VLADIMIR SAMARA

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LEUVEN, BE

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for real-time monitoring of plasma etch unifor...
- Patent number 9,847,262
- Issue date Dec 19, 2017
- Imec VZW
- Vladimir Samara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR REAL-TIME MONITORING OF PLASMA ETCH UNIFOR...
- Publication number 20160181165
- Publication date Jun 23, 2016
- IMEC vzw
- Vladimir Samara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROBE AND METHOD FOR PLASMA DIAGNOSTICS
- Publication number 20120283973
- Publication date Nov 8, 2012
- IMEC
- VLADIMIR SAMARA
- G01 - MEASURING TESTING