Uwe Schellhorn

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Beam control apparatus for an illumination beam and metrology syste...
- Patent number 8,988,752
- Issue date Mar 24, 2015
- Carl Zeiss SMT GmbH
- Marten Krebs
- G02 - OPTICS
Information Patent Grant
Method for calibrating a specimen stage of a metrology system and m...
- Patent number 8,473,237
- Issue date Jun 25, 2013
- Carl Zeiss SMS GmbH
- Alexander Huebel
- G01 - MEASURING TESTING
Information Patent Grant
Method for determination of residual errors
- Patent number 8,416,412
- Issue date Apr 9, 2013
- Carl Zeiss SMS GmbH
- Uwe Schellhorn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for the optical measurement of an optical system...
- Patent number 8,120,763
- Issue date Feb 21, 2012
- Carl Zeiss SMT GmbH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for the optical measurement of an optical system...
- Patent number 7,408,652
- Issue date Aug 5, 2008
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining distortion and/or image surface
- Patent number 7,400,388
- Issue date Jul 15, 2008
- Carl Zeiss SMT AG
- Wolfgang Emer
- G01 - MEASURING TESTING
Information Patent Grant
Phase shifting wavefront interference method
- Patent number 7,119,910
- Issue date Oct 10, 2006
- Carl Zeiss SMT AG
- Uwe Schellhorn
- G01 - MEASURING TESTING
Information Patent Grant
Moire method and measuring system for measuring the distortion of a...
- Patent number 7,019,824
- Issue date Mar 28, 2006
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Moiré method and a system for measuring the distortion of a...
- Patent number 6,816,247
- Issue date Nov 9, 2004
- Carl Zeiss SMT AG
- Joachim Heppner
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20140022524
- Publication date Jan 23, 2014
- Carl Zeiss SMT GMBH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BEAM CONTROL APPARATUS FOR AN ILLUMINATION BEAM AND METROLOGY SYSTE...
- Publication number 20130120820
- Publication date May 16, 2013
- Carl Zeiss SMT GMBH
- Marten Krebs
- G02 - OPTICS
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20120113429
- Publication date May 10, 2012
- Carl Zeiss SMT GMBH
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR CALIBRATING A SPECIMEN STAGE OF A METROLOGY SYSTEM AND M...
- Publication number 20100241384
- Publication date Sep 23, 2010
- CARL ZEISS SMS GMBH
- Alexander Huebel
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR MEASURING THE POSITIONS OF MARKS ON A MASK
- Publication number 20100153059
- Publication date Jun 17, 2010
- Gerd Klose
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DETERMINATION OF RESIDUAL ERRORS
- Publication number 20100097608
- Publication date Apr 22, 2010
- CARL ZEISS SMS GMBH
- Uwe Schellhorn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20090257049
- Publication date Oct 15, 2009
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...
- Publication number 20090021726
- Publication date Jan 22, 2009
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for determining distortion and/or image surface
- Publication number 20060007429
- Publication date Jan 12, 2006
- Carl Zeiss SMT AG
- Wolfgang Emer
- G02 - OPTICS
Information Patent Application
Device and method for the optical measurement of an optical system,...
- Publication number 20050243328
- Publication date Nov 3, 2005
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Moire method and measuring system for measuring the distortion of a...
- Publication number 20050122506
- Publication date Jun 9, 2005
- Carl Zeiss SMT AG
- Ulrich Wegmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Uwe Schellhorn

Person

Patents Grantslast 30 patents

Beam control apparatus for an illumination beam and metrology syste...

Method for calibrating a specimen stage of a metrology system and m...

Method for determination of residual errors

Device and method for the optical measurement of an optical system...

Device and method for the optical measurement of an optical system...

Method for determining distortion and/or image surface

Phase shifting wavefront interference method

Moire method and measuring system for measuring the distortion of a...

Moir&#x000E9; method and a system for measuring the distortion of a...

Patents Applicationslast 30 patents

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

BEAM CONTROL APPARATUS FOR AN ILLUMINATION BEAM AND METROLOGY SYSTE...

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

METHOD FOR CALIBRATING A SPECIMEN STAGE OF A METROLOGY SYSTEM AND M...

APPARATUS AND METHOD FOR MEASURING THE POSITIONS OF MARKS ON A MASK

METHOD FOR DETERMINATION OF RESIDUAL ERRORS

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM...

Method for determining distortion and/or image surface

Device and method for the optical measurement of an optical system,...

Moire method and measuring system for measuring the distortion of a...

Moiré method and a system for measuring the distortion of a...