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Vladimir Nagorny
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Patents Grants
last 30 patents
Information
Patent Grant
Digital control of plasma processing
Patent number
12,068,134
Issue date
Aug 20, 2024
Applied Materials, Inc.
Vladimir Nagorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Edge ring
Patent number
D1034491
Issue date
Jul 9, 2024
Applied Materials, Inc.
Kin Pong Lo
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Image-based digital control of plasma processing
Patent number
12,027,426
Issue date
Jul 2, 2024
Applied Materials, Inc.
Vladimir Nagorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing with independent temperature control
Patent number
11,854,770
Issue date
Dec 26, 2023
Applied Materials, Inc.
Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma sources and plasma processing apparatus thereof
Patent number
11,658,006
Issue date
May 23, 2023
Applied Materials, Inc.
Vladimir Nagorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film thickness uniformity improvement using edge ring and bias elec...
Patent number
11,380,575
Issue date
Jul 5, 2022
Applied Materials, Inc.
Kin Pong Lo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma strip tool with uniformity control
Patent number
11,201,036
Issue date
Dec 14, 2021
Beijing E-Town Semiconductor Technology Co., Ltd.
Shawming Ma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin film treatment process
Patent number
10,971,357
Issue date
Apr 6, 2021
Applied Materials, Inc.
Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus with post plasma gas injection
Patent number
10,790,119
Issue date
Sep 29, 2020
Mattson Technology, Inc.
Shawming Ma
B08 - CLEANING
Information
Patent Grant
Controlling azimuthal uniformity of etch process in plasma processi...
Patent number
10,297,457
Issue date
May 21, 2019
Mattson Technology, Inc.
Vladimir Nagorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for protection of vacuum seals in plasma processi...
Patent number
10,049,858
Issue date
Aug 14, 2018
Mattson Technology, Inc.
Vladimir Nagorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inductively coupled plasma source for plasma processing
Patent number
9,653,264
Issue date
May 16, 2017
Mattson Technology, Inc.
Vladimir Nagorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High efficiency plasma source
Patent number
9,214,319
Issue date
Dec 15, 2015
Mattson Technology, Inc.
Vladimir Nagorny
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Workpiece support with fluid zones for temperature control
Patent number
7,972,444
Issue date
Jul 5, 2011
Mattson Technology, Inc.
Martin L. Zucker
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
UNIFORM PLASMA PROCESSING WITH A LINEAR PLASMA SOURCE
Publication number
20240355592
Publication date
Oct 24, 2024
Applied Materials, Inc.
Vladimir Nagorny
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PLASMA GENERATOR FOR EDGE UNIFORMITY
Publication number
20240170261
Publication date
May 23, 2024
Applied Materials, Inc.
Vladimir NAGORNY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING WITH INDEPENDENT TEMPERATURE CONTROL
Publication number
20240170263
Publication date
May 23, 2024
Applied Materials, Inc.
Wei LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADDITION OF EXTERNAL ULTRAVIOLET LIGHT FOR IMPROVED PLASMA STRIKE C...
Publication number
20240162011
Publication date
May 16, 2024
Applied Materials, Inc.
Eric Kihara SHONO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STACKABLE PLASMA SOURCE FOR PLASMA PROCESSING
Publication number
20230411121
Publication date
Dec 21, 2023
Applied Materials, Inc.
Vladimir Nagorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STACKABLE PLASMA SOURCE FOR PLASMA PROCESSING
Publication number
20230411122
Publication date
Dec 21, 2023
Applied Materials, Inc.
Vladimir Nagorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA SOURCES AND PLASMA PROCESSING APPARATUS THEREOF
Publication number
20230369017
Publication date
Nov 16, 2023
Applied Materials, Inc.
Vladimir NAGORNY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF MANUFACTURING PLASMA GENERATING CELLS FOR A PLASMA SOURCE
Publication number
20230319971
Publication date
Oct 5, 2023
Applied Materials, Inc.
David John Jorgensen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA SOURCE FOR SEMICONDUCTOR PROCESSING
Publication number
20230238221
Publication date
Jul 27, 2023
Applied Materials, Inc.
Vladimir Nagorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UNIFORMITY CONTROL FOR PLASMA PROCESSING USING WALL RECOMBINATION
Publication number
20230215702
Publication date
Jul 6, 2023
Applied Materials, Inc.
Vladimir Nagorny
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PLASMA PROCESSING WITH TUNABLE NITRIDATION
Publication number
20230127138
Publication date
Apr 27, 2023
Applied Materials, Inc.
Wei LIU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
UNIFORMITY CONTROL FOR PLASMA PROCESSING
Publication number
20230033827
Publication date
Feb 2, 2023
Applied Materials, Inc.
Vladimir Nagorny
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
FILM THICKNESS UNIFORMITY IMPROVEMENT USING EDGE RING AND BIAS ELEC...
Publication number
20220301920
Publication date
Sep 22, 2022
Applied Materials, Inc.
Kin Pong LO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ADDRESSABLE PLASMA DELIVERY METHODS AND DEVICES
Publication number
20220262607
Publication date
Aug 18, 2022
Applied Materials, Inc.
Vladimir Nagorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIGITAL CONTROL OF PLASMA PROCESSING
Publication number
20220246403
Publication date
Aug 4, 2022
Applied Materials, Inc.
Vladimir Nagorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMAGE-BASED DIGITAL CONTROL OF PLASMA PROCESSING
Publication number
20220246409
Publication date
Aug 4, 2022
Applied Materials, Inc.
Vladimir Nagorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING WITH INDEPENDENT TEMPERATURE CONTROL
Publication number
20220223381
Publication date
Jul 14, 2022
Applied Materials, Inc.
Wei LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA SOURCES AND PLASMA PROCESSING APPARATUS THEREOF
Publication number
20220223374
Publication date
Jul 14, 2022
Applied Materials, Inc.
Vladimir NAGORNY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW CURRENT HIGH ION ENERGY PLASMA CONTROL SYSTEM
Publication number
20220108874
Publication date
Apr 7, 2022
Applied Materials, Inc.
Vladimir Nagorny
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA SOURCE FOR SEMICONDUCTOR PROCESSING
Publication number
20220028663
Publication date
Jan 27, 2022
Applied Materials, Inc.
Vladimir Nagorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM THICKNESS UNIFORMITY IMPROVEMENT USING EDGE RING AND BIAS ELEC...
Publication number
20220028656
Publication date
Jan 27, 2022
Applied Materials, Inc.
Kin Pong LO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Strip Tool with Multiple Gas Injection
Publication number
20210398775
Publication date
Dec 23, 2021
Mattson Technology, Inc.
Shawming Ma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Processing Apparatus With Post Plasma Gas Injection
Publication number
20210005431
Publication date
Jan 7, 2021
Mattson Technology, Inc.
Shawming Ma
B08 - CLEANING
Information
Patent Application
THIN FILM TREATMENT PROCESS
Publication number
20200111659
Publication date
Apr 9, 2020
Applied Materials, Inc.
Wei LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Controlling Azimuthal Uniformity of Etch Process in Plasma Processi...
Publication number
20190244825
Publication date
Aug 8, 2019
Mattson Technology, Inc.
Vladimir Nagorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Strip Tool With Multiple Gas Injection Zones
Publication number
20180358204
Publication date
Dec 13, 2018
Mattson Technology, Inc.
Shawming Ma
B08 - CLEANING
Information
Patent Application
Plasma Processing Apparatus
Publication number
20180358206
Publication date
Dec 13, 2018
Mattson Technology, Inc.
Shawming Ma
B08 - CLEANING
Information
Patent Application
Plasma Processing Apparatus With Post Plasma Gas Injection
Publication number
20180358208
Publication date
Dec 13, 2018
Mattson Technology, Inc.
Shawming Ma
B08 - CLEANING
Information
Patent Application
Plasma Strip Tool With Uniformity Control
Publication number
20180358210
Publication date
Dec 13, 2018
Mattson Technology, Inc.
Shawming Ma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Separation Grid for Plasma Chamber
Publication number
20180053628
Publication date
Feb 22, 2018
Mattson Technology, Inc.
Vijay M. Vaniapura
H01 - BASIC ELECTRIC ELEMENTS