Umesh Kelkar

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Eco-efficiency (sustainability) dashboard for semiconductor manufac...
- Patent number 12,001,197
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Ala Moradian
- G05 - CONTROLLING REGULATING
Information Patent Grant
Heated pedestal design for improved heat transfer and temperature u...
- Patent number 11,830,706
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Protection of aluminum process chamber components
- Patent number 11,810,766
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Karthikeyan Balaraman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Parameter sensing and computer modeling for gas delivery health mon...
- Patent number 11,768,984
- Issue date Sep 26, 2023
- Applied Materials, Inc.
- Ala Moradian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for fabricating chamber parts
- Patent number 11,591,689
- Issue date Feb 28, 2023
- Applied Materials, Inc.
- Mats Larsson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
3D printed chamber components configured for lower film stress and...
- Patent number 11,569,069
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Kadthala R. Narendrnath
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Blocker plate for use in a substrate process chamber
- Patent number 11,421,322
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Xiaoxiong Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Protective layers for processing chamber components
- Patent number 11,239,058
- Issue date Feb 1, 2022
- Applied Materials, Inc.
- Karthikeyan Balaraman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
3D printed chamber components configured for lower film stress and...
- Patent number 10,777,391
- Issue date Sep 15, 2020
- Applied Materials, Inc.
- Kadthala R. Narendrnath
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Showerhead design
- Patent number 10,626,500
- Issue date Apr 21, 2020
- Applied Materials, Inc.
- Kartik Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Blocker plate for use in a substrate process chamber
- Patent number 10,508,339
- Issue date Dec 17, 2019
- Applied Materials, Inc.
- Xiaoxiong Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead design
- Patent number 10,221,483
- Issue date Mar 5, 2019
- Applied Materials, Inc.
- Kartik Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Off-angled heating of the underside of a substrate using a lamp ass...
- Patent number 9,863,038
- Issue date Jan 9, 2018
- Applied Materials, Inc.
- Maurice E. Ewert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Off-angled heating of the underside of a substrate using a lamp ass...
- Patent number 9,818,587
- Issue date Nov 14, 2017
- Applied Materials, Inc.
- Maurice E. Ewert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bias voltage frequency controlled angular ion distribution in plasm...
- Patent number 9,520,267
- Issue date Dec 13, 2016
- Applied Mateirals, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injection apparatus and substrate process chamber incorporating...
- Patent number 9,123,758
- Issue date Sep 1, 2015
- Applied Materials, Inc.
- Agus Sofian Tjandra
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Self-ionized and capacitively-coupled plasma for sputtering and res...
- Patent number 9,062,372
- Issue date Jun 23, 2015
- Applied Materials, Inc.
- Praburam Gopalraja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target for sputtering chamber
- Patent number 8,647,484
- Issue date Feb 11, 2014
- Applied Materials, Inc.
- Alan Alexander Ritchie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Off-angled heating of the underside of a substrate using a lamp ass...
- Patent number 8,404,048
- Issue date Mar 26, 2013
- Applied Materials, Inc.
- Maurice E. Ewert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Self-ionized and capacitively-coupled plasma for sputtering and res...
- Patent number 7,504,006
- Issue date Mar 17, 2009
- Applied Materials, Inc.
- Praburam Gopalraja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron for a vault shaped sputtering target having two opposed s...
- Patent number 6,790,326
- Issue date Sep 14, 2004
- Applied Materials, Inc.
- Anantha Subramani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetron with a rotating center magnet for a vault shaped sputteri...
- Patent number 6,406,599
- Issue date Jun 18, 2002
- Applied Materials, Inc.
- Anantha Subramani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heater for processing chamber
- Patent number 6,350,320
- Issue date Feb 26, 2002
- Applied Materials, Inc.
- Semyon Sherstinsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-intrusive, on-the-fly (OTF) temperature measurement and monitor...
- Patent number 6,190,037
- Issue date Feb 20, 2001
- Applied Materials, Inc.
- Ashok Das
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ECO-EFFICIENCY (SUSTAINABILITY) DASHBOARD FOR SEMICONDUCTOR MANUFAC...
- Publication number 20240310819
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Ala Moradian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLING FLOW IN SUBSTRATE PROCESSING ACCORDING TO PREDICTED COOLING...
- Publication number 20240230189
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Ala Moradian
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
MACHINE AND DEEP LEARNING TECHNIQUES FOR PREDICTING ECOLOGICAL EFFI...
- Publication number 20240210916
- Publication date Jun 27, 2024
- Applied Materials, Inc.
- Orlando Trejo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUSTAINABILITY MONITORING PLATFORM WITH SENSOR SUPPORT
- Publication number 20240012393
- Publication date Jan 11, 2024
- Applied Materials, Inc.
- Ala Moradian
- G05 - CONTROLLING REGULATING
Information Patent Application
ECO-EFFICIENCY MONITORING AND EXPLORATION PLATFORM FOR SEMICONDUCTO...
- Publication number 20230185268
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Ala Moradian
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD FOR FABRICATING CHAMBER PARTS
- Publication number 20230167543
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Mats LARSSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ECO-EFFICIENCY (SUSTAINABILITY) DASHBOARD FOR SEMICONDUCTOR MANUFAC...
- Publication number 20220334569
- Publication date Oct 20, 2022
- Applied Materials, Inc.
- Ala Moradian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID PHYSICS/MACHINE LEARNING MODELING OF PROCESSES
- Publication number 20220245307
- Publication date Aug 4, 2022
- Applied Materials, Inc.
- Prashanth Kothnur
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PARAMETER SENSING AND COMPUTER MODELING FOR GAS DELIVERY HEALTH MON...
- Publication number 20220092241
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- Ala Moradian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
3D PRINTED CHAMBER COMPONENTS CONFIGURED FOR LOWER FILM STRESS AND...
- Publication number 20200365374
- Publication date Nov 19, 2020
- Applied Materials, Inc.
- Kadthala R. NARENDRNATH
- B22 - CASTING POWDER METALLURGY
Information Patent Application
METHOD FOR FABRICATING CHAMBER PARTS
- Publication number 20200270747
- Publication date Aug 27, 2020
- Applied Materials, Inc.
- Mats LARSSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATED PEDESTAL DESIGN FOR IMPROVED HEAT TRANSFER AND TEMPERATURE U...
- Publication number 20200234932
- Publication date Jul 23, 2020
- Applied Materials, Inc.
- Venkata Sharat Chandra PARIMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROTECTIVE LAYERS FOR PROCESSING CHAMBER COMPONENTS
- Publication number 20200020511
- Publication date Jan 16, 2020
- Applied Materials, Inc.
- Karthikeyan BALARAMAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROTECTION OF ALUMINUM PROCESS CHAMBER COMPONENTS
- Publication number 20200013589
- Publication date Jan 9, 2020
- Applied Materials, Inc.
- Karthikeyan BALARAMAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BLOCKER PLATE FOR USE IN A SUBSTRATE PROCESS CHAMBER
- Publication number 20190382895
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- XIAOXIONG YUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD DESIGN
- Publication number 20190194810
- Publication date Jun 27, 2019
- Applied Materials, Inc.
- Kartik SHAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BLOCKER PLATE FOR USE IN A SUBSTRATE PROCESS CHAMBER
- Publication number 20180347043
- Publication date Dec 6, 2018
- Applied Materials, Inc.
- XIAOXIONG YUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
3D PRINTED CHAMBER COMPONENTS CONFIGURED FOR LOWER FILM STRESS AND...
- Publication number 20160233060
- Publication date Aug 11, 2016
- Applied Materials, Inc.
- Kadthala R. NARENDRNATH
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
Lamp Heater For Atomic Layer Deposition
- Publication number 20160068958
- Publication date Mar 10, 2016
- Applied Materials, Inc.
- Umesh M. Kelkar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BIAS VOLTAGE FREQUENCY CONTROLLED ANGULAR ION DISTRIBUTION IN PLASM...
- Publication number 20150371827
- Publication date Dec 24, 2015
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR IMPROVING GAS FLOW IN A SUBSTRATE PROCESSI...
- Publication number 20150345019
- Publication date Dec 3, 2015
- Applied Materials, Inc.
- XIAOXIONG YUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD DESIGN
- Publication number 20150329966
- Publication date Nov 19, 2015
- Applied Materials, Inc.
- Kartik SHAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTION APPARATUS AND SUBSTRATE PROCESS CHAMBER INCORPORATING...
- Publication number 20140216585
- Publication date Aug 7, 2014
- Applied Materials, Inc.
- AGUS SOFIAN TJANDRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OFF-ANGLED HEATING OF THE UNDERSIDE OF A SUBSTRATE USING A LAMP ASS...
- Publication number 20130270107
- Publication date Oct 17, 2013
- APPLIED MATERIALS, INC.
- MAURICE E. EWERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OFF-ANGLED HEATING OF THE UNDERSIDE OF A SUBSTRATE USING A LAMP ASS...
- Publication number 20130196514
- Publication date Aug 1, 2013
- Applied Materials, Inc.
- Maurice E. EWERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OFF-ANGLED HEATING OF THE UNDERSIDE OF A SUBSTRATE USING A LAMP ASS...
- Publication number 20120231633
- Publication date Sep 13, 2012
- Applied Materials, Inc.
- Maurice E. Ewert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR UNIFORM DEPOSITION
- Publication number 20090308732
- Publication date Dec 17, 2009
- Applied Materials, Inc.
- Yong Cao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF-IONIZED AND CAPACITIVELY-COUPLED PLASMA FOR SPUTTERING AND RES...
- Publication number 20080142359
- Publication date Jun 19, 2008
- Applied Materials, Inc.
- Praburam GOPALRAJA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TARGET FOR SPUTTERING CHAMBER
- Publication number 20070170052
- Publication date Jul 26, 2007
- APPLIED MATERIALS, INC.
- Alan Alexander Ritchie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Oblique ion milling of via metallization
- Publication number 20040222082
- Publication date Nov 11, 2004
- APPLIED MATERIALS, INC.
- Praburam Gopalraja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Umesh Kelkar

Person

Patents Grantslast 30 patents

Eco-efficiency (sustainability) dashboard for semiconductor manufac...

Heated pedestal design for improved heat transfer and temperature u...

Protection of aluminum process chamber components

Parameter sensing and computer modeling for gas delivery health mon...

Method for fabricating chamber parts

3D printed chamber components configured for lower film stress and...

Blocker plate for use in a substrate process chamber

Protective layers for processing chamber components

3D printed chamber components configured for lower film stress and...

Showerhead design

Blocker plate for use in a substrate process chamber

Showerhead design

Off-angled heating of the underside of a substrate using a lamp ass...

Off-angled heating of the underside of a substrate using a lamp ass...

Bias voltage frequency controlled angular ion distribution in plasm...

Gas injection apparatus and substrate process chamber incorporating...

Self-ionized and capacitively-coupled plasma for sputtering and res...

Target for sputtering chamber

Off-angled heating of the underside of a substrate using a lamp ass...

Self-ionized and capacitively-coupled plasma for sputtering and res...

Magnetron for a vault shaped sputtering target having two opposed s...

Magnetron with a rotating center magnet for a vault shaped sputteri...

Heater for processing chamber

Non-intrusive, on-the-fly (OTF) temperature measurement and monitor...

Patents Applicationslast 30 patents

ECO-EFFICIENCY (SUSTAINABILITY) DASHBOARD FOR SEMICONDUCTOR MANUFAC...

COOLING FLOW IN SUBSTRATE PROCESSING ACCORDING TO PREDICTED COOLING...

MACHINE AND DEEP LEARNING TECHNIQUES FOR PREDICTING ECOLOGICAL EFFI...

SUSTAINABILITY MONITORING PLATFORM WITH SENSOR SUPPORT

ECO-EFFICIENCY MONITORING AND EXPLORATION PLATFORM FOR SEMICONDUCTO...

METHOD FOR FABRICATING CHAMBER PARTS

ECO-EFFICIENCY (SUSTAINABILITY) DASHBOARD FOR SEMICONDUCTOR MANUFAC...

HYBRID PHYSICS/MACHINE LEARNING MODELING OF PROCESSES

PARAMETER SENSING AND COMPUTER MODELING FOR GAS DELIVERY HEALTH MON...

3D PRINTED CHAMBER COMPONENTS CONFIGURED FOR LOWER FILM STRESS AND...

METHOD FOR FABRICATING CHAMBER PARTS

HEATED PEDESTAL DESIGN FOR IMPROVED HEAT TRANSFER AND TEMPERATURE U...

PROTECTIVE LAYERS FOR PROCESSING CHAMBER COMPONENTS

PROTECTION OF ALUMINUM PROCESS CHAMBER COMPONENTS

BLOCKER PLATE FOR USE IN A SUBSTRATE PROCESS CHAMBER

SHOWERHEAD DESIGN

BLOCKER PLATE FOR USE IN A SUBSTRATE PROCESS CHAMBER

3D PRINTED CHAMBER COMPONENTS CONFIGURED FOR LOWER FILM STRESS AND...

Lamp Heater For Atomic Layer Deposition

BIAS VOLTAGE FREQUENCY CONTROLLED ANGULAR ION DISTRIBUTION IN PLASM...

METHOD AND APPARATUS FOR IMPROVING GAS FLOW IN A SUBSTRATE PROCESSI...

SHOWERHEAD DESIGN

GAS INJECTION APPARATUS AND SUBSTRATE PROCESS CHAMBER INCORPORATING...

OFF-ANGLED HEATING OF THE UNDERSIDE OF A SUBSTRATE USING A LAMP ASS...

OFF-ANGLED HEATING OF THE UNDERSIDE OF A SUBSTRATE USING A LAMP ASS...

OFF-ANGLED HEATING OF THE UNDERSIDE OF A SUBSTRATE USING A LAMP ASS...

APPARATUS AND METHOD FOR UNIFORM DEPOSITION

SELF-IONIZED AND CAPACITIVELY-COUPLED PLASMA FOR SPUTTERING AND RES...

TARGET FOR SPUTTERING CHAMBER

Oblique ion milling of via metallization