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Electroless copper deposition apparatus
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Patent number 6,815,349
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Issue date Nov 9, 2004
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Novellus Systems, Inc.
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Edmund B. Minshall
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Dual channel rotary union
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Patent number 6,343,793
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Issue date Feb 5, 2002
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Novellus Systems, Inc.
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Evan E. Patton
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C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
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Method of depositing metal layer
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Patent number 6,139,712
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Issue date Oct 31, 2000
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Novellus Systems, Inc.
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Evan E. Patton
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C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
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