Ulrich Kroemer

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Tungsten nitride atomic layer deposition processes
- Patent number 7,745,329
- Issue date Jun 29, 2010
- Applied Materials, Inc.
- Shulin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tungsten nitride atomic layer deposition processes
- Patent number 7,429,516
- Issue date Sep 30, 2008
- Applied Materials, Inc.
- Shulin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclical deposition of tungsten nitride for metal oxide gate electrode
- Patent number 7,115,499
- Issue date Oct 3, 2006
- Applied Materials, Inc.
- Shulin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclical deposition of tungsten nitride for metal oxide gate electrode
- Patent number 6,833,161
- Issue date Dec 21, 2004
- Applied Materials, Inc.
- Shulin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
TUNGSTEN NITRIDE ATOMIC LAYER DEPOSITION PROCESSES
- Publication number 20080305629
- Publication date Dec 11, 2008
- Shulin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNGSTEN NITRIDE ATOMIC LAYER DEPOSITION PROCESSES
- Publication number 20070020924
- Publication date Jan 25, 2007
- Shulin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cyclical deposition of tungsten nitride for metal oxide gate electrode
- Publication number 20050176240
- Publication date Aug 11, 2005
- Shulin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cyclical deposition of tungsten nitride for metal oxide gate electrode
- Publication number 20030161952
- Publication date Aug 28, 2003
- APPLIED MATERIALS, INC.
- Shulin Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...