Waikit Fung

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Saratoga, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Pulsing RF power in etch process to enhance tungsten gapfill perfor...
- Patent number 10,395,944
- Issue date Aug 27, 2019
- Lam Research Corporation
- Waikit Fung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsing RF power in etch process to enhance tungsten gapfill perfor...
- Patent number 9,978,610
- Issue date May 22, 2018
- Lam Research Corporation
- Waikit Fung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PULSING RF POWER IN ETCH PROCESS TO ENHANCE TUNGSTEN GAPFILL PERFOR...
- Publication number 20180254195
- Publication date Sep 6, 2018
- LAM RESEARCH CORPORATION
- Waikit Fung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PULSING RF POWER IN ETCH PROCESS TO ENHANCE TUNGSTEN GAPFILL PERFOR...
- Publication number 20170053811
- Publication date Feb 23, 2017
- LAM RESEARCH CORPORATION
- Waikit Fung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...