Claims
- 1. A processing apparatus comprising:
- a reaction tube;
- loading means for loading an object-to-be-processed into the reaction tube, and
- processing means for processing the object by radiation energy, the processing means including a radiation source disposed outside the reaction tube,
- the reaction tube having a transparent part, and an opaque part so that a uniform temperature distribution can be obtained in a surface-to-be-processed of the object to be processed,
- the transparent part including transparent portions,
- the opaque part including a top part of the reaction tube and a neighboring part thereof, and band-shaped portions which extend along a circumference of the reaction tube and are vertically spaced from each other by the transparent portions,
- the loading means loading objects-to-be processed into the reaction tube so that the objects are positioned in areas of the opaque part.
- 2. A processing apparatus comprising:
- a reaction tube;
- loading means for loading an object-to-be processed into the reaction tube; and
- processing means for processing the object by radiation energy, the processing means including a radiation source disposed outside the reaction tube,
- the reaction tube having a transparent part, and an opaque part so that a uniform temperature distribution can be obtained in a surface-to-be-processed of the object to be processed,
- the transparent part including transparent portions,
- the opaque part including patched portions,
- the patched portions being spaced from each other by the transparent portions such that the patched portions do not extend circumferentially around the reaction tube,
- the patched portions and the transparent portions being on side walls of the reaction tube.
- 3. A processing apparatus comprising:
- a reaction tube;
- loading means for loading an object-to-be processed into the reaction tube; and
- processing means for processing the object by radiation energy, the processing means including a radiation source disposed outside the reaction tube,
- the reaction tube having a transparent part, and an opaque part so that a uniform temperature distribution can be obtained in a surface-to-be processed of the object to-be-processed,
- the transparent part having transparent portions,
- the opaque part including slit-shaped opaque portions which extend vertically only in a central part of the reaction tube, and which circumferentially are spaced apart from each other by the transparent portions.
Priority Claims (1)
Number |
Date |
Country |
Kind |
6-259108 |
Sep 1994 |
JPX |
|
Parent Case Info
This application is a division of Ser. No. 08/532059 filed Sep. 22, 1995 now abandoned.
US Referenced Citations (1)
Number |
Name |
Date |
Kind |
5429498 |
Okase et al. |
Jul 1995 |
|
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Divisions (1)
|
Number |
Date |
Country |
Parent |
532059 |
Sep 1995 |
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