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Process for cleaning CVD units
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Patent number 6,656,376
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Issue date Dec 2, 2003
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Siemens Aktiengesellschaft
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Elke Fritsch
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Structuring method
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Patent number 6,454,956
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Issue date Sep 24, 2002
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Infineon Technologies AG
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Manfred Engelhardt
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H01 - BASIC ELECTRIC ELEMENTS
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Structuring method
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Patent number 6,315,913
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Issue date Nov 13, 2001
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Infineon Technologies AG
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Manfred Engelhardt
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H01 - BASIC ELECTRIC ELEMENTS
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Structuring process
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Patent number 6,296,777
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Issue date Oct 2, 2001
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Infineon Technologies AG
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Manfred Engelhardt
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H01 - BASIC ELECTRIC ELEMENTS
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