Venkata Sharat Chandra PARIMI

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chucking process
- Patent number 12,100,609
- Issue date Sep 24, 2024
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reduced hydrogen deposition processes
- Patent number 12,027,366
- Issue date Jul 2, 2024
- Applied Materials, Inc.
- Xiaoquan Min
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pedestal for substrate processing chambers
- Patent number 12,000,048
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate pedestal for improved substrate processing
- Patent number 11,984,305
- Issue date May 14, 2024
- Applied Materials, Inc.
- Viren Kalsekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas mixer to enable RPS purging
- Patent number 11,862,475
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated pedestal design for improved heat transfer and temperature u...
- Patent number 11,830,706
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reduced defect deposition processes
- Patent number 11,821,082
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Xiaoquan Min
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber components for gas delivery modulation
- Patent number 11,804,363
- Issue date Oct 31, 2023
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck design with improved chucking and arcing perfor...
- Patent number 11,682,574
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Abdul Aziz Khaja
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cover wafer for semiconductor processing chamber
- Patent number 11,682,544
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Targeted heat control systems
- Patent number 11,600,470
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal for substrate processing chambers
- Patent number 11,584,994
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate pedestal for improved substrate processing
- Patent number 11,587,773
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Viren Kalsekar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radiation shield modification for improving substrate temperature u...
- Patent number 11,515,129
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Elizabeth Neville
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Backside gas leakby for bevel deposition reduction
- Patent number 11,495,483
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective deposition of hardmask
- Patent number 10,923,334
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Satya Thokachichu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK DESIGN WITH IMPROVED CHUCKING AND ARCING PERFOR...
- Publication number 20230298922
- Publication date Sep 21, 2023
- Applied Materials, Inc.
- Abdul Aziz KHAJA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEDESTAL FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20230203659
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Sarah Michelle BOBEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PEDESTAL FOR IMPROVED SUBSTRATE PROCESSING
- Publication number 20230147452
- Publication date May 11, 2023
- Applied Materials, Inc.
- Viren KALSEKAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS TO ELIMINATE OF DEPOSITION ON WAFER BEVEL AND BACKSIDE
- Publication number 20220199373
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING CHAMBER DEPOSITION CONFINEMENT
- Publication number 20220130650
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BACKSIDE GAS LEAKBY FOR BEVEL DEPOSITION REDUCTION
- Publication number 20220122870
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS MIXER TO ENABLE RPS PURGING
- Publication number 20220122851
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COVER WAFER FOR SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20220122822
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- B08 - CLEANING
Information Patent Application
MODULAR ZONE CONTROL FOR A PROCESSING CHAMBER
- Publication number 20220108891
- Publication date Apr 7, 2022
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR FACEPLATE TEMPERATURE CONTROL
- Publication number 20220020612
- Publication date Jan 20, 2022
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR SUBSTRATE SUPPORT WITH WAFER BACKSIDE DAMAGE CONTROL
- Publication number 20210287924
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Jian Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TARGETED HEAT CONTROL SYSTEMS
- Publication number 20210202218
- Publication date Jul 1, 2021
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADIATION SHIELD MODIFICATION FOR IMPROVING SUBSTRATE TEMPERATURE U...
- Publication number 20210166921
- Publication date Jun 3, 2021
- Applied Materials, Inc.
- Elizabeth Neville
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL RF FOR CONTROLLABLE FILM DEPOSITION
- Publication number 20210159048
- Publication date May 27, 2021
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REDUCED HYDROGEN DEPOSITION PROCESSES
- Publication number 20210143010
- Publication date May 13, 2021
- Applied Materials, Inc.
- Xiaoquan Min
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER COMPONENTS FOR GAS DELIVERY MODULATION
- Publication number 20210142984
- Publication date May 13, 2021
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCED DEFECT DEPOSITION PROCESSES
- Publication number 20210130949
- Publication date May 6, 2021
- Applied Materials, Inc.
- Xiaoquan Min
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PEDESTAL FOR IMPROVED SUBSTRATE PROCESSING
- Publication number 20200373132
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Viren KALSEKAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCKING PROCESS
- Publication number 20200328063
- Publication date Oct 15, 2020
- Applied Materials, Inc.
- Sarah Michelle BOBEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND TOOL FOR ELECTROSTATIC CHUCKING
- Publication number 20200249263
- Publication date Aug 6, 2020
- Applied Materials, Inc.
- Lu XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATED PEDESTAL DESIGN FOR IMPROVED HEAT TRANSFER AND TEMPERATURE U...
- Publication number 20200234932
- Publication date Jul 23, 2020
- Applied Materials, Inc.
- Venkata Sharat Chandra PARIMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTAL FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20200224310
- Publication date Jul 16, 2020
- Applied Materials, Inc.
- Sarah Michelle BOBEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK DESIGN WITH IMPROVED CHUCKING AND ARCING PERFOR...
- Publication number 20200176296
- Publication date Jun 4, 2020
- Applied Materials, Inc.
- Abdul Aziz KHAJA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUE TO ENABLE HIGH TEMPERATURE CLEAN FOR RAPID PROCESSING OF...
- Publication number 20190382889
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- Venkata Sharat Chandra PARIMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF HARDMASK
- Publication number 20190341227
- Publication date Nov 7, 2019
- Applied Materials, Inc.
- Satya THOKACHICHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Venkata Sharat Chandra PARIMI

Person

Patents Grantslast 30 patents

Electrostatic chucking process

Reduced hydrogen deposition processes

Pedestal for substrate processing chambers

Substrate pedestal for improved substrate processing

Gas mixer to enable RPS purging

Heated pedestal design for improved heat transfer and temperature u...

Reduced defect deposition processes

Chamber components for gas delivery modulation

Electrostatic chuck design with improved chucking and arcing perfor...

Cover wafer for semiconductor processing chamber

Targeted heat control systems

Pedestal for substrate processing chambers

Substrate pedestal for improved substrate processing

Radiation shield modification for improving substrate temperature u...

Backside gas leakby for bevel deposition reduction

Selective deposition of hardmask

Patents Applicationslast 30 patents

ELECTROSTATIC CHUCK DESIGN WITH IMPROVED CHUCKING AND ARCING PERFOR...

PEDESTAL FOR SUBSTRATE PROCESSING CHAMBERS

SUBSTRATE PEDESTAL FOR IMPROVED SUBSTRATE PROCESSING

METHODS TO ELIMINATE OF DEPOSITION ON WAFER BEVEL AND BACKSIDE

PROCESSING CHAMBER DEPOSITION CONFINEMENT

BACKSIDE GAS LEAKBY FOR BEVEL DEPOSITION REDUCTION

GAS MIXER TO ENABLE RPS PURGING

COVER WAFER FOR SEMICONDUCTOR PROCESSING CHAMBER

MODULAR ZONE CONTROL FOR A PROCESSING CHAMBER

SYSTEMS AND METHODS FOR FACEPLATE TEMPERATURE CONTROL

SEMICONDUCTOR SUBSTRATE SUPPORT WITH WAFER BACKSIDE DAMAGE CONTROL

TARGETED HEAT CONTROL SYSTEMS

RADIATION SHIELD MODIFICATION FOR IMPROVING SUBSTRATE TEMPERATURE U...

DUAL RF FOR CONTROLLABLE FILM DEPOSITION

REDUCED HYDROGEN DEPOSITION PROCESSES

CHAMBER COMPONENTS FOR GAS DELIVERY MODULATION

REDUCED DEFECT DEPOSITION PROCESSES

SUBSTRATE PEDESTAL FOR IMPROVED SUBSTRATE PROCESSING

ELECTROSTATIC CHUCKING PROCESS

METHOD AND TOOL FOR ELECTROSTATIC CHUCKING

HEATED PEDESTAL DESIGN FOR IMPROVED HEAT TRANSFER AND TEMPERATURE U...

PEDESTAL FOR SUBSTRATE PROCESSING CHAMBERS

ELECTROSTATIC CHUCK DESIGN WITH IMPROVED CHUCKING AND ARCING PERFOR...

TECHNIQUE TO ENABLE HIGH TEMPERATURE CLEAN FOR RAPID PROCESSING OF...

SELECTIVE DEPOSITION OF HARDMASK