W. Thomas Novak

Person

Hillsborough, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid jet and recovery system for immersion lithography
- Patent number 10,185,222
- Issue date Jan 22, 2019
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 9,910,370
- Issue date Mar 6, 2018
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid jet and recovery system for immersion lithography
- Patent number 9,785,057
- Issue date Oct 10, 2017
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 9,632,427
- Issue date Apr 25, 2017
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Boresight error monitor for laser radar integrated optical assembly
- Patent number 9,587,977
- Issue date Mar 7, 2017
- Nikon Corporation
- Daniel G. Smith
- G01 - MEASURING TESTING
Information Patent Grant
Liquid jet and recovery system for immersion lithography
- Patent number 9,304,409
- Issue date Apr 5, 2016
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 9,244,363
- Issue date Jan 26, 2016
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement of autofocus elements for use with immersion li...
- Patent number 9,086,636
- Issue date Jul 21, 2015
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Image segmentation from focus varied images using graph cuts
- Patent number 9,025,043
- Issue date May 5, 2015
- Nikon Corporation
- Li Hong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithography apparatus with hydrophilic region encircling...
- Patent number 9,007,561
- Issue date Apr 14, 2015
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement of autofocus elements for use with immersion li...
- Patent number 8,953,250
- Issue date Feb 10, 2015
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement assembly including a metrology system and a pointer tha...
- Patent number 8,937,725
- Issue date Jan 20, 2015
- Nikon Corporation
- W. Thomas Novak
- G01 - MEASURING TESTING
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 8,830,443
- Issue date Sep 9, 2014
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement of autofocus elements for use with immersion li...
- Patent number 8,810,915
- Issue date Aug 19, 2014
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement of autofocus elements for use with immersion li...
- Patent number 8,599,488
- Issue date Dec 3, 2013
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Large scale metrology apparatus and method
- Patent number 8,582,119
- Issue date Nov 12, 2013
- Nikon Corporation
- W. Thomas Novak
- G01 - MEASURING TESTING
Information Patent Grant
Cleanup method for optics in immersion lithography supplying cleani...
- Patent number 8,493,545
- Issue date Jul 23, 2013
- Nikon Corporation
- Hidemi Kawai
- B08 - CLEANING
Information Patent Grant
Lyophobic run-off path to collect liquid for an immersion lithograp...
- Patent number 8,243,253
- Issue date Aug 14, 2012
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement of autofocus elements for use with immersion li...
- Patent number 8,094,379
- Issue date Jan 10, 2012
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cleanup method for optics in immersion lithography using sonic device
- Patent number 8,085,381
- Issue date Dec 27, 2011
- Nikon Corporation
- Hidemi Kawai
- B08 - CLEANING
Information Patent Grant
Liquid jet and recovery system for immersion lithography
- Patent number 8,059,258
- Issue date Nov 15, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement of autofocus elements for use with immersion li...
- Patent number 8,018,657
- Issue date Sep 13, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 7,969,552
- Issue date Jun 28, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 7,965,376
- Issue date Jun 21, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid jet and recovery system for immersion lithography
- Patent number 7,932,989
- Issue date Apr 26, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 7,929,111
- Issue date Apr 19, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 7,929,110
- Issue date Apr 19, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Image apparatus with image noise compensation
- Patent number 7,889,207
- Issue date Feb 15, 2011
- Nikon Corporation
- Li Hong
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Stage assembly with lightweight fine stage and low transmissibility
- Patent number 7,869,000
- Issue date Jan 11, 2011
- Nikon Corporation
- Yoichi Arai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid jet and recovery system for immersion lithography
- Patent number 7,821,615
- Issue date Oct 26, 2010
- Nikon Corporation
- W. Thomas Novak

Patents Applicationslast 30 patents

Information Patent Application
LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY
- Publication number 20190129311
- Publication date May 2, 2019
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION...
- Publication number 20180164703
- Publication date Jun 14, 2018
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY
- Publication number 20180024442
- Publication date Jan 25, 2018
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION...
- Publication number 20170219940
- Publication date Aug 3, 2017
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY
- Publication number 20160209762
- Publication date Jul 21, 2016
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION...
- Publication number 20160085160
- Publication date Mar 24, 2016
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RUN-OFF PATH TO COLLECT LIQUID FOR AN IMMERSION LITHOGRAPHY APPARATUS
- Publication number 20150177628
- Publication date Jun 25, 2015
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ARRANGEMENT OF AUTOFOCUS ELEMENTS FOR USE WITH IMMERSION LI...
- Publication number 20150109595
- Publication date Apr 23, 2015
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE BRAKING SYSTEM FOR A MOTOR
- Publication number 20150098074
- Publication date Apr 9, 2015
- Nikon Corporation
- Matthew Rosa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION...
- Publication number 20140354967
- Publication date Dec 4, 2014
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ARRANGEMENT OF AUTOFOCUS ELEMENTS FOR USE WITH IMMERSION LI...
- Publication number 20140320833
- Publication date Oct 30, 2014
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY
- Publication number 20140253888
- Publication date Sep 11, 2014
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BORESIGHT ERROR MONITOR FOR LASER RADAR INTEGRATED OPTICAL ASSEMBLY
- Publication number 20140063491
- Publication date Mar 6, 2014
- Nikon Corporation
- Daniel G. Smith
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL ARRANGEMENT OF AUTOFOCUS ELEMENTS FOR USE WITH IMMERSION LI...
- Publication number 20140055762
- Publication date Feb 27, 2014
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT ASSEMBLY INCLUDING A METROLOGY SYSTEM AND A POINTER THA...
- Publication number 20130335749
- Publication date Dec 19, 2013
- W. Thomas NOVAK
- G01 - MEASURING TESTING
Information Patent Application
BEAM STEERING FOR LASER RADAR AND OTHER USES
- Publication number 20130241761
- Publication date Sep 19, 2013
- Nikon Corporation
- Alexander Cooper
- G02 - OPTICS
Information Patent Application
TARGET FOR LARGE SCALE METROLOGY SYSTEM
- Publication number 20130141735
- Publication date Jun 6, 2013
- Michael Sogard
- G01 - MEASURING TESTING
Information Patent Application
Lyophobic Run-Off Path to Collect Liquid for an Immersion Lithograp...
- Publication number 20120268726
- Publication date Oct 25, 2012
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ARRANGEMENT OF AUTOFOCUS ELEMENTS FOR USE WITH IMMERSION LI...
- Publication number 20120075609
- Publication date Mar 29, 2012
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LARGE SCALE METROLOGY APPARATUS AND METHOD
- Publication number 20120050726
- Publication date Mar 1, 2012
- Nikon Corporation
- W. Thomas Novak
- G01 - MEASURING TESTING
Information Patent Application
LARGE SCALE METROLOGY APPARATUS AND METHOD
- Publication number 20120050752
- Publication date Mar 1, 2012
- Nikon Corporation
- W. THOMAS NOVAK
- G01 - MEASURING TESTING
Information Patent Application
Liquid jet and recovery system for immersion lithography
- Publication number 20120019792
- Publication date Jan 26, 2012
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Environmental system including a transport region for an immersion...
- Publication number 20110235007
- Publication date Sep 29, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Liquid jet and recovery system for immersion lithography
- Publication number 20110031416
- Publication date Feb 10, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Fluid pressure compensation for immersion litography lens
- Publication number 20100149513
- Publication date Jun 17, 2010
- Nikon Corporation
- Douglas C. Watson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical Imaging System and Method for Imaging Up to Four Reticles t...
- Publication number 20100091257
- Publication date Apr 15, 2010
- Nikon Corporation
- David M. Williamson
- G02 - OPTICS
Information Patent Application
Substrate Stage movement patterns for high throughput While Imaging...
- Publication number 20100053588
- Publication date Mar 4, 2010
- Nikon Corporation
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical arrangement of autofocus elements for use with immersion li...
- Publication number 20090317751
- Publication date Dec 24, 2009
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR EXPOSING ADJACENT SITES ON A SUBSTRATE
- Publication number 20090310115
- Publication date Dec 17, 2009
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical arrangement of autofocus elements for use with immersion li...
- Publication number 20090262322
- Publication date Oct 22, 2009
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

W. Thomas Novak

Person

Patents Grantslast 30 patents

Liquid jet and recovery system for immersion lithography

Environmental system including a transport region for an immersion...

Liquid jet and recovery system for immersion lithography

Environmental system including a transport region for an immersion...

Boresight error monitor for laser radar integrated optical assembly

Liquid jet and recovery system for immersion lithography

Environmental system including a transport region for an immersion...

Optical arrangement of autofocus elements for use with immersion li...

Image segmentation from focus varied images using graph cuts

Immersion lithography apparatus with hydrophilic region encircling...

Optical arrangement of autofocus elements for use with immersion li...

Measurement assembly including a metrology system and a pointer tha...

Environmental system including a transport region for an immersion...

Optical arrangement of autofocus elements for use with immersion li...

Optical arrangement of autofocus elements for use with immersion li...

Large scale metrology apparatus and method

Cleanup method for optics in immersion lithography supplying cleani...

Lyophobic run-off path to collect liquid for an immersion lithograp...

Optical arrangement of autofocus elements for use with immersion li...

Cleanup method for optics in immersion lithography using sonic device

Liquid jet and recovery system for immersion lithography

Optical arrangement of autofocus elements for use with immersion li...

Environmental system including a transport region for an immersion...

Environmental system including a transport region for an immersion...

Liquid jet and recovery system for immersion lithography

Environmental system including a transport region for an immersion...

Environmental system including a transport region for an immersion...

Image apparatus with image noise compensation

Stage assembly with lightweight fine stage and low transmissibility

Liquid jet and recovery system for immersion lithography

Patents Applicationslast 30 patents

LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY

ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION...

LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY

ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION...

LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY

ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION...

RUN-OFF PATH TO COLLECT LIQUID FOR AN IMMERSION LITHOGRAPHY APPARATUS

OPTICAL ARRANGEMENT OF AUTOFOCUS ELEMENTS FOR USE WITH IMMERSION LI...

STAGE BRAKING SYSTEM FOR A MOTOR

ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION...

OPTICAL ARRANGEMENT OF AUTOFOCUS ELEMENTS FOR USE WITH IMMERSION LI...

LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY

BORESIGHT ERROR MONITOR FOR LASER RADAR INTEGRATED OPTICAL ASSEMBLY

OPTICAL ARRANGEMENT OF AUTOFOCUS ELEMENTS FOR USE WITH IMMERSION LI...

MEASUREMENT ASSEMBLY INCLUDING A METROLOGY SYSTEM AND A POINTER THA...

BEAM STEERING FOR LASER RADAR AND OTHER USES

TARGET FOR LARGE SCALE METROLOGY SYSTEM

Lyophobic Run-Off Path to Collect Liquid for an Immersion Lithograp...

OPTICAL ARRANGEMENT OF AUTOFOCUS ELEMENTS FOR USE WITH IMMERSION LI...

LARGE SCALE METROLOGY APPARATUS AND METHOD

LARGE SCALE METROLOGY APPARATUS AND METHOD

Liquid jet and recovery system for immersion lithography

Environmental system including a transport region for an immersion...

Liquid jet and recovery system for immersion lithography

Fluid pressure compensation for immersion litography lens

Optical Imaging System and Method for Imaging Up to Four Reticles t...

Substrate Stage movement patterns for high throughput While Imaging...

Optical arrangement of autofocus elements for use with immersion li...

APPARATUS AND METHOD FOR EXPOSING ADJACENT SITES ON A SUBSTRATE

Optical arrangement of autofocus elements for use with immersion li...