Wataru YOSHIKAWA

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 10,144,040
- Issue date Dec 4, 2018
- Tokyo Electron Limited
- Wataru Yoshikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antenna, dielectric window, plasma processing apparatus and plasma...
- Patent number 9,595,425
- Issue date Mar 14, 2017
- Tokyo Electron Limited
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 9,111,726
- Issue date Aug 18, 2015
- Tokyo Electron Limited
- Kazuki Moyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric window for plasma processing apparatus, plasma processin...
- Patent number 8,988,012
- Issue date Mar 24, 2015
- Tokyo Electron Limited
- Wataru Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,889,023
- Issue date Nov 18, 2014
- Tokyo Electron Limited
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectric window for plasma processing device
- Patent number D672377
- Issue date Dec 11, 2012
- Tokyo Electron Limited
- Wataru Yoshikawa
- D15 - Machines not elsewhere specified
Information Patent Grant
Dielectric window for plasma processing device
- Patent number D645486
- Issue date Sep 20, 2011
- Tokyo Electron Limited
- Wataru Yoshikawa
- D15 - Machines not elsewhere specified

Patents Applicationslast 30 patents

Information Patent Application
MANUFACTURING METHOD OF SAMPLE TABLE
- Publication number 20180286740
- Publication date Oct 4, 2018
- TOKYO ELECTRON LIMITED
- Wataru YOSHIKAWA
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20150053346
- Publication date Feb 26, 2015
- TOKYO ELECTRON LIMITED
- Naoki MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20140299152
- Publication date Oct 9, 2014
- Wataru Yoshikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20130115781
- Publication date May 9, 2013
- TOKYO ELECTRON LIMITED
- Naoki MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRIC WINDOW FOR PLASMA PROCESSING APPARATUS, PLASMA PROCESSIN...
- Publication number 20130093321
- Publication date Apr 18, 2013
- TOKYO ELECTRON LIMITED
- Wataru Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNA, DIELECTRIC WINDOW, PLASMA PROCESSING APPARATUS AND PLASMA...
- Publication number 20130008607
- Publication date Jan 10, 2013
- TOKYO ELECTRON LIMITED
- Naoki MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20120267048
- Publication date Oct 25, 2012
- TOKYO ELECTRON LIMITED
- Kazuki Moyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20120241090
- Publication date Sep 27, 2012
- TOKYO ELECTRON LIMITED
- Jun Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE TABLE AND MICROWAVE PLASMA PROCESSING APPARATUS
- Publication number 20120211165
- Publication date Aug 23, 2012
- TOKYO ELECTRON LIMITED
- Wataru Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS

Wataru YOSHIKAWA

Person

Patents Grantslast 30 patents

Plasma processing method and plasma processing apparatus

Antenna, dielectric window, plasma processing apparatus and plasma...

Plasma processing apparatus

Dielectric window for plasma processing apparatus, plasma processin...

Plasma processing apparatus and plasma processing method

Dielectric window for plasma processing device

Dielectric window for plasma processing device

Patents Applicationslast 30 patents

MANUFACTURING METHOD OF SAMPLE TABLE

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

DIELECTRIC WINDOW FOR PLASMA PROCESSING APPARATUS, PLASMA PROCESSIN...

ANTENNA, DIELECTRIC WINDOW, PLASMA PROCESSING APPARATUS AND PLASMA...

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

SAMPLE TABLE AND MICROWAVE PLASMA PROCESSING APPARATUS