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Ulrich TSCHINDERLE
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Patents Grants
last 30 patents
Information
Patent Grant
Clipping mechanism for fastening a substrate for a surface treatmen...
Patent number
11,942,356
Issue date
Mar 26, 2024
SEMSYSCO GMBH
Andreas Gleissner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer cleaning method and apparatus therefore
Patent number
11,810,796
Issue date
Nov 7, 2023
Lam Research AG
Christoph Semmelrock
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for treating surfaces of wafer-shaped articles
Patent number
10,269,615
Issue date
Apr 23, 2019
Lam Research AG
Ulrich Tschinderle
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Collector for use with an apparatus for treating wafer-shaped articles
Patent number
10,134,611
Issue date
Nov 20, 2018
Lam Research AG
Reinhold Schwarzenbacher
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for treating surfaces of wafer-shaped articles
Patent number
10,056,287
Issue date
Aug 21, 2018
Lam Research AG
Ulrich Tschinderle
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for treating surfaces of wafer-shaped articles and gripping...
Patent number
9,633,890
Issue date
Apr 25, 2017
Lam Research AG
Ulrich Tschinderle
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and method for treating wafer-shaped articles
Patent number
8,974,632
Issue date
Mar 10, 2015
Lam Research AG
Ulrich Tschinderle
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
FRAME SYSTEM FOR HOLDING A SUBSTRATE
Publication number
20240213066
Publication date
Jun 27, 2024
Semsysco GmbH
Ulrich Tschinderle
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLIPPING MECHANISM FOR FASTENING A SUBSTRATE FOR A SURFACE TREATMEN...
Publication number
20230260823
Publication date
Aug 17, 2023
Semsysco GmbH
Andreas Gleissner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER CLEANING METHOD AND APPARATUS THEREFORE
Publication number
20210320016
Publication date
Oct 14, 2021
LAM RESEARCH AG
Christoph SEMMELROCK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
Publication number
20160027680
Publication date
Jan 28, 2016
LAM RESEARCH AG
Ulrich TSCHINDERLE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COLLECTOR FOR USE WITH AN APPARATUS FOR TREATING WAFER-SHAPED ARTICLES
Publication number
20140283935
Publication date
Sep 25, 2014
LAM RESEARCH AG
Reinhold SCHWARZENBACHER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES AND GRIPPING...
Publication number
20130154203
Publication date
Jun 20, 2013
LAM RESEARCH AG
Ulrich TSCHINDERLE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE AND METHOD FOR TREATING WAFER-SHAPED ARTICLES
Publication number
20130134128
Publication date
May 30, 2013
LAM RESEARCH AG
Ulrich TSCHINDERLE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
Publication number
20130101372
Publication date
Apr 25, 2013
LAM RESEARCH AG
Ulrich TSCHINDERLE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
Publication number
20130062839
Publication date
Mar 14, 2013
LAM RESEARCH AG
Ulrich TSCHINDERLE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
Publication number
20120305036
Publication date
Dec 6, 2012
LAM RESEARCH AG
Otto LACH
H01 - BASIC ELECTRIC ELEMENTS