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Patents Grants
last 30 patents
Information
Patent Grant
Structures and manufacture method of electrochemical units
Patent number
10,416,114
Issue date
Sep 17, 2019
Industrial Technology Research Institute
Jui-Chin Chen
G01 - MEASURING TESTING
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
9,368,475
Issue date
Jun 14, 2016
Industrial Technology Research Institute
Shang-Chun Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing through substrate via (TSV), structure and...
Patent number
9,257,322
Issue date
Feb 9, 2016
Industrial Technology Research Institute
Erh-Hao Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
TSV substrate structure and the stacked assembly thereof
Patent number
9,257,338
Issue date
Feb 9, 2016
Industrial Technology Research Institute
Chung-Chih Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
9,093,312
Issue date
Jul 28, 2015
Industrial Technology Research Institute
Shang-Chun Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure with conductive plug in an oxide layer
Patent number
8,445,995
Issue date
May 21, 2013
Industrial Technology Research Institute
Cha-Hsin Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating oxide material layer with openings attached t...
Patent number
8,309,402
Issue date
Nov 13, 2012
Industrial Technology Research Institute
Cha-Hsin Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming shallow trench isolation with silicon oxynitride...
Patent number
6,784,075
Issue date
Aug 31, 2004
Silicon Integrated Systems Corp.
Tzu-Kun Ku
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a metal-oxide semiconductor transistor
Patent number
6,743,690
Issue date
Jun 1, 2004
Silicon Integrated Systems Corp.
Tzu-Kun Ku
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming shallow trench isolation in a semiconductor subst...
Patent number
6,720,235
Issue date
Apr 13, 2004
Silicon Integrated System Corp.
Tzu-Kun Ku
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming a damascene structure
Patent number
6,713,379
Issue date
Mar 30, 2004
Silicon Integrated Systems, Corp.
Tzu-Kun Ku
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
CVD titanium silicide for contact hole plugs
Patent number
6,258,716
Issue date
Jul 10, 2001
Industrial Technology Research Institute
Tzu-Kun Ku
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Insitu formation of TiSi2/TiN bi-layer structures using self-aligne...
Patent number
6,184,135
Issue date
Feb 6, 2001
Industrial Technology Research Institute
Tzu-Kun Ku
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Silicide glue layer for W-CVD plug application
Patent number
6,184,130
Issue date
Feb 6, 2001
Industrial Technology Research Institute
Tzu-Kun Ku
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Insitu formation of TiSi.sub.2 /TiN bi-layer structures using self-...
Patent number
6,071,552
Issue date
Jun 6, 2000
Industrial Technology Research Institute
Tzu-Kun Ku
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
CVD titanium silicide for contract hole plugs
Patent number
5,930,671
Issue date
Jul 27, 1999
Industrial Technology Research Institute
Tzu-Kun Ku
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Insitu formation of TiSi2/TiN bi-layer structures using self-aligne...
Patent number
5,856,237
Issue date
Jan 5, 1999
Industrial Technology Research Institute
Tzu-Kun Ku
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of fabricating a field emission device
Patent number
5,643,032
Issue date
Jul 1, 1997
National Science Council
Huang-Chung Cheng
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
STRUCTURES AND MANUFACTURE METHOD OF ELECTROCHEMICAL UNITS
Publication number
20170343506
Publication date
Nov 30, 2017
Industrial Technology Research Institute
Jui-Chin CHEN
G01 - MEASURING TESTING
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20150294953
Publication date
Oct 15, 2015
Industrial Technology Research Institute
Shang-Chun Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TSV SUBSTRATE STRUCTURE AND THE STACKED ASSEMBLY THEREOF
Publication number
20150155204
Publication date
Jun 4, 2015
Industrial Technology Research Institute
Chung-Chih Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20140346666
Publication date
Nov 27, 2014
Industrial Technology Research Institute
Shang-Chun Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FLATTENING SURFACE OF CONDUCTIVE STRUCTURE AND CONDUCTIVE...
Publication number
20140238725
Publication date
Aug 28, 2014
Industrial Technology Research Institute
Erh-Hao Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
CHIP BONDING STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20140175655
Publication date
Jun 26, 2014
Jui-Chin Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER STACKING STRUCTURE AND METHOD OF MANUFACTURING THE SAME
Publication number
20140175614
Publication date
Jun 26, 2014
Industrial Technology Research Institute
CHUNG-CHIH WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING THROUGH SUBSTRATE VIA (TSV), STRUCTURE AND...
Publication number
20140008800
Publication date
Jan 9, 2014
Industrial Technology Research Institute
Erh-Hao Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THROUGH-SUBSTRATE VIA STRUCTURE
Publication number
20140008652
Publication date
Jan 9, 2014
Industrial Technology Research Institute
TZU-CHIEN HSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL DAMASCENE STRUCTURE HAVING THROUGH SILICON VIA AND MANUFACTURI...
Publication number
20130270713
Publication date
Oct 17, 2013
Industrial Technology Research Institute
Sue-Chen Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TSV SUBSTRATE STRUCTURE AND THE STACKED ASSEMBLY THEREOF
Publication number
20130214390
Publication date
Aug 22, 2013
Industrial Technology Research Institute
Chung-Chih Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THROUGH SUBSTRATE VIA STRUCTURE AND METHOD FOR FABRICATING THE SAME
Publication number
20130161825
Publication date
Jun 27, 2013
Industrial Technology Research Institute
TZU-CHIEN HSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
Publication number
20120322249
Publication date
Dec 20, 2012
Industrial Technology Research Institute
Jui-Chin Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20120139105
Publication date
Jun 7, 2012
Industrial Technology Research Institute
Cha-Hsin Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
Publication number
20120142184
Publication date
Jun 7, 2012
Industrial Technology Research Institute
Cha-Hsin Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TSV SUBSTRATE STRUCTURE AND THE STACKED ASSEMBLY THEREOF
Publication number
20120133030
Publication date
May 31, 2012
Industrial Technology Research Institute
Chung-Chih Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRENCH CAPACITOR STRUCTURES AND METHOD OF MANUFACTURING THE SAME
Publication number
20120127625
Publication date
May 24, 2012
Industrial Technology Research Institute
Chung-Chih Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20120119375
Publication date
May 17, 2012
Industrial Technology Research Institute
Jui-Chin Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of forming shallow trench isolation in a semiconductor subst...
Publication number
20040048442
Publication date
Mar 11, 2004
Tzu-Kun Ku
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING SHALLOW TRENCH ISOLATION IN A SEMICONDUCTOR SUBST...
Publication number
20040048443
Publication date
Mar 11, 2004
Tzu-Kun Ku
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of forming a metal-oxide semiconductor transistor
Publication number
20040048438
Publication date
Mar 11, 2004
Tzu-Kun Ku
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Interconnect structure capped with a metallic barrier layer and met...
Publication number
20030116826
Publication date
Jun 26, 2003
Chen-Chiu Hsue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Interconnect structure manufacturing process
Publication number
20020182850
Publication date
Dec 5, 2002
Chen-Chiu Hsue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Silicide glue layer for W-CVD plug application
Publication number
20010000158
Publication date
Apr 5, 2001
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Tzu-Kun Ku
H01 - BASIC ELECTRIC ELEMENTS