Vince Burkhart

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck (ESC) pedestal voltage isolation
- Patent number 11,990,360
- Issue date May 21, 2024
- Lam Research Corporation
- Miguel Benjamin Vasquez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protective coating for electrostatic chucks
- Patent number 11,835,868
- Issue date Dec 5, 2023
- Lam Research Corporation
- Stephen Topping
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatuses and methods for avoiding electrical breakdown from RF t...
- Patent number 11,784,027
- Issue date Oct 10, 2023
- Lam Research Corporation
- Hyungjoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature RF connection with integral thermal choke
- Patent number 11,469,084
- Issue date Oct 11, 2022
- Lam Research Corporation
- Timothy S. Thomas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods for avoiding electrical breakdown from RF t...
- Patent number 11,264,207
- Issue date Mar 1, 2022
- Lam Research Corporation
- Hyungjoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chucking pedestal with substrate backside purging and...
- Patent number 11,232,966
- Issue date Jan 25, 2022
- Lam Research Corporation
- Timothy S. Thomas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for filtering radio frequencies from a signal o...
- Patent number 11,189,452
- Issue date Nov 30, 2021
- Lam Research Corporation
- Vince Burkhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF tuning systems including tuning circuits having impedances for s...
- Patent number 11,183,368
- Issue date Nov 23, 2021
- Lam Research Corporation
- David French
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Protective coating for electrostatic chucks
- Patent number 11,086,233
- Issue date Aug 10, 2021
- Lam Research Corporation
- Stephen Topping
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with increasing areal density and corresponding m...
- Patent number 10,832,936
- Issue date Nov 10, 2020
- Lam Research Corporation
- Peter Woytowitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods for avoiding electrical breakdown from RF t...
- Patent number 10,636,624
- Issue date Apr 28, 2020
- Lam Research Corporation
- Hyungjoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods for avoiding electrical breakdown from RF t...
- Patent number 10,373,805
- Issue date Aug 6, 2019
- Lam Research Corporation
- Hyungjoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for filtering radio frequencies from a signal o...
- Patent number 10,373,794
- Issue date Aug 6, 2019
- Lam Research Corporation
- Vince Burkhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses and methods for avoiding electrical breakdown from RF t...
- Patent number 10,043,636
- Issue date Aug 7, 2018
- Lam Research Corporation
- Hyungjoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery
- Patent number 9,447,499
- Issue date Sep 20, 2016
- Novellus Systems, Inc.
- Shambhu N. Roy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature electrostatic chuck with radial thermal chokes
- Patent number 9,337,067
- Issue date May 10, 2016
- Novellus Systems, Inc.
- Shambhu N. Roy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma ignition performance for low pressure physical vapor deposit...
- Patent number 9,111,733
- Issue date Aug 18, 2015
- Novellus Systems Inc.
- Martin Freeborn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK (ESC) PEDESTAL VOLTAGE ISOLATION
- Publication number 20240266202
- Publication date Aug 8, 2024
- LAM RESEARCH CORPORATION
- Miguel Benjamin Vasquez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOOL FOR PREVENTING OR SUPPRESSING ARCING
- Publication number 20230416922
- Publication date Dec 28, 2023
- LAM RESEARCH CORPORATION
- Yukinori SAKIYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF T...
- Publication number 20230420218
- Publication date Dec 28, 2023
- LAM RESEARCH CORPORATION
- Hyungjoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE PEDESTAL WITH EXTENDED ELECTROSTATIC CHUCK ELECTRODE
- Publication number 20230369091
- Publication date Nov 16, 2023
- LAM RESEARCH CORPORATION
- Feng BI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE SUBSTRATE SUPPORT WITH HEAT SPREADER
- Publication number 20230073259
- Publication date Mar 9, 2023
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH TEMPERATURE RF CONNECTION WITH INTEGRAL THERMAL CHOKE
- Publication number 20220415620
- Publication date Dec 29, 2022
- LAM RESEARCH CORPORATION
- Timothy S. THOMAS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POWER SOURCE ISOLATION CIRCUITS FOR HEATER ELEMENTS OF SUBSTRATE SU...
- Publication number 20220367229
- Publication date Nov 17, 2022
- LAM RESEARCH CORPORATION
- Vincent BURKHART
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF T...
- Publication number 20220139670
- Publication date May 5, 2022
- LAM RESEARCH CORPORATION
- Hyungjoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR FILTERING RADIO FREQUENCIES FROM A SIGNAL O...
- Publication number 20220084776
- Publication date Mar 17, 2022
- LAM RESEARCH CORPORATION
- Vincent BURKHART
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF TUNING SYSTEMS INCLUDING TUNING CIRCUITS HAVING IMPEDANCES FOR S...
- Publication number 20220044909
- Publication date Feb 10, 2022
- LAM RESEARCH CORPORATION
- David French
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROTECTIVE COATING FOR ELECTROSTATIC CHUCKS
- Publication number 20210333715
- Publication date Oct 28, 2021
- LAM RESEARCH CORPORATION
- Stephen TOPPING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK (ESC) PEDESTAL VOLTAGE ISOLATION
- Publication number 20210043490
- Publication date Feb 11, 2021
- LAM RESEARCH CORPORATION
- Miguel Benjamin Vasquez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF T...
- Publication number 20200251307
- Publication date Aug 6, 2020
- LAM RESEARCH CORPORATION
- Hyungjoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION TOOL FOR PREVENTING OR SUPPRESSING ARCING
- Publication number 20200048770
- Publication date Feb 13, 2020
- LAM RESEARCH CORPORATION
- Yukinori SAKIYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF TUNING SYSTEMS INCLUDING TUNING CIRCUITS HAVING IMPEDANCES FOR S...
- Publication number 20200043703
- Publication date Feb 6, 2020
- LAM RESEARCH CORPORATION
- David French
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF T...
- Publication number 20200027700
- Publication date Jan 23, 2020
- LAM RESEARCH CORPORATION
- Hyungjoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems And Methods For Filtering Radio Frequencies From A Signal O...
- Publication number 20190348250
- Publication date Nov 14, 2019
- LAM RESEARCH CORPORATION
- Vince Burkhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROTECTIVE COATING FOR ELECTROSTATIC CHUCKS
- Publication number 20190294050
- Publication date Sep 26, 2019
- LAM RESEARCH CORPORATION
- Stephen TOPPING
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTROSTATIC CHUCKING PEDESTAL WITH SUBSTRATE BACKSIDE PURGING AND...
- Publication number 20190237353
- Publication date Aug 1, 2019
- LAM RESEARCH CORPORATION
- Timothy S. THOMAS
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
HIGH TEMPERATURE RF CONNECTION WITH INTEGRAL THERMAL CHOKE
- Publication number 20190071778
- Publication date Mar 7, 2019
- LAM RESEARCH CORPORATION
- Timothy S. Thomas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF T...
- Publication number 20180323037
- Publication date Nov 8, 2018
- LAM RESEARCH CORPORATION
- Hyungjoon Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH INCREASING AREAL DENSITY AND CORRESPONDING M...
- Publication number 20180033672
- Publication date Feb 1, 2018
- LAM RESEARCH CORPORATION
- Peter Woytowitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatuses And Methods For Avoiding Electrical Breakdown From RF T...
- Publication number 20170169995
- Publication date Jun 15, 2017
- LAM RESEARCH CORPORATION
- Hyungjoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR FILTERING RADIO FREQUENCIES FROM A SIGNAL O...
- Publication number 20170125200
- Publication date May 4, 2017
- LAM RESEARCH CORPORATION
- Vince Burkhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR UNIFORM IRRADIATION USING SECONDARY IRRADI...
- Publication number 20150163860
- Publication date Jun 11, 2015
- LAM RESEARCH CORPORATION
- Vincent E. Burkhart
- G02 - OPTICS
Information Patent Application
DUAL PLENUM, AXI-SYMMETRIC SHOWERHEAD WITH EDGE-TO-CENTER GAS DELIVERY
- Publication number 20130341433
- Publication date Dec 26, 2013
- Shambhu N. Roy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE ELECTROSTATIC CHUCK WITH RADIAL THERMAL CHOKES
- Publication number 20120285658
- Publication date Nov 15, 2012
- Shambhu N. Roy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA IGNITION PERFORMANCE FOR LOW PRESSURE PHYSICAL VAPOR DEPOSIT...
- Publication number 20110048924
- Publication date Mar 3, 2011
- NOVELLUS SYSTEMS INC.
- Martin Freeborn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Vince Burkhart

Person

Patents Grantslast 30 patents

Electrostatic chuck (ESC) pedestal voltage isolation

Protective coating for electrostatic chucks

Apparatuses and methods for avoiding electrical breakdown from RF t...

High temperature RF connection with integral thermal choke

Apparatuses and methods for avoiding electrical breakdown from RF t...

Electrostatic chucking pedestal with substrate backside purging and...

Systems and methods for filtering radio frequencies from a signal o...

RF tuning systems including tuning circuits having impedances for s...

Protective coating for electrostatic chucks

Substrate support with increasing areal density and corresponding m...

Apparatuses and methods for avoiding electrical breakdown from RF t...

Apparatuses and methods for avoiding electrical breakdown from RF t...

Systems and methods for filtering radio frequencies from a signal o...

Apparatuses and methods for avoiding electrical breakdown from RF t...

Dual plenum, axi-symmetric showerhead with edge-to-center gas delivery

High temperature electrostatic chuck with radial thermal chokes

Plasma ignition performance for low pressure physical vapor deposit...

Patents Applicationslast 30 patents

ELECTROSTATIC CHUCK (ESC) PEDESTAL VOLTAGE ISOLATION

TOOL FOR PREVENTING OR SUPPRESSING ARCING

APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF T...

HIGH TEMPERATURE PEDESTAL WITH EXTENDED ELECTROSTATIC CHUCK ELECTRODE

HIGH TEMPERATURE SUBSTRATE SUPPORT WITH HEAT SPREADER

HIGH TEMPERATURE RF CONNECTION WITH INTEGRAL THERMAL CHOKE

POWER SOURCE ISOLATION CIRCUITS FOR HEATER ELEMENTS OF SUBSTRATE SU...

APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF T...

SYSTEMS AND METHODS FOR FILTERING RADIO FREQUENCIES FROM A SIGNAL O...

RF TUNING SYSTEMS INCLUDING TUNING CIRCUITS HAVING IMPEDANCES FOR S...

PROTECTIVE COATING FOR ELECTROSTATIC CHUCKS

ELECTROSTATIC CHUCK (ESC) PEDESTAL VOLTAGE ISOLATION

APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF T...

CHEMICAL VAPOR DEPOSITION TOOL FOR PREVENTING OR SUPPRESSING ARCING

RF TUNING SYSTEMS INCLUDING TUNING CIRCUITS HAVING IMPEDANCES FOR S...

APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF T...

Systems And Methods For Filtering Radio Frequencies From A Signal O...

PROTECTIVE COATING FOR ELECTROSTATIC CHUCKS

ELECTROSTATIC CHUCKING PEDESTAL WITH SUBSTRATE BACKSIDE PURGING AND...

HIGH TEMPERATURE RF CONNECTION WITH INTEGRAL THERMAL CHOKE

APPARATUSES AND METHODS FOR AVOIDING ELECTRICAL BREAKDOWN FROM RF T...

SUBSTRATE SUPPORT WITH INCREASING AREAL DENSITY AND CORRESPONDING M...

Apparatuses And Methods For Avoiding Electrical Breakdown From RF T...

SYSTEMS AND METHODS FOR FILTERING RADIO FREQUENCIES FROM A SIGNAL O...

APPARATUS AND METHOD FOR UNIFORM IRRADIATION USING SECONDARY IRRADI...

DUAL PLENUM, AXI-SYMMETRIC SHOWERHEAD WITH EDGE-TO-CENTER GAS DELIVERY

HIGH TEMPERATURE ELECTROSTATIC CHUCK WITH RADIAL THERMAL CHOKES

PLASMA IGNITION PERFORMANCE FOR LOW PRESSURE PHYSICAL VAPOR DEPOSIT...