Vikram Singh

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for differential in situ cleaning
- Patent number 10,730,082
- Issue date Aug 4, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Glen F R Gilchrist
- B08 - CLEANING
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 10,600,616
- Issue date Mar 24, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radio frequency extraction system for charge neutralized ion beam
- Patent number 10,224,181
- Issue date Mar 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mobile electronic device cover plate comprising a thin sapphire layer
- Patent number 10,209,405
- Issue date Feb 19, 2019
- GTAT Corporation
- Thomas Gutierrez
- B32 - LAYERED PRODUCTS
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 10,128,082
- Issue date Nov 13, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 10,004,133
- Issue date Jun 19, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for modifying substrate relief features using ion...
- Patent number 9,767,987
- Issue date Sep 19, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 9,706,634
- Issue date Jul 11, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for efficient materials use during substrate p...
- Patent number 9,589,769
- Issue date Mar 7, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Vijayakumar C. Venugopal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control of ion angular distribution of ion beams with hidden deflec...
- Patent number 9,514,912
- Issue date Dec 6, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for plasma processing a substrate
- Patent number 9,123,509
- Issue date Sep 1, 2015
- Varian Semiconductor Equipment Associates, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for controllably implanting workpieces
- Patent number 8,937,004
- Issue date Jan 20, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Plasma processing with enhanced charge neutralization and process c...
- Patent number 8,926,850
- Issue date Jan 6, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Vikram Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsed plasma to affect conformal processing
- Patent number 8,877,654
- Issue date Nov 4, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Helen Maynard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced etch and deposition profile control using plasma sheath en...
- Patent number 8,858,816
- Issue date Oct 14, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- B44 - DECORATIVE ARTS
Information Patent Grant
Method and system for modifying substrate relief features using ion...
- Patent number 8,778,603
- Issue date Jul 15, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Technique for processing a substrate having a non-planar surface
- Patent number 8,679,960
- Issue date Mar 25, 2014
- Varian Semiconductor Equipment Associates, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for selectively controlling ion composition of io...
- Patent number 8,664,561
- Issue date Mar 4, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Kamal Hadidi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 8,664,098
- Issue date Mar 4, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced etch and deposition profile control using plasma sheath en...
- Patent number 8,603,591
- Issue date Dec 10, 2013
- Varian Semiconductor Ewuipment Associates, Inc.
- Ludovic Godet
- B44 - DECORATIVE ARTS
Information Patent Grant
Method for processing a substrate having a non-planar substrate sur...
- Patent number 8,507,372
- Issue date Aug 13, 2013
- Varian Semiconductor Equipment Associates, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Patterned magnetic bit data storage media and a method for manufact...
- Patent number 8,460,748
- Issue date Jun 11, 2013
- Varian Seminconductor Equipment Associates, Inc.
- Frank Sinclair
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method for controllably implanting workpieces
- Patent number 8,461,030
- Issue date Jun 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Techniques for temperature-controlled ion implantation
- Patent number 8,450,193
- Issue date May 28, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Jonathan Gerald England
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of processing a substrate having a non-planar surface
- Patent number 8,202,792
- Issue date Jun 19, 2012
- Varian Semiconductor Equipment Associates, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source
- Patent number 8,188,445
- Issue date May 29, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
Information Patent Grant
Method for enhancing tensile stress and source/drain activation usi...
- Patent number 8,124,487
- Issue date Feb 28, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Helen L. Maynard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 8,101,510
- Issue date Jan 24, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Implantation of multiple species to address copper reliability
- Patent number 7,863,194
- Issue date Jan 4, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Heyun Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-step plasma doping with improved dose control
- Patent number 7,820,533
- Issue date Oct 26, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Timothy Miller
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MICROWAVE APPARATUS AND METHOD FOR PRODUCTION OF CARBON MATERIALS
- Publication number 20250019241
- Publication date Jan 16, 2025
- 6K Inc.
- Jared Majcher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR MULTI-LEVEL PULSING IN RF PLASMA TOOLS
- Publication number 20220216038
- Publication date Jul 7, 2022
- LAM RESEARCH CORPORATION
- Ying Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20190006149
- Publication date Jan 3, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus And Method For Differential In Situ Cleaning
- Publication number 20180111171
- Publication date Apr 26, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Glen FR Gilchrist
- B08 - CLEANING
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20170311430
- Publication date Oct 26, 2017
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIO FREQUENCY EXTRACTION SYSTEM FOR CHARGE NEUTRALIZED ION BEAM
- Publication number 20170309453
- Publication date Oct 26, 2017
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20170042010
- Publication date Feb 9, 2017
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20170025252
- Publication date Jan 26, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL OF ION ANGULAR DISTRIBUTION OF ION BEAMS WITH HIDDEN DEFLEC...
- Publication number 20160071693
- Publication date Mar 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR EFFICIENT MATERIALS USE DURING SUBSTRATE P...
- Publication number 20160013030
- Publication date Jan 14, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Vijayakumar C. Venugopal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD OF GROWING SILICON INGOTS FROM SEEDS IN A CRUCIBL...
- Publication number 20150191846
- Publication date Jul 9, 2015
- GTAT Corporation
- Ian T. Witting
- C30 - CRYSTAL GROWTH
Information Patent Application
MOBILE ELECTRONIC DEVICE COVER PLATE COMPRISING A THIN SAPPHIRE LAYER
- Publication number 20140355126
- Publication date Dec 4, 2014
- GTAT Corporation
- Thomas Gutierrez
- B32 - LAYERED PRODUCTS
Information Patent Application
METHOD AND SYSTEM FOR MODIFYING SUBSTRATE RELIEF FEATURES USING ION...
- Publication number 20140306127
- Publication date Oct 16, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED ETCH AND DEPOSITION PROFILE CONTROL USING PLASMA SHEATH EN...
- Publication number 20140034611
- Publication date Feb 6, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- B44 - DECORATIVE ARTS
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLABLY IMPLANTING WORKPIECES
- Publication number 20130234034
- Publication date Sep 12, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PLASMA PROCESSING WITH ENHANCED CHARGE NEUTRALIZATION AND PROCESS C...
- Publication number 20130092529
- Publication date Apr 18, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Vikram Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PROCESSING A SUBSTRATE HAVING A NON-PLANAR SUBSTRATE SUR...
- Publication number 20120295430
- Publication date Nov 22, 2012
- Varian Semiconductor Equipment Associates, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20120111834
- Publication date May 10, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL APPARATUS FOR PLASMA IMMERSION ION IMPLANTATION OF A DIELEC...
- Publication number 20120000421
- Publication date Jan 5, 2012
- VARIAN SEMICONDUTOR EQUIPMENT ASSOCIATES, INC.
- Timothy Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR PLASMA PROCESSING A SUBSTRATE
- Publication number 20110309049
- Publication date Dec 22, 2011
- Varian Semiconductor Equipment Associates, Inc.
- George D. PAPASOULIOTIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pulsed Plasma to Affect Conformal Processing
- Publication number 20110256732
- Publication date Oct 20, 2011
- Varian Semiconductor Equipment Associates
- Helen Maynard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR MODIFYING SUBSTRATE RELIEF FEATURES USING ION...
- Publication number 20110223546
- Publication date Sep 15, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ION SOURCE
- Publication number 20110186749
- Publication date Aug 4, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLABLY IMPLANTING WORKPIECES
- Publication number 20110124186
- Publication date May 26, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PATTERNED MAGNETIC BIT DATA STORAGE MEDIA AND A METHOD FOR MANUFACT...
- Publication number 20110111159
- Publication date May 12, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Frank SINCLAIR
- G11 - INFORMATION STORAGE
Information Patent Application
Technique for Processing a Substrate Having a Non-Planar Surface
- Publication number 20110086501
- Publication date Apr 14, 2011
- Varian Semiconductor Equipment Associates, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSED DEPOSITION AND RECRYSTALLIZATION AND TANDEM SOLAR CELL DESIG...
- Publication number 20110039034
- Publication date Feb 17, 2011
- Helen Maynard
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
SYSTEM AND METHOD FOR SELECTIVELY CONTROLLING ION COMPOSITION OF IO...
- Publication number 20110000896
- Publication date Jan 6, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Kamal Hadidi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING A SUBSTRATE HAVING A NON-PLANAR SURFACE
- Publication number 20100273322
- Publication date Oct 28, 2010
- Varian Semiconductor Equipment Associates, Inc.
- George D. Papasouliotis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Enhanced Etch and Deposition Profile Control Using Plasma Sheath En...
- Publication number 20100252531
- Publication date Oct 7, 2010
- Ludovic Godet
- B44 - DECORATIVE ARTS

Vikram Singh

Person

Patents Grantslast 30 patents

Apparatus and method for differential in situ cleaning

Apparatus and techniques to treat substrates using directional plas...

Radio frequency extraction system for charge neutralized ion beam

Mobile electronic device cover plate comprising a thin sapphire layer

Apparatus and techniques to treat substrates using directional plas...

Apparatus and techniques to treat substrates using directional plas...

Method and system for modifying substrate relief features using ion...

Apparatus and techniques to treat substrates using directional plas...

Apparatus and method for efficient materials use during substrate p...

Control of ion angular distribution of ion beams with hidden deflec...

Techniques for plasma processing a substrate

Apparatus and method for controllably implanting workpieces

Plasma processing with enhanced charge neutralization and process c...

Pulsed plasma to affect conformal processing

Enhanced etch and deposition profile control using plasma sheath en...

Method and system for modifying substrate relief features using ion...

Technique for processing a substrate having a non-planar surface

System and method for selectively controlling ion composition of io...

Plasma processing apparatus

Enhanced etch and deposition profile control using plasma sheath en...

Method for processing a substrate having a non-planar substrate sur...

Patterned magnetic bit data storage media and a method for manufact...

Apparatus and method for controllably implanting workpieces

Techniques for temperature-controlled ion implantation

Method of processing a substrate having a non-planar surface

Ion source

Method for enhancing tensile stress and source/drain activation usi...

Plasma processing apparatus

Implantation of multiple species to address copper reliability

Multi-step plasma doping with improved dose control

Patents Applicationslast 30 patents

MICROWAVE APPARATUS AND METHOD FOR PRODUCTION OF CARBON MATERIALS

SYSTEMS AND METHODS FOR MULTI-LEVEL PULSING IN RF PLASMA TOOLS

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

Apparatus And Method For Differential In Situ Cleaning

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

RADIO FREQUENCY EXTRACTION SYSTEM FOR CHARGE NEUTRALIZED ION BEAM

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

CONTROL OF ION ANGULAR DISTRIBUTION OF ION BEAMS WITH HIDDEN DEFLEC...

APPARATUS AND METHOD FOR EFFICIENT MATERIALS USE DURING SUBSTRATE P...

SYSTEM AND METHOD OF GROWING SILICON INGOTS FROM SEEDS IN A CRUCIBL...

MOBILE ELECTRONIC DEVICE COVER PLATE COMPRISING A THIN SAPPHIRE LAYER

METHOD AND SYSTEM FOR MODIFYING SUBSTRATE RELIEF FEATURES USING ION...

ENHANCED ETCH AND DEPOSITION PROFILE CONTROL USING PLASMA SHEATH EN...

APPARATUS AND METHOD FOR CONTROLLABLY IMPLANTING WORKPIECES

PLASMA PROCESSING WITH ENHANCED CHARGE NEUTRALIZATION AND PROCESS C...

METHOD FOR PROCESSING A SUBSTRATE HAVING A NON-PLANAR SUBSTRATE SUR...

PLASMA PROCESSING APPARATUS

CONTROL APPARATUS FOR PLASMA IMMERSION ION IMPLANTATION OF A DIELEC...

TECHNIQUES FOR PLASMA PROCESSING A SUBSTRATE

Pulsed Plasma to Affect Conformal Processing

METHOD AND SYSTEM FOR MODIFYING SUBSTRATE RELIEF FEATURES USING ION...

ION SOURCE

APPARATUS AND METHOD FOR CONTROLLABLY IMPLANTING WORKPIECES

PATTERNED MAGNETIC BIT DATA STORAGE MEDIA AND A METHOD FOR MANUFACT...

Technique for Processing a Substrate Having a Non-Planar Surface

PULSED DEPOSITION AND RECRYSTALLIZATION AND TANDEM SOLAR CELL DESIG...

SYSTEM AND METHOD FOR SELECTIVELY CONTROLLING ION COMPOSITION OF IO...

METHOD OF PROCESSING A SUBSTRATE HAVING A NON-PLANAR SURFACE

Enhanced Etch and Deposition Profile Control Using Plasma Sheath En...