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Wayne G. Renken
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Process condition sensing wafer and data analysis system
Patent number
9,165,846
Issue date
Oct 20, 2015
KLA-Tencor Corporation
Wayne G. Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process condition measuring device
Patent number
8,104,342
Issue date
Jan 31, 2012
KLA-Tencor Corporation
Mei H. Sun
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Determining process condition in substrate processing module
Patent number
8,046,193
Issue date
Oct 25, 2011
KLA-Tencor Corporation
Forrest Gilbert Yetter, Jr.
G05 - CONTROLLING REGULATING
Information
Patent Grant
Process condition sensing wafer and data analysis system
Patent number
8,033,190
Issue date
Oct 11, 2011
KLA-Tencor Technologies Corporation
Wayne G. Renken
G01 - MEASURING TESTING
Information
Patent Grant
Integrated process condition sensing wafer and data analysis system
Patent number
7,855,549
Issue date
Dec 21, 2010
KLA-Tencor Corporation
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process condition sensing wafer and data analysis system
Patent number
7,819,033
Issue date
Oct 26, 2010
Wayne G. Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process condition sensing wafer and data analysis system
Patent number
7,757,574
Issue date
Jul 20, 2010
KLA-Tencor Corporation
Wayne G. Renken
G01 - MEASURING TESTING
Information
Patent Grant
Pressure sensing device
Patent number
7,698,952
Issue date
Apr 20, 2010
KLA-Tencor Corporation
Wayne G. Renken
G01 - MEASURING TESTING
Information
Patent Grant
Process condition measuring device and method for measuring shear f...
Patent number
7,497,134
Issue date
Mar 3, 2009
KLA-Tencor Corporation
Wayne G. Renken
G01 - MEASURING TESTING
Information
Patent Grant
Process condition sensing wafer and data analysis system
Patent number
7,360,463
Issue date
Apr 22, 2008
SensArray Corporation
Wayne G. Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of configuring a sensor network
Patent number
7,363,195
Issue date
Apr 22, 2008
SensArray Corporation
Forrest Gilbert Yetter, Jr.
G05 - CONTROLLING REGULATING
Information
Patent Grant
System and method for heating and cooling wafer at accelerated rates
Patent number
7,156,924
Issue date
Jan 2, 2007
SensArray Corporation
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated process condition sensing wafer and data analysis system
Patent number
7,151,366
Issue date
Dec 19, 2006
SensArray Corporation
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated process condition sensing wafer and data analysis system
Patent number
7,149,643
Issue date
Dec 12, 2006
SensArray Corporation
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated process condition sensing wafer and data analysis system
Patent number
7,135,852
Issue date
Nov 14, 2006
SensArray Corporation
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sensor positioning systems and methods
Patent number
6,915,589
Issue date
Jul 12, 2005
SensArray Corporation
Mei H. Sun
G01 - MEASURING TESTING
Information
Patent Grant
Process condition sensing wafer and data analysis system
Patent number
6,889,568
Issue date
May 10, 2005
SensArray Corporation
Wayne G. Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical techniques for measuring parameters such as temperature acr...
Patent number
6,616,332
Issue date
Sep 9, 2003
SensArray Corporation
Wayne Renken
G01 - MEASURING TESTING
Information
Patent Grant
Integrated wafer temperature sensors
Patent number
6,325,536
Issue date
Dec 4, 2001
SensArray Corporation
Wayne Glenn Renken
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus for sensing temperature on a substrate in an integrated c...
Patent number
6,190,040
Issue date
Feb 20, 2001
SensArray Corporation
Wayne G. Renken
G01 - MEASURING TESTING
Information
Patent Grant
Temperature calibration substrate
Patent number
5,967,661
Issue date
Oct 19, 1999
SensArray Corporation
Wayne Glenn Renken
G01 - MEASURING TESTING
Information
Patent Grant
Temperature calibration substrate
Patent number
5,746,513
Issue date
May 5, 1998
SensArray Corporation
Wayne Renken
G01 - MEASURING TESTING
Information
Patent Grant
Electromagnetic valve with permanent magnet armature
Patent number
4,690,371
Issue date
Sep 1, 1987
Innovus
Robert W. Bosley
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Thermal mass flowmeter and controller
Patent number
4,685,331
Issue date
Aug 11, 1987
Innovus
Wayne G. Renken
G05 - CONTROLLING REGULATING
Information
Patent Grant
Electrical interconnect system
Patent number
4,647,133
Issue date
Mar 3, 1987
Innovus
Wayne G. Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal mass flow meter
Patent number
4,542,650
Issue date
Sep 24, 1985
Innovus
Wayne G. Renken
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
PROCESS CONDITION SENSING WAFER AND DATA ANALYSIS SYSTEM
Publication number
20150006108
Publication date
Jan 1, 2015
KLA-Tencor Corporation
WAYNE G. RENKEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS CONDITION MEASURING DEVICE
Publication number
20130029433
Publication date
Jan 31, 2013
KLA-Tencor Corporation
Mei H. Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS CONDITION SENSING WAFER AND DATA ANALYSIS SYSTEM
Publication number
20110040527
Publication date
Feb 17, 2011
KLA-Tencor Corporation
WAYNE G. RENKEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS CONDITION SENSING WAFER AND DATA ANALYSIS SYSTEM
Publication number
20100294051
Publication date
Nov 25, 2010
KLA-Tencor Corporation
Wayne G. Renken
G01 - MEASURING TESTING
Information
Patent Application
PROCESS CONDITION MEASURING DEVICE
Publication number
20090056441
Publication date
Mar 5, 2009
KLA-Tencor Corporation
Mei H. Sun
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DATA COLLECTION AND ANALYSIS SYSTEM
Publication number
20080228306
Publication date
Sep 18, 2008
SensArray Corporation
Forrest Gilbert Yetter
G05 - CONTROLLING REGULATING
Information
Patent Application
PROCESS CONDITION SENSING WAFER AND DATA ANALYSIS SYSTEM
Publication number
20080228419
Publication date
Sep 18, 2008
SensArray Corporation
Wayne G. Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Shear Force Sensing Device
Publication number
20080087105
Publication date
Apr 17, 2008
SensArray Corporation
Wayne G. Renken
G01 - MEASURING TESTING
Information
Patent Application
Pressure Sensing Device
Publication number
20080087069
Publication date
Apr 17, 2008
SensArray Corporation
Wayne G. Renken
G01 - MEASURING TESTING
Information
Patent Application
Wireless Position Sensing Wafer
Publication number
20070113652
Publication date
May 24, 2007
Wayne Glenn Renken
G01 - MEASURING TESTING
Information
Patent Application
Integrated Process Condition Sensing Wafer and Data Analysis System
Publication number
20070046284
Publication date
Mar 1, 2007
SensArray Corporation
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process condition sensing wafer and data analysis system
Publication number
20060174720
Publication date
Aug 10, 2006
SensArray Corporation
Wayne G. Renken
G01 - MEASURING TESTING
Information
Patent Application
Data collection and analysis system
Publication number
20060015294
Publication date
Jan 19, 2006
Forrest Gilbert Yetter
G05 - CONTROLLING REGULATING
Information
Patent Application
Integrated process condition sensing wafer and data analysis system
Publication number
20050246127
Publication date
Nov 3, 2005
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Sensor positioning systems and methods
Publication number
20050081398
Publication date
Apr 21, 2005
SensArray Corporation
Mei H. Sun
G01 - MEASURING TESTING
Information
Patent Application
Integrated process condition sensing wafer and data analysis system
Publication number
20040225462
Publication date
Nov 11, 2004
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Integrated process condition sensing wafer and data analysis system
Publication number
20040154417
Publication date
Aug 12, 2004
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process condition sensing wafer and data analysis system
Publication number
20040074323
Publication date
Apr 22, 2004
Wayne G. Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and method for heating and cooling wafer at accelerated rates
Publication number
20040056017
Publication date
Mar 25, 2004
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process condition sensing wafer and data analysis system
Publication number
20040031340
Publication date
Feb 19, 2004
Wayne G. Renken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and method for heating and cooling wafer at accelerated rates
Publication number
20030173346
Publication date
Sep 18, 2003
Wayne Glenn Renken
H01 - BASIC ELECTRIC ELEMENTS