Vinh Dang

Follow

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Valve control system for atomic layer deposition chamber
- Patent number 7,201,803
- Issue date Apr 10, 2007
- Applied Materials, Inc.
- Siqing Lu
- G05 - CONTROLLING REGULATING
Information Patent Grant
Valve control system for atomic layer deposition chamber
- Patent number 6,734,020
- Issue date May 11, 2004
- Applied Materials, Inc.
- Siqing Lu
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Valve control system for atomic layer deposition chamber
- Publication number 20040143370
- Publication date Jul 22, 2004
- Siqing Lu
- G05 - CONTROLLING REGULATING
Information Patent Application
Valve control system for atomic layer deposition chamber
- Publication number 20020127745
- Publication date Sep 12, 2002
- Siqing Lu
- G05 - CONTROLLING REGULATING