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Vinyu Greenlee
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Gilbert, AZ, US
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last 30 patents
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Patent Grant
Lithographic apparatus and method
Patent number
7,675,606
Issue date
Mar 9, 2010
ASML Netherlands B.V.
Enno Van Den Brink
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
Lithographic apparatus and method
Publication number
20090128792
Publication date
May 21, 2009
ASML NETHERLANDS B.V.
Rudy Jan, Maria Pellens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Lithographic apparatus and method
Publication number
20070258080
Publication date
Nov 8, 2007
ASML NETHERLANDS B.V.
Enno Van Den Brink
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY