
Method of detecting bitmap failure associated with physical coordinate
- Patent number 9,006,003
- Issue date Apr 14, 2015
- Macronix International Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Grant
Method for fabricating conductive lines of a semiconductor device
- Patent number 8,828,861
- Issue date Sep 9, 2014
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for improving flatness of a layer deposited on polycrystalli...
- Patent number 8,669,184
- Issue date Mar 11, 2014
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Isolation structure, non-volatile memory having the same, and metho...
- Patent number 8,653,592
- Issue date Feb 18, 2014
- Macronix International Co., Ltd.
- Ming-Da Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-line inspection yield prediction system
- Patent number 8,594,963
- Issue date Nov 26, 2013
- Macronix International Co., Ltd.
- Hsiang-Chou Liao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Metal silicide formation
- Patent number 8,580,680
- Issue date Nov 12, 2013
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a deposited material by utilizing a multi-step de...
- Patent number 8,520,194
- Issue date Aug 27, 2013
- Macronix International Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device having plural conductive layers disposed withi...
- Patent number 8,519,541
- Issue date Aug 27, 2013
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methodology for wordline short reduction
- Patent number 8,383,515
- Issue date Feb 26, 2013
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Test pattern for detecting piping in a memory array
- Patent number 8,329,480
- Issue date Dec 11, 2012
- Macronix International Co., Ltd.
- Che-Lun Hung
- G11 - INFORMATION STORAGE
Information Patent Grant
Method of depositing a silicon-containing material by utilizing a m...
- Patent number 8,184,288
- Issue date May 22, 2012
- Macronix International Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Grant
Multivariate monitoring method for plasma process machine
- Patent number 8,085,390
- Issue date Dec 27, 2011
- Macronix International Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Grant
Isolation structure, non-volatile memory having the same, and metho...
- Patent number 8,067,292
- Issue date Nov 29, 2011
- Macronix International Co., Ltd.
- Ming-Da Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
HDP-CVD process, filling-in process utilizing HDP-CVD, and HDP-CVD...
- Patent number 8,034,691
- Issue date Oct 11, 2011
- Macronix International Co., Ltd.
- Tuung Luoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for back end of line processing of semiconducto...
- Patent number 8,003,519
- Issue date Aug 23, 2011
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method for semiconductor element
- Patent number 7,951,707
- Issue date May 31, 2011
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabrication method of electronic device
- Patent number 7,938,972
- Issue date May 10, 2011
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming self-aligned contacts and local interconnects si...
- Patent number 7,888,804
- Issue date Feb 15, 2011
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contact barrier layer deposition process
- Patent number 7,846,835
- Issue date Dec 7, 2010
- Macronix International Co. LTD
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method for use in semiconductor device fabrication
- Patent number 7,629,265
- Issue date Dec 8, 2009
- Macronix International Co., Ltd.
- Chia-Wei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interconnection process
- Patent number 7,625,819
- Issue date Dec 1, 2009
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for eliminating polycide voids through nitrogen implantation
- Patent number 7,517,780
- Issue date Apr 14, 2009
- Macronix International Co., Ltd.
- Ling Wuu Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for metal ARC layer formation
- Patent number 7,498,257
- Issue date Mar 3, 2009
- Macronix International Co., Ltd.
- Hsing-Hua Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming self-aligned contacts and local interconnects si...
- Patent number 7,382,054
- Issue date Jun 3, 2008
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
3D INTEGRATED CIRCUIT DEVICE HAVING A BUTTRESS STRUCTURE FOR RESIST...
- Publication number 20180337140
- Publication date Nov 22, 2018
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D MEMORY DEVICE WITH LAYERED CONDUCTORS
- Publication number 20180269222
- Publication date Sep 20, 2018
- Macronix International Co., Ltd.
- Yukai Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED CIRCUIT DEVICE WITH LAYERED TRENCH CONDUCTORS
- Publication number 20180269225
- Publication date Sep 20, 2018
- Macronix International Co., Ltd.
- Yukai HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ISOLATION STRUCTURE AND METHOD FOR FABRICATING THE SAME
- Publication number 20170076976
- Publication date Mar 16, 2017
- Macronix International Co., Ltd.
- Chin-Tsan Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR CHEMICAL MECHANICAL PLANARIZATION PROCESS PRE...
- Publication number 20160365253
- Publication date Dec 15, 2016
- MACRONIX INTERNATIONAL CO., LTD
- Kuang-Wei CHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR THE SAME
- Publication number 20160351493
- Publication date Dec 1, 2016
- Macronix International Co., Ltd.
- Chien-Lan Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR DETECTING DEFECTS OF WAFER BY WAFER SORT
- Publication number 20160314237
- Publication date Oct 27, 2016
- Macronix International Co., Ltd.
- Tuung Luoh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inspection of inconsistencies in and on semiconductor devices and s...
- Publication number 20160123905
- Publication date May 5, 2016
- Macronix International Co., Ltd.
- Hsiang-Chou Liao
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION METHOD FOR CONTACT BY DIE TO DATABASE
- Publication number 20160110859
- Publication date Apr 21, 2016
- Macronix International Co., Ltd.
- Tuung Luoh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DETECTING AN ELECTRICAL DEFECT OF CONTACT/VIA PLUGS
- Publication number 20150323583
- Publication date Nov 12, 2015
- Macronix International Co., Ltd.
- Hsiang-Chou Liao
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM INSPECTION OPTIMIZATION
- Publication number 20150226687
- Publication date Aug 13, 2015
- Macronix International Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING AND ANALYZING SURFACE STRUCTURE OF CHIP OR WAFER
- Publication number 20150213172
- Publication date Jul 30, 2015
- Macronix International Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Application
IMAGE INSPECTION METHOD OF DIE TO DATABASE
- Publication number 20150110384
- Publication date Apr 23, 2015
- Macronix International Co., Ltd.
- Tuung Luoh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR IMPROVING FLATNESS OF A LAYER DEPOSITED ON POLYCRYSTALLI...
- Publication number 20120190198
- Publication date Jul 26, 2012
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODOLOGY FOR WORDLINE SHORT REDUCTION
- Publication number 20120122296
- Publication date May 17, 2012
- MACRONIX INTERNATIONAL CO., LTD.
- Tuung LUOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL SILICIDE FORMATION
- Publication number 20120104516
- Publication date May 3, 2012
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEST PATTERN FOR DETECTING PIPING IN A MEMORY ARRAY
- Publication number 20120074401
- Publication date Mar 29, 2012
- MACRONIX INTERNATIONAL CO., LTD
- Che-Lun Hung
- G11 - INFORMATION STORAGE
Information Patent Application
ISOLATION STRUCTURE, NON-VOLATILE MEMORY HAVING THE SAME, AND METHO...
- Publication number 20120049269
- Publication date Mar 1, 2012
- Macronix International Co., Ltd.
- Ming-Da Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-LINE INSPECTION YIELD PREDICTION SYSTEM
- Publication number 20120053855
- Publication date Mar 1, 2012
- MACRONIX INTERNATIONAL CO., LTD
- Hsiang-Chou Liao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR FABRICATING CONDUCTIVE LINES
- Publication number 20120043657
- Publication date Feb 23, 2012
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HDP-CVD SYSTEM
- Publication number 20120000423
- Publication date Jan 5, 2012
- Macronix International Co., Ltd.
- Tuung Luoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTACT BARRIER LAYER DEPOSITION PROCESS
- Publication number 20110056432
- Publication date Mar 10, 2011
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HDP-CVD PROCESS, FILLING-IN PROCESS UTILIZING HDP-CVD, AND HDP-CVD...
- Publication number 20100041245
- Publication date Feb 18, 2010
- Macronix International Co., Ltd.
- Tuung Luoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for manufacturing a semiconductor device
- Publication number 20100038786
- Publication date Feb 18, 2010
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APC SYSTEM AND MULTIVARIATE MONITORING METHOD FOR PLASMA PROCESS MA...
- Publication number 20090299668
- Publication date Dec 3, 2009
- MACRONIX Industrial Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Application
ISOLATION STRUCTURE, NON-VOLATILE MEMORY HAVING THE SAME, AND METHO...
- Publication number 20090184343
- Publication date Jul 23, 2009
- Macronix International Co., Ltd.
- Ming-Da Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SELF-ALIGNED CONTACTS AND LOCAL INTERCONNECTS SI...
- Publication number 20090114973
- Publication date May 7, 2009
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metallization process
- Publication number 20090081859
- Publication date Mar 26, 2009
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APC SYSTEM AND MULTIVARIATE MONITORING METHOD FOR PLASMA PROCESS MA...
- Publication number 20090033915
- Publication date Feb 5, 2009
- Macronix International Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Application
Interconnection process
- Publication number 20080299761
- Publication date Dec 4, 2008
- Macronix International Co., Ltd.
- Tuung Luoh
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Semiconductor substrate and semiconductor device

Integrated circuit device with layered trench conductors

Method and system for detecting defects of wafer by wafer sort

Method for measuring and analyzing surface structure of chip or wafer

Method for detecting an electrical defect of contact/via plugs

Electron beam inspection optimization

Method of detecting bitmap failure associated with physical coordinate

Method for fabricating conductive lines of a semiconductor device

Method for improving flatness of a layer deposited on polycrystalli...

Isolation structure, non-volatile memory having the same, and metho...

In-line inspection yield prediction system

Metal silicide formation

Method of forming a deposited material by utilizing a multi-step de...

Semiconductor device having plural conductive layers disposed withi...

Methodology for wordline short reduction

Test pattern for detecting piping in a memory array

Method of depositing a silicon-containing material by utilizing a m...

Multivariate monitoring method for plasma process machine

Isolation structure, non-volatile memory having the same, and metho...

HDP-CVD process, filling-in process utilizing HDP-CVD, and HDP-CVD...

Systems and methods for back end of line processing of semiconducto...

Etching method for semiconductor element

Fabrication method of electronic device

Method for forming self-aligned contacts and local interconnects si...

Contact barrier layer deposition process

Cleaning method for use in semiconductor device fabrication

Interconnection process

Method for eliminating polycide voids through nitrogen implantation

Methods for metal ARC layer formation

Method for forming self-aligned contacts and local interconnects si...

Patents Applicationslast 30 patents

3D INTEGRATED CIRCUIT DEVICE HAVING A BUTTRESS STRUCTURE FOR RESIST...

3D MEMORY DEVICE WITH LAYERED CONDUCTORS

INTEGRATED CIRCUIT DEVICE WITH LAYERED TRENCH CONDUCTORS

ISOLATION STRUCTURE AND METHOD FOR FABRICATING THE SAME

SYSTEM AND METHOD FOR CHEMICAL MECHANICAL PLANARIZATION PROCESS PRE...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR THE SAME

METHOD AND SYSTEM FOR DETECTING DEFECTS OF WAFER BY WAFER SORT

Inspection of inconsistencies in and on semiconductor devices and s...

INSPECTION METHOD FOR CONTACT BY DIE TO DATABASE

METHOD FOR DETECTING AN ELECTRICAL DEFECT OF CONTACT/VIA PLUGS

ELECTRON BEAM INSPECTION OPTIMIZATION

METHOD FOR MEASURING AND ANALYZING SURFACE STRUCTURE OF CHIP OR WAFER

IMAGE INSPECTION METHOD OF DIE TO DATABASE

METHOD FOR IMPROVING FLATNESS OF A LAYER DEPOSITED ON POLYCRYSTALLI...

METHODOLOGY FOR WORDLINE SHORT REDUCTION

METAL SILICIDE FORMATION

TEST PATTERN FOR DETECTING PIPING IN A MEMORY ARRAY

ISOLATION STRUCTURE, NON-VOLATILE MEMORY HAVING THE SAME, AND METHO...

IN-LINE INSPECTION YIELD PREDICTION SYSTEM

METHOD FOR FABRICATING CONDUCTIVE LINES

HDP-CVD SYSTEM

CONTACT BARRIER LAYER DEPOSITION PROCESS

HDP-CVD PROCESS, FILLING-IN PROCESS UTILIZING HDP-CVD, AND HDP-CVD...

Method for manufacturing a semiconductor device

APC SYSTEM AND MULTIVARIATE MONITORING METHOD FOR PLASMA PROCESS MA...

ISOLATION STRUCTURE, NON-VOLATILE MEMORY HAVING THE SAME, AND METHO...

METHOD FOR FORMING SELF-ALIGNED CONTACTS AND LOCAL INTERCONNECTS SI...

Metallization process

APC SYSTEM AND MULTIVARIATE MONITORING METHOD FOR PLASMA PROCESS MA...

Interconnection process