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Vladimir V. Makarov
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Palo Alto, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
FIB milling of copper over organic dielectrics
Patent number
7,883,630
Issue date
Feb 8, 2011
DCG Systems, Inc.
Vladimir V. Makarov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
FIB milling of copper over organic dielectrics
Patent number
7,060,196
Issue date
Jun 13, 2006
Credence Systems Corporation
Vladimir V. Makarov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process for charged particle beam micro-machining of copper
Patent number
6,824,655
Issue date
Nov 30, 2004
Credence Systems Corporation
Vladimir V. Makarov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
FIB MILLING OF COPPER OVER ORGANIC DIELECTRICS
Publication number
20090114851
Publication date
May 7, 2009
Vladimir V. Makarov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FIB MILLING OF COPPER OVER ORGANIC DIELECTRICS
Publication number
20060219949
Publication date
Oct 5, 2006
Credence Systems Corporation
Vladimir V. Makarov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FIB milling of copper over organic dielectrics
Publication number
20050072756
Publication date
Apr 7, 2005
Vladimir V. Makarov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for surface preparation to enable uniform etching of polycry...
Publication number
20040084407
Publication date
May 6, 2004
NPTEST, INC.
Vladimir V. Makarov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for surface preparation to enable uniform etching of polycry...
Publication number
20040084408
Publication date
May 6, 2004
NPTEST, INC.
Vladimir V. Makarov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process for charged particle beam micro-machining of copper
Publication number
20030038113
Publication date
Feb 27, 2003
Vladimir V. Makarov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...