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Wataru Okase
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Sagamihara-Shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Fluid control apparatus
Patent number
8,434,522
Issue date
May 7, 2013
Tokyo Electron Limited
Wataru Okase
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Pressure type flow rate control reference and corrosion resistant p...
Patent number
8,381,755
Issue date
Feb 26, 2013
Fujikin Incorporated
Shuji Moriya
G05 - CONTROLLING REGULATING
Information
Patent Grant
Pressure type flow rate control reference and corrosion resistant p...
Patent number
8,210,022
Issue date
Jul 3, 2012
Fujikin Incorporated
Shuji Moriya
G05 - CONTROLLING REGULATING
Information
Patent Grant
Plating device and plating method
Patent number
7,112,268
Issue date
Sep 26, 2006
Tokyo Electron Limited
Wataru Okase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid treatment method using alternating electrical contacts
Patent number
6,953,522
Issue date
Oct 11, 2005
Tokyo Electron Limited
Kyungho Park
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Thermal insulator having a honeycomb structure and heat recycle sys...
Patent number
6,949,719
Issue date
Sep 27, 2005
Tokyo Electron Limited
Osamu Suenaga
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Thermal insulator having a honeycomb structure and heat recycle sys...
Patent number
6,756,565
Issue date
Jun 29, 2004
Tokyo Electron Limited
Osamu Suenaga
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Plating apparatus and method of manufacturing semiconductor device
Patent number
6,740,164
Issue date
May 25, 2004
Tokyo Electron Limited
Wataru Okase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing apparatus and processing system
Patent number
6,716,329
Issue date
Apr 6, 2004
Tokyo Electron Limited
Wataru Okase
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Mist trap mechanism and method for plating apparatus
Patent number
6,641,709
Issue date
Nov 4, 2003
Tokyo Electron Limited
Wataru Okase
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Liquid treatment system and liquid treatment method
Patent number
6,634,370
Issue date
Oct 21, 2003
Tokyo Electron Limited
Satoshi Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal processing unit for single substrate
Patent number
6,497,767
Issue date
Dec 24, 2002
Tokyo Electron Limited
Wataru Okase
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thermal treatment method and apparatus
Patent number
6,473,993
Issue date
Nov 5, 2002
Tokyo Electron Limited
Yasushi Yagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Single-substrate-treating apparatus for semiconductor processing sy...
Patent number
6,402,848
Issue date
Jun 11, 2002
Tokyo Electron Limited
Takahiro Horiguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Single-substrate-heat-treating apparatus for semiconductor process...
Patent number
6,399,922
Issue date
Jun 4, 2002
Tokyo Electron Limited
Wataru Okase
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heat treatment method and its apparatus
Patent number
6,322,631
Issue date
Nov 27, 2001
Tokyo Electron Limited
Wataru Okase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Single-substrate-heat-treating apparatus for semiconductor process...
Patent number
6,228,173
Issue date
May 8, 2001
Tokyo Electron Limited
Wataru Okase
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heating apparatus, and processing apparatus
Patent number
6,121,579
Issue date
Sep 19, 2000
Tokyo Electron Limited
Kazutsugu Aoki
C30 - CRYSTAL GROWTH
Information
Patent Grant
Heat treatment method
Patent number
6,036,482
Issue date
Mar 14, 2000
Tokyo Electron Limited
Wataru Okase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat treatment apparatus and heat treatment method
Patent number
5,903,711
Issue date
May 11, 1999
Toyko Electron Limited
Wataru Okase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment system
Patent number
5,884,009
Issue date
Mar 16, 1999
Tokyo Electron Limited
Wataru Okase
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal processing apparatus having a reaction tube with transparen...
Patent number
5,862,302
Issue date
Jan 19, 1999
Tokyo Electron Limited
Wataru Okase
C30 - CRYSTAL GROWTH
Information
Patent Grant
Heat treatment apparatus
Patent number
5,749,723
Issue date
May 12, 1998
Tokyo Electron Limited
Wataru Okase
C30 - CRYSTAL GROWTH
Information
Patent Grant
Heat treatment method using a vertical processing tube
Patent number
5,678,989
Issue date
Oct 21, 1997
Tokyo Electron Kabushiki Kaisha
Wataru Okase
C30 - CRYSTAL GROWTH
Information
Patent Grant
Heat treatment method
Patent number
5,662,469
Issue date
Sep 2, 1997
Tokyo Electron Tohoku Kabushiki Kaisha
Wataru Okase
C30 - CRYSTAL GROWTH
Information
Patent Grant
Heat treatment method and apparatus thereof
Patent number
5,651,670
Issue date
Jul 29, 1997
Tokyo Electron Sagami Kabushiki Kaisha
Wataru Okase
C30 - CRYSTAL GROWTH
Information
Patent Grant
Heat treatment apparatus
Patent number
5,592,581
Issue date
Jan 7, 1997
Tokyo Electron Kabushiki Kaisha
Wataru Okase
C30 - CRYSTAL GROWTH
Information
Patent Grant
Heat treatment method and apparatus
Patent number
5,571,010
Issue date
Nov 5, 1996
Tokyo Electron Kabushiki Kaisha
Wataru Okase
C30 - CRYSTAL GROWTH
Information
Patent Grant
Heat treatment processing apparatus and cleaning method thereof
Patent number
5,554,226
Issue date
Sep 10, 1996
Tokyo Electron Kabushiki Kaisha
Wataru Okase
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heat treatment method and apparatus thereof
Patent number
5,429,498
Issue date
Jul 4, 1995
Tokyo Electron Sagami Kabushiki Kaisha
Wataru Okase
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
PRESSURE TYPE FLOW RATE CONTROL REFERENCE AND CORROSION RESISTANT P...
Publication number
20120234406
Publication date
Sep 20, 2012
TOKYO ELECTRON LIMITED
Shuji Moriya
G05 - CONTROLLING REGULATING
Information
Patent Application
FLUID CONTROL APPARATUS
Publication number
20100096031
Publication date
Apr 22, 2010
Tokyo Electron Limited
Wataru Okase
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
PRESSURE TYPE FLOW RATE CONTROL REFERENCE AND CORROSION RESISTANT P...
Publication number
20090146089
Publication date
Jun 11, 2009
Fujikin Incorporated
Shuji Moriya
G05 - CONTROLLING REGULATING
Information
Patent Application
Thermal insulator having a honeycomb structure and heat recycle sys...
Publication number
20040195230
Publication date
Oct 7, 2004
TOKYO ELECTRON LIMITED
Osamu Suenaga
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
Plating device and plating method
Publication number
20040074763
Publication date
Apr 22, 2004
Wataru Okase
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Fluid treatment system
Publication number
20040053509
Publication date
Mar 18, 2004
Wataru Okase
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Exhaust system for processing apparatus
Publication number
20030141016
Publication date
Jul 31, 2003
Wataru Okase
B08 - CLEANING
Information
Patent Application
Mist trap mechanism and method for plating apparatus
Publication number
20030094372
Publication date
May 22, 2003
Wataru Okase
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Plating apparatus and method of manufacturing semiconductor device
Publication number
20020102846
Publication date
Aug 1, 2002
Wataru Okase
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Thermal insulator having a honeycomb structure and heat recycle sys...
Publication number
20020088610
Publication date
Jul 11, 2002
Osamu Suenaga
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
Processing apparatus and processing system
Publication number
20010040098
Publication date
Nov 15, 2001
Wataru Okase
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Liquid treatment equipment and liquid treatment method
Publication number
20010037945
Publication date
Nov 8, 2001
Wataru Okase
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Liquid treatment system and liquid treatment method
Publication number
20010037764
Publication date
Nov 8, 2001
Satoshi Nakashima
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Liquid treatment equipment and liquid treatment method
Publication number
20010037943
Publication date
Nov 8, 2001
Kyungho Park
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Single-substrate-heat-treating apparatus for semiconductor process...
Publication number
20010012604
Publication date
Aug 9, 2001
TOKYO ELECTRON LIMITED
Wataru Okase
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...