Vladimir B. Fleurov

Person

Escondido, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for buffer gas flow stabilization in a laser pr...
- Patent number 9,516,730
- Issue date Dec 6, 2016
- ASML Netherlands B.V.
- Vladimir B. Fleurov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods and apparatus for laser produced plasma EUV light source
- Patent number 9,271,381
- Issue date Feb 23, 2016
- ASML Netherlands B.V.
- Vladimir B. Fleurov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Beam position control for an extreme ultraviolet light source
- Patent number 9,167,679
- Issue date Oct 20, 2015
- ASML Netherlands B.V.
- Vladimir B. Fleurov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Thermal monitor for an extreme ultraviolet light source
- Patent number 9,148,941
- Issue date Sep 29, 2015
- ASML Netherlands B.V.
- Vladimir Fleurov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Systems and methods for optics cleaning in an EUV light source
- Patent number 9,000,404
- Issue date Apr 7, 2015
- ASML Netherlands, B.V.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Beam position control for an extreme ultraviolet light source
- Patent number 9,000,405
- Issue date Apr 7, 2015
- ASML Netherlands B.V.
- Vladimir B. Fleurov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
6 KHz and above gas discharge laser system
- Patent number 8,855,166
- Issue date Oct 7, 2014
- Cymer, LLC
- Richard C. Ujazdowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for optics cleaning in an EUV light source
- Patent number 8,633,459
- Issue date Jan 21, 2014
- Cymer, LLC
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Immersion lithography laser light source with pulse stretcher
- Patent number 7,643,528
- Issue date Jan 5, 2010
- Cymer, Inc.
- William N. Partlo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automatic gas control system for a gas discharge laser
- Patent number 6,963,595
- Issue date Nov 8, 2005
- Cymer, Inc.
- John A. Rule
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High power deep ultraviolet laser with long life optics
- Patent number 6,904,073
- Issue date Jun 7, 2005
- Cymer, Inc.
- Thomas A. Yager
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Four KHz gas discharge laser
- Patent number 6,757,316
- Issue date Jun 29, 2004
- Cymer, Inc.
- Peter C. Newman
- G01 - MEASURING TESTING
Information Patent Grant
ArF laser with low pulse energy and high rep rate
- Patent number 6,553,049
- Issue date Apr 22, 2003
- Cymer, Inc.
- Herve A. Besaucele
- G01 - MEASURING TESTING
Information Patent Grant
Gas discharge laser long life electrodes
- Patent number 6,466,602
- Issue date Oct 15, 2002
- Cymer, Inc.
- Vladimir B. Fleurov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electric discharge laser with acoustic chirp correction
- Patent number 6,317,447
- Issue date Nov 13, 2001
- Cymer, Inc.
- William N. Partlo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
BEAM POSITION CONTROL FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20150257246
- Publication date Sep 10, 2015
- ASML NETHERLANDS B.V.
- Vladimir B. Fleurov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS AND APPARATUS FOR LASER PRODUCED PLASMA EUV LIGHT SOURCE
- Publication number 20150230325
- Publication date Aug 13, 2015
- CYMER, LLC
- Vladimir B. Fleurov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
BEAM POSITION CONTROL FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20140264091
- Publication date Sep 18, 2014
- Vladimir B. Fleurov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Thermal Monitor For An Extreme Ultraviolet Light Source
- Publication number 20140203195
- Publication date Jul 24, 2014
- Cymer, Inc.
- Vladimir Fleurov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEMS AND METHODS FOR OPTICS CLEANING IN AN EUV LIGHT SOURCE
- Publication number 20140110609
- Publication date Apr 24, 2014
- CYMER, LLC
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEMS AND METHODS FOR BUFFER GAS FLOW STABILIZATION IN A LASER PR...
- Publication number 20120313016
- Publication date Dec 13, 2012
- Vladimir B. Fleurov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEMS AND METHODS FOR OPTICS CLEANING IN AN EUV LIGHT SOURCE
- Publication number 20120223256
- Publication date Sep 6, 2012
- Cymer, Inc.
- Alexander N. Bykanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
6 KHZ AND ABOVE GAS DISCHARGE LASER SYSTEM
- Publication number 20120120974
- Publication date May 17, 2012
- Richard C. Ujazdowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Immersion lithography laser light source with pulse stretcher
- Publication number 20100074295
- Publication date Mar 25, 2010
- Cymer, Inc.
- William N. Partlo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion lithography laser light source with pulse stretcher
- Publication number 20090080476
- Publication date Mar 26, 2009
- Cymer, Inc.
- William N. Partlo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
6 Khz and above gas discharge laser system
- Publication number 20060222034
- Publication date Oct 5, 2006
- Cymer, Inc.
- Richard C. Ujazdowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LLP EUV drive laser
- Publication number 20060146906
- Publication date Jul 6, 2006
- Cymer, Inc.
- Daniel J.W. Brown
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Automatic gas control system for a gas discharge laser
- Publication number 20040022293
- Publication date Feb 5, 2004
- John A. Rule
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
High power deep ultraviolet laser with long life optics
- Publication number 20030219056
- Publication date Nov 27, 2003
- Thomas A. Yager
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Four KHz gas discharge laser
- Publication number 20020021728
- Publication date Feb 21, 2002
- Peter C. Newman
- G01 - MEASURING TESTING

Vladimir B. Fleurov

Person

Patents Grantslast 30 patents

Systems and methods for buffer gas flow stabilization in a laser pr...

Methods and apparatus for laser produced plasma EUV light source

Beam position control for an extreme ultraviolet light source

Thermal monitor for an extreme ultraviolet light source

Systems and methods for optics cleaning in an EUV light source

Beam position control for an extreme ultraviolet light source

6 KHz and above gas discharge laser system

Systems and methods for optics cleaning in an EUV light source

Immersion lithography laser light source with pulse stretcher

Automatic gas control system for a gas discharge laser

High power deep ultraviolet laser with long life optics

Four KHz gas discharge laser

ArF laser with low pulse energy and high rep rate

Gas discharge laser long life electrodes

Electric discharge laser with acoustic chirp correction

Patents Applicationslast 30 patents

BEAM POSITION CONTROL FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

METHODS AND APPARATUS FOR LASER PRODUCED PLASMA EUV LIGHT SOURCE

BEAM POSITION CONTROL FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

Thermal Monitor For An Extreme Ultraviolet Light Source

SYSTEMS AND METHODS FOR OPTICS CLEANING IN AN EUV LIGHT SOURCE

SYSTEMS AND METHODS FOR BUFFER GAS FLOW STABILIZATION IN A LASER PR...

SYSTEMS AND METHODS FOR OPTICS CLEANING IN AN EUV LIGHT SOURCE

6 KHZ AND ABOVE GAS DISCHARGE LASER SYSTEM

Immersion lithography laser light source with pulse stretcher

Immersion lithography laser light source with pulse stretcher

6 Khz and above gas discharge laser system

LLP EUV drive laser

Automatic gas control system for a gas discharge laser

High power deep ultraviolet laser with long life optics

Four KHz gas discharge laser