Vandana Krishnamurthy

Person

Rolla, MO, US

People

Patents Grantslast 30 patents

Information Patent Grant
Adhesion layers for EUV lithography
- Patent number 11,972,948
- Issue date Apr 30, 2024
- Brewer Science, Inc.
- Andrea M. Chacko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-silicon-content wet-removable planarizing layer
- Patent number 11,817,317
- Issue date Nov 14, 2023
- Brewer Science, Inc.
- Ming Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spin-on carbon compositions for lithographic processing
- Patent number RE46841
- Issue date May 15, 2018
- Brewer Science, Inc.
- Vandana Krishnamurthy
Information Patent Grant
Processes to pattern small features for advanced patterning needs
- Patent number 9,960,038
- Issue date May 1, 2018
- Brewer Science, Inc.
- Carlton Ashley Washburn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Silicon hardmask layer for directed self-assembly
- Patent number 9,249,013
- Issue date Feb 2, 2016
- Brewer Science Inc.
- Yubao Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Spin-on carbon compositions for lithographic processing
- Patent number 9,102,129
- Issue date Aug 11, 2015
- Brewer Science Inc.
- Vandana Krishnamurthy
- B32 - LAYERED PRODUCTS
Information Patent Grant
Assist layers for EUV lithography
- Patent number 8,968,989
- Issue date Mar 3, 2015
- Brewer Science Inc.
- Tantiboro Ouattara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Spin-on carbon compositions for lithographic processing
- Patent number 8,895,230
- Issue date Nov 25, 2014
- Brewer Science Inc.
- Vandana Krishnamurthy
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Underlayers for EUV lithography
- Patent number 8,257,910
- Issue date Sep 4, 2012
- Brewer Science Inc.
- Douglas J. Guerrero
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Anti-reflective coating composition with improved spin bowl compati...
- Patent number 6,962,769
- Issue date Nov 8, 2005
- Brewer Science Inc.
- Xie Shao
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Wet-developable anti-reflective compositions
- Patent number 6,872,506
- Issue date Mar 29, 2005
- Brewer Science Inc.
- Charles J. Neef
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Developer-soluble metal alkoxide coatings for microelectronic appli...
- Patent number 6,740,469
- Issue date May 25, 2004
- Brewer Science Inc.
- Vandana Krishnamurthy
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Thermosetting anti-reflective coatings at deep ultraviolet
- Patent number 5,919,599
- Issue date Jul 6, 1999
- Brewer Science, Inc.
- Jim Meador
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Non-subliming mid-UV dyes and ultra-thin organic arcs having differ...
- Patent number 5,892,096
- Issue date Apr 6, 1999
- Brewer Science, Inc.
- Jim D. Meador
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Non-subliming Mid-UV dyes and ultra-thin organic arcs having differ...
- Patent number 5,688,987
- Issue date Nov 18, 1997
- Brewer Science, Inc.
- Jim D. Meador
- C07 - ORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
ADHESION LAYERS FOR EUV LITHOGRAPHY
- Publication number 20240222122
- Publication date Jul 4, 2024
- Brewer Science, Inc.
- Andrea M. Chacko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-SILICON-CONTENT WET-REMOVABLE PLANARIZING LAYER
- Publication number 20210125829
- Publication date Apr 29, 2021
- Brewer Science, Inc.
- Ming Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADHESION LAYERS FOR EUV LITHOGRAPHY
- Publication number 20190385837
- Publication date Dec 19, 2019
- Brewer Science, Inc.
- Andrea M. Chacko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SPIN-ON CARBON COMPOSITIONS FOR LITHOGRAPHIC PROCESSING
- Publication number 20140356593
- Publication date Dec 4, 2014
- Vandana Krishnamurthy
- B32 - LAYERED PRODUCTS
Information Patent Application
SILICON HARDMASK LAYER FOR DIRECTED SELF-ASSEMBLY
- Publication number 20130273330
- Publication date Oct 17, 2013
- BREWER SCIENCE INC.
- Yubao Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ASSIST LAYERS FOR EUV LITHOGRAPHY
- Publication number 20130129995
- Publication date May 23, 2013
- BREWER SCIENCE INC.
- Tantiboro Ouattara
- B82 - NANO-TECHNOLOGY
Information Patent Application
SPIN-ON CARBON COMPOSITIONS FOR LITHOGRAPHIC PROCESSING
- Publication number 20130089716
- Publication date Apr 11, 2013
- BREWER SCIENCE INC.
- Vandana Krishnamurthy
- B32 - LAYERED PRODUCTS
Information Patent Application
PROCESSES TO PATTERN SMALL FEATURES FOR ADVANCED PATTERNING NEEDS
- Publication number 20120164390
- Publication date Jun 28, 2012
- BREWER SCIENCE INC.
- Carlton Ashley Washburn
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Wet-developable anti-reflective compositions
- Publication number 20040058275
- Publication date Mar 25, 2004
- BREWER SCIENCE, INC.
- Charles J. Neef
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Anti-reflective coating composition with improved spin bowl compati...
- Publication number 20040048196
- Publication date Mar 11, 2004
- Xie Shao
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Developer-soluble metal alkoxide coatings for microelectronic appli...
- Publication number 20030235786
- Publication date Dec 25, 2003
- BREWER SCIENCE, INC.
- Vandana Krishnamurthy
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...

Vandana Krishnamurthy

Person

Patents Grantslast 30 patents

Adhesion layers for EUV lithography

High-silicon-content wet-removable planarizing layer

Spin-on carbon compositions for lithographic processing

Processes to pattern small features for advanced patterning needs

Silicon hardmask layer for directed self-assembly

Spin-on carbon compositions for lithographic processing

Assist layers for EUV lithography

Spin-on carbon compositions for lithographic processing

Underlayers for EUV lithography

Anti-reflective coating composition with improved spin bowl compati...

Wet-developable anti-reflective compositions

Developer-soluble metal alkoxide coatings for microelectronic appli...

Thermosetting anti-reflective coatings at deep ultraviolet

Non-subliming mid-UV dyes and ultra-thin organic arcs having differ...

Non-subliming Mid-UV dyes and ultra-thin organic arcs having differ...

Patents Applicationslast 30 patents

ADHESION LAYERS FOR EUV LITHOGRAPHY

HIGH-SILICON-CONTENT WET-REMOVABLE PLANARIZING LAYER

ADHESION LAYERS FOR EUV LITHOGRAPHY

SPIN-ON CARBON COMPOSITIONS FOR LITHOGRAPHIC PROCESSING

SILICON HARDMASK LAYER FOR DIRECTED SELF-ASSEMBLY

ASSIST LAYERS FOR EUV LITHOGRAPHY

SPIN-ON CARBON COMPOSITIONS FOR LITHOGRAPHIC PROCESSING

PROCESSES TO PATTERN SMALL FEATURES FOR ADVANCED PATTERNING NEEDS

Wet-developable anti-reflective compositions

Anti-reflective coating composition with improved spin bowl compati...

Developer-soluble metal alkoxide coatings for microelectronic appli...