Wan-goo Hwang

Person

Yongin-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for generating gas plasma, gas composition for generating...
- Patent number 8,083,892
- Issue date Dec 27, 2011
- Samsung Electronics Co., Ltd.
- Young-Min Min
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method for forming a thin layer on semiconductor substrates
- Patent number 7,786,010
- Issue date Aug 31, 2010
- Samsung Electronics Co., Ltd.
- Hyun-Wook Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for generating gas plasma, gas composition for generating...
- Patent number 7,578,944
- Issue date Aug 25, 2009
- Samsung Electronics Co., Ltd.
- Young-Min Min
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Etching method
- Patent number 7,497,963
- Issue date Mar 3, 2009
- Samsung Electronics Co., Ltd.
- Kwang-Myung Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for generating gas plasma
- Patent number 7,193,369
- Issue date Mar 20, 2007
- Samsung Electronics Co., Ltd.
- Young-Min Min
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for measuring inclination angle of ion beam
- Patent number 6,858,854
- Issue date Feb 22, 2005
- Samsung Electronics Co., Ltd.
- Gyeong-Su Keum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal gasket for a semiconductor fabrication chamber
- Patent number 6,833,621
- Issue date Dec 21, 2004
- Samsung Electronics Co., Ltd.
- Tae-Won Lee
- F05 - INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF...

Patents Applicationslast 30 patents

Information Patent Application
Apparatus for generating gas plasma, gas composition for generating...
- Publication number 20090229758
- Publication date Sep 17, 2009
- Young-Min Min
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
APPARATUS AND METHOD FOR FORMING A THIN LAYER ON SEMICONDUCTOR SUBS...
- Publication number 20080132069
- Publication date Jun 5, 2008
- Samsung Electronics Co., Ltd.
- Hyun-Wook LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR EVAPORATING LIQUID PRECURSORS AND METHODS...
- Publication number 20080044585
- Publication date Feb 21, 2008
- SAMSUNG ELECTRONICS CO., LTD.
- Jeong-Soo Suh
- C30 - CRYSTAL GROWTH
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS INCLUDING TEMPERATURE...
- Publication number 20070181062
- Publication date Aug 9, 2007
- Il-Kyoung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of cleaning plasma applicator in situ and plasma applicator...
- Publication number 20070051387
- Publication date Mar 8, 2007
- Wan-goo Hwang
- B08 - CLEANING
Information Patent Application
Method of forming layers on substrates using microwave energy and a...
- Publication number 20060175304
- Publication date Aug 10, 2006
- Wan-Goo Hwang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Apparatus for supplying gas and apparatus for forming a layer havin...
- Publication number 20060169201
- Publication date Aug 3, 2006
- Wan-Goo Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of manufacturing a hemisperical grain silicon layer and meth...
- Publication number 20060160337
- Publication date Jul 20, 2006
- Young-Jin Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for forming a titanium nitride layer
- Publication number 20060110533
- Publication date May 25, 2006
- SAMSUNG ELECTRONICS CO., LTD.
- Wan-Goo Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and apparatus for forming a titanium nitride layer
- Publication number 20060110534
- Publication date May 25, 2006
- SAMSUNG ELECTRONICS CO., LTD.
- Wan-Goo Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for generating gas plasma, gas composition for generating...
- Publication number 20060084269
- Publication date Apr 20, 2006
- SAMSUNG ELECTRONICS CO., LTD.
- Young-Min Min
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Etching method
- Publication number 20050153553
- Publication date Jul 14, 2005
- Kwang-Myung Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for generating gas plasma, gas composition for...
- Publication number 20040092119
- Publication date May 13, 2004
- Young-Min Min
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Method and apparatus for measuring inclination angle of ion beam
- Publication number 20030197132
- Publication date Oct 23, 2003
- Gyeong-Su Keum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metal gasket for a semiconductor fabrication chamber
- Publication number 20030122326
- Publication date Jul 3, 2003
- SAMSUNG ELECTRONICS CO., LTD.
- Tae-Won Lee
- F05 - INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF...

Wan-goo Hwang

Person

Patents Grantslast 30 patents

Apparatus for generating gas plasma, gas composition for generating...

Method for forming a thin layer on semiconductor substrates

Apparatus for generating gas plasma, gas composition for generating...

Etching method

Method for generating gas plasma

Method and apparatus for measuring inclination angle of ion beam

Metal gasket for a semiconductor fabrication chamber

Patents Applicationslast 30 patents

Apparatus for generating gas plasma, gas composition for generating...

APPARATUS AND METHOD FOR FORMING A THIN LAYER ON SEMICONDUCTOR SUBS...

METHODS AND APPARATUS FOR EVAPORATING LIQUID PRECURSORS AND METHODS...

SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS INCLUDING TEMPERATURE...

Method of cleaning plasma applicator in situ and plasma applicator...

Method of forming layers on substrates using microwave energy and a...

Apparatus for supplying gas and apparatus for forming a layer havin...

Method of manufacturing a hemisperical grain silicon layer and meth...

Methods and apparatus for forming a titanium nitride layer

Methods and apparatus for forming a titanium nitride layer

Apparatus for generating gas plasma, gas composition for generating...

Etching method

Method and apparatus for generating gas plasma, gas composition for...

Method and apparatus for measuring inclination angle of ion beam

Metal gasket for a semiconductor fabrication chamber