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Volker Boegli
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Rossdorf, DE
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Patent Grant
Technique for writing with a raster scanned beam
Patent number
6,828,570
Issue date
Dec 7, 2004
Applied Materials, Inc.
Lee H. Veneklasen
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Technique for writing with a raster scanned beam
Publication number
20030183782
Publication date
Oct 2, 2003
Lee H. Veneklasen
B82 - NANO-TECHNOLOGY