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Ulrich Naeher
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Munich, DE
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last 30 patents
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Patent Grant
Acceleration sensor
Patent number
5,877,421
Issue date
Mar 2, 1999
Siemens Aktiengesellschaft
Markus Biebl
G01 - MEASURING TESTING
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Patent Grant
Corrosion protection for micromechanical metal layers
Patent number
5,698,112
Issue date
Dec 16, 1997
Siemens Aktiengesellschaft
Ulrich Naeher
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Method for the selective removal of silicon dioxide
Patent number
5,662,772
Issue date
Sep 2, 1997
Siemens Aktiengesellschaft
Thomas Scheiter
H01 - BASIC ELECTRIC ELEMENTS