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195 15 796.6 | Apr 1995 | DEX |
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4749440 | Blackwood et al. | Jun 1988 | |
5022961 | Izumi et al. | Jun 1991 | |
5167761 | Westendorp et al. | Dec 1992 | |
5174855 | Tanaka | Dec 1992 | |
5294568 | McNeilly et al. | Mar 1994 |
Number | Date | Country |
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WO9010729 | Sep 1990 | WOX |
Entry |
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D. Syverson, "An Advanced Dry/Wet Cleaning Process for Silicon Surfaces", Technical Report DC/R/D, TR 369, Jun. 1, 1991, FSI International, pp. 1-7. |