Walter FRANKEN

Person

Eschweiler, DE

People

Patents Grantslast 30 patents

Information Patent Grant
CVD or PVD reactor for coating large-area substrates
- Patent number 10,822,701
- Issue date Nov 3, 2020
- Aixtron SE
- Walter Franken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transport module for a semiconductor fabrication device or coupling...
- Patent number 9,847,241
- Issue date Dec 19, 2017
- Aixtron SE
- Martin Freundt
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Shadow mask held magnetically on a substrate support
- Patent number 9,045,818
- Issue date Jun 2, 2015
- Aixtron SE
- Markus Gersdorff
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Device for the temperature control of the surface temperatures of s...
- Patent number 8,308,867
- Issue date Nov 13, 2012
- Aixtron Inc.
- Walter Franken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction chamber with at least one HF feedthrough
- Patent number 7,056,388
- Issue date Jun 6, 2006
- Aixtron AG
- Walter Franken
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CVD OR PVD REACTOR FOR COATING LARGE-AREA SUBSTRATES
- Publication number 20170314134
- Publication date Nov 2, 2017
- AIXTRON SE
- Walter FRANKEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSPORT MODULE FOR A SEMICONDUCTOR FABRICATION DEVICE OR COUPLING...
- Publication number 20160079104
- Publication date Mar 17, 2016
- AIXTRON SE
- Martin FREUNDT
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
COATING DEVICE AND METHOD FOR OPERATING A COATING DEVICE HAVING A S...
- Publication number 20130040054
- Publication date Feb 14, 2013
- AIXTRON SE
- Gerhard Karl Strauch
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHADOW MASK HELD MAGNETICALLY ON A SUBSTRATE SUPPORT
- Publication number 20110174217
- Publication date Jul 21, 2011
- Markus Gersdorff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR THE TEMPERATURE CONTROL OF THE SURFACE TEMPERATURES OF S...
- Publication number 20100170435
- Publication date Jul 8, 2010
- Walter Franken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOURCE CONTAINER OF A VPE REACTOR
- Publication number 20090183682
- Publication date Jul 23, 2009
- Walter Franken
- C30 - CRYSTAL GROWTH
Information Patent Application
Apparatus and Method for Controlling the Surface Temperature of a S...
- Publication number 20090110805
- Publication date Apr 30, 2009
- AIXTRON INC.
- Johannes Kaeppeler
- C30 - CRYSTAL GROWTH
Information Patent Application
Cvd-Reactor with Slidingly Mounted Susceptor Holder
- Publication number 20080251020
- Publication date Oct 16, 2008
- Walter Franken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD reactor with stabilized process chamber height
- Publication number 20070074661
- Publication date Apr 5, 2007
- Aixtron AG
- Walter Franken
- C30 - CRYSTAL GROWTH
Information Patent Application
Mask-retaining device
- Publication number 20060124055
- Publication date Jun 15, 2006
- Walter Franken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device for depositing thin layers with a wireless detection of proc...
- Publication number 20050092246
- Publication date May 5, 2005
- Peter Baumann
- C30 - CRYSTAL GROWTH
Information Patent Application
Process and device for depositing in particular crystalline layers...
- Publication number 20050000441
- Publication date Jan 6, 2005
- Johannes Kaeppeler
- C30 - CRYSTAL GROWTH
Information Patent Application
Process chamber with a base with sectionally different rotational d...
- Publication number 20040231599
- Publication date Nov 25, 2004
- Markus Schwambera
- C30 - CRYSTAL GROWTH
Information Patent Application
Reaction chamber with at least one HF feedthrough
- Publication number 20030111015
- Publication date Jun 19, 2003
- Walter Franken
- H01 - BASIC ELECTRIC ELEMENTS

Walter FRANKEN

Person

Patents Grantslast 30 patents

CVD or PVD reactor for coating large-area substrates

Transport module for a semiconductor fabrication device or coupling...

Shadow mask held magnetically on a substrate support

Device for the temperature control of the surface temperatures of s...

Reaction chamber with at least one HF feedthrough

Patents Applicationslast 30 patents

CVD OR PVD REACTOR FOR COATING LARGE-AREA SUBSTRATES

TRANSPORT MODULE FOR A SEMICONDUCTOR FABRICATION DEVICE OR COUPLING...

COATING DEVICE AND METHOD FOR OPERATING A COATING DEVICE HAVING A S...

SHADOW MASK HELD MAGNETICALLY ON A SUBSTRATE SUPPORT

DEVICE FOR THE TEMPERATURE CONTROL OF THE SURFACE TEMPERATURES OF S...

SOURCE CONTAINER OF A VPE REACTOR

Apparatus and Method for Controlling the Surface Temperature of a S...

Cvd-Reactor with Slidingly Mounted Susceptor Holder

CVD reactor with stabilized process chamber height

Mask-retaining device

Device for depositing thin layers with a wireless detection of proc...

Process and device for depositing in particular crystalline layers...

Process chamber with a base with sectionally different rotational d...

Reaction chamber with at least one HF feedthrough