Ulrich Bihr

Person

Kirchheim/Dirgenheim, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-beam particle beam system and method for operating same
- Patent number 12,255,040
- Issue date Mar 18, 2025
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image sensor, position sensor device, lithography system, and metho...
- Patent number 11,262,660
- Issue date Mar 1, 2022
- Carl Zeiss SMT GmbH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi-beam particle beam system
- Patent number 11,239,054
- Issue date Feb 1, 2022
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam particle beam system
- Patent number 10,854,423
- Issue date Dec 1, 2020
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for operating an apparatus
- Patent number 10,838,307
- Issue date Nov 17, 2020
- Carl Zeiss SMT GmbH
- Markus Holz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sensor arrangement for a lithography system, lithography system, an...
- Patent number 10,514,619
- Issue date Dec 24, 2019
- Carl Zeiss SMT GmbH
- Ulrich Bihr
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus and method for operating a lithography apparatus
- Patent number 10,261,424
- Issue date Apr 16, 2019
- Carl Zeiss SMT GmbH
- Udo Dinger
- G02 - OPTICS
Information Patent Grant
Multi-mirror array
- Patent number 10,139,618
- Issue date Nov 27, 2018
- Carl Zeiss SMT GmbH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MULTI-BEAM GENERATING UNIT WITH INCREASED FOCUSING POWER
- Publication number 20240170252
- Publication date May 23, 2024
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM CHARGED PARTICLE SYSTEM AND METHOD OF CONTROLLING THE WO...
- Publication number 20240079207
- Publication date Mar 7, 2024
- Carl Zeiss MultiSEM GmbH
- Michael Behnke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH THROUGHPUT MULTI-BEAM CHARGED PARTICLE INSPECTION SYSTEM WITH...
- Publication number 20230043036
- Publication date Feb 9, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERTAIN IMPROVEMENTS OF MULTI-BEAM GENERATING AND MULTI-BEAM DEFLEC...
- Publication number 20220392734
- Publication date Dec 8, 2022
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING SAME
- Publication number 20210217577
- Publication date Jul 15, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM PARTICLE BEAM SYSTEM
- Publication number 20210066037
- Publication date Mar 4, 2021
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE SENSOR, POSITION SENSOR DEVICE, LITHOGRAPHY SYSTEM, AND METHO...
- Publication number 20200363731
- Publication date Nov 19, 2020
- Carl Zeiss SMT GMBH
- Jan Horn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR OPERATING AN APPARATUS
- Publication number 20190346772
- Publication date Nov 14, 2019
- Carl Zeiss SMT GMBH
- Markus Holz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTI-BEAM PARTICLE BEAM SYSTEM
- Publication number 20190259575
- Publication date Aug 22, 2019
- CARL ZEISS MICROSCOPY GMBH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR ARRANGEMENT FOR A LITHOGRAPHY SYSTEM, LITHOGRAPHY SYSTEM, AN...
- Publication number 20180188656
- Publication date Jul 5, 2018
- Ulrich Bihr
- G02 - OPTICS
Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD FOR OPERATING A LITHOGRAPHY APPARATUS
- Publication number 20180107122
- Publication date Apr 19, 2018
- Carl Zeiss SMT GMBH
- Udo Dinger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTI-MIRROR ARRAY
- Publication number 20180003951
- Publication date Jan 4, 2018
- Carl Zeiss SMT GMBH
- Jan Horn
- G02 - OPTICS

Ulrich Bihr

Person

Patents Grantslast 30 patents

Multi-beam particle beam system and method for operating same

Image sensor, position sensor device, lithography system, and metho...

Multi-beam particle beam system

Multi-beam particle beam system

Apparatus and method for operating an apparatus

Sensor arrangement for a lithography system, lithography system, an...

Lithography apparatus and method for operating a lithography apparatus

Multi-mirror array

Patents Applicationslast 30 patents

MULTI-BEAM GENERATING UNIT WITH INCREASED FOCUSING POWER

MULTI-BEAM CHARGED PARTICLE SYSTEM AND METHOD OF CONTROLLING THE WO...

HIGH THROUGHPUT MULTI-BEAM CHARGED PARTICLE INSPECTION SYSTEM WITH...

CERTAIN IMPROVEMENTS OF MULTI-BEAM GENERATING AND MULTI-BEAM DEFLEC...

MULTI-BEAM PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING SAME

MULTI-BEAM PARTICLE BEAM SYSTEM

IMAGE SENSOR, POSITION SENSOR DEVICE, LITHOGRAPHY SYSTEM, AND METHO...

APPARATUS AND METHOD FOR OPERATING AN APPARATUS

MULTI-BEAM PARTICLE BEAM SYSTEM

SENSOR ARRANGEMENT FOR A LITHOGRAPHY SYSTEM, LITHOGRAPHY SYSTEM, AN...

LITHOGRAPHY APPARATUS AND METHOD FOR OPERATING A LITHOGRAPHY APPARATUS

MULTI-MIRROR ARRAY