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Vijay Kumar BADAM
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last 30 patents
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Patent Grant
Apparatus for liquid treatment of disc-shaped articles and heating...
Patent number
9,748,120
Issue date
Aug 29, 2017
Lam Research AG
Kevin Matthew Crabb
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Apparatus for liquid treatment of wafer shaped articles and heating...
Patent number
9,685,358
Issue date
Jun 20, 2017
Lam Research AG
Ante Plazonic
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Method and apparatus for liquid treatment of wafer shaped articles
Patent number
9,316,443
Issue date
Apr 19, 2016
Lam Research AG
Karl-Heinz Hohenwarter
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Grant
Apparatus for liquid treatment of wafer shaped articles and heating...
Patent number
9,245,777
Issue date
Jan 26, 2016
Lam Research AG
Ante Plazonic
F27 - FURNACES KILNS OVENS RETORTS
Patents Applications
last 30 patents
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Patent Application
APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES AND HEATING...
Publication number
20160118278
Publication date
Apr 28, 2016
LAM RESEARCH AG
Ante Plazonic
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR LIQUID TREATMENT OF DISC-SHAPED ARTICLES AND HEATING...
Publication number
20150001202
Publication date
Jan 1, 2015
LAM RESEARCH AG
Kevin Matthew CRABB
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES AND HEATING...
Publication number
20140339215
Publication date
Nov 20, 2014
LAM RESEARCH AG
Ante PLAZONIC
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
Publication number
20140054280
Publication date
Feb 27, 2014
LAM RESEARCH AG
Karl-Heinz HOHENWARTER
H01 - BASIC ELECTRIC ELEMENTS