Walter Benjamin Glenn

Person

Pacifica, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for cyclical depositing of thin films
- Patent number 8,123,860
- Issue date Feb 28, 2012
- Applied Materials, Inc.
- Randhir P. S. Thakur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-station deposition apparatus and method
- Patent number 7,923,069
- Issue date Apr 12, 2011
- Applied Materials, Inc.
- Mei Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-station deposition apparatus and method
- Patent number 7,794,789
- Issue date Sep 14, 2010
- Applied Materials, Inc.
- Mei Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-station deposition apparatus and method
- Patent number 7,547,465
- Issue date Jun 16, 2009
- Applied Materials, Inc.
- Mei Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for forming barrier layers in high aspect rat...
- Patent number 7,547,644
- Issue date Jun 16, 2009
- Applied Materials, Inc.
- Fusen Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for cyclical deposition of thin films
- Patent number 7,175,713
- Issue date Feb 13, 2007
- Applied Materials, Inc.
- Randhir P. S. Thakur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for forming barrier layers in high aspect rat...
- Patent number 6,974,771
- Issue date Dec 13, 2005
- Applied Materials, Inc.
- Fusen Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-station deposition apparatus and method
- Patent number 6,932,871
- Issue date Aug 23, 2005
- Applied Materials, Inc.
- Mei Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clamshell and small volume chamber with fixed substrate support
- Patent number 6,866,746
- Issue date Mar 15, 2005
- Applied Materials, Inc.
- Lawrence C. Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for forming barrier layers in high aspect rat...
- Patent number 6,784,096
- Issue date Aug 31, 2004
- Applied Materials, Inc.
- Fusen Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MULTI-STATION DEPOSITION APPARATUS AND METHOD
- Publication number 20100316800
- Publication date Dec 16, 2010
- Mei Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STATION DEPOSITION APPARATUS AND METHOD
- Publication number 20090214786
- Publication date Aug 27, 2009
- Mei Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR CYCLICAL DEPOSITING OF THIN FILMS
- Publication number 20090056626
- Publication date Mar 5, 2009
- APPLIED MATERIALS, INC.
- RANDHIR P.S. THAKUR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR CYCLICAL DEPOSITING OF THIN FILMS
- Publication number 20070095285
- Publication date May 3, 2007
- Randhir P.S. Thakur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for forming barrier layers in high aspect rat...
- Publication number 20060057843
- Publication date Mar 16, 2006
- APPLIED MATERIALS, INC.
- Fusen Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-station deposition apparatus and method
- Publication number 20050271814
- Publication date Dec 8, 2005
- APPLIED MATERIALS, INC.
- Mei Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for forming barrier layers in high aspect rat...
- Publication number 20050266682
- Publication date Dec 1, 2005
- APPLIED MATERIALS, INC.
- Fusen Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Clamshell and small volume chamber with fixed substrate support
- Publication number 20050139160
- Publication date Jun 30, 2005
- APPLIED MATERIALS, INC.
- Lawrence C. Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for forming barrier layers in high aspect rat...
- Publication number 20040266175
- Publication date Dec 30, 2004
- APPLIED MATERIALS, INC.
- Fusen Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for forming barrier layers in high aspect rat...
- Publication number 20040048461
- Publication date Mar 11, 2004
- Fusen Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cyclical sequential deposition of multicomponent films
- Publication number 20030235961
- Publication date Dec 25, 2003
- APPLIED MATERIALS, INC.
- Craig Metzner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Clamshell and small volume chamber with fixed substrate support
- Publication number 20030221780
- Publication date Dec 4, 2003
- Lawrence C. Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-station deposition apparatus and method
- Publication number 20030194493
- Publication date Oct 16, 2003
- APPLIED MATERIALS, INC.
- Mei Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for cyclical deposition of thin films
- Publication number 20030172872
- Publication date Sep 18, 2003
- APPLIED MATERIALS, INC.
- Randhir P.S. Thakur
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Walter Benjamin Glenn

Person

Patents Grantslast 30 patents

Apparatus for cyclical depositing of thin films

Multi-station deposition apparatus and method

Multi-station deposition apparatus and method

Multi-station deposition apparatus and method

Methods and apparatus for forming barrier layers in high aspect rat...

Apparatus for cyclical deposition of thin films

Methods and apparatus for forming barrier layers in high aspect rat...

Multi-station deposition apparatus and method

Clamshell and small volume chamber with fixed substrate support

Methods and apparatus for forming barrier layers in high aspect rat...

Patents Applicationslast 30 patents

MULTI-STATION DEPOSITION APPARATUS AND METHOD

MULTI-STATION DEPOSITION APPARATUS AND METHOD

APPARATUS FOR CYCLICAL DEPOSITING OF THIN FILMS

APPARATUS FOR CYCLICAL DEPOSITING OF THIN FILMS

Methods and apparatus for forming barrier layers in high aspect rat...

Multi-station deposition apparatus and method

Methods and apparatus for forming barrier layers in high aspect rat...

Clamshell and small volume chamber with fixed substrate support

Methods and apparatus for forming barrier layers in high aspect rat...

Methods and apparatus for forming barrier layers in high aspect rat...

Cyclical sequential deposition of multicomponent films

Clamshell and small volume chamber with fixed substrate support

Multi-station deposition apparatus and method

Apparatus for cyclical deposition of thin films