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Campbell, CA, US
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last 30 patents
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Patent Grant
Wafer dicing using femtosecond-based laser and plasma etch
Patent number
12,131,952
Issue date
Oct 29, 2024
Applied Materials, Inc.
Wei-Sheng Lei
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Top magnets for decreased non-uniformity in PVD
Patent number
12,112,890
Issue date
Oct 8, 2024
Applied Materials, Inc.
Borui Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Laser dicing glass wafers using advanced laser sources
Patent number
12,091,349
Issue date
Sep 17, 2024
Applied Materials, Inc.
Wei-Sheng Lei
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser dicing system for filamenting and singulating optical devices
Patent number
11,964,343
Issue date
Apr 23, 2024
Applied Materials, Inc.
Mahendran Chidambaram
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Information
Patent Grant
Laser scribing trench opening control in wafer dicing using hybrid...
Patent number
11,854,888
Issue date
Dec 26, 2023
Applied Materials, Inc.
Jungrae Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High connectivity device stacking
Patent number
11,742,330
Issue date
Aug 29, 2023
Applied Materials, Inc.
Kurtis Leschkies
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of micro-via formation for advanced packaging
Patent number
11,705,365
Issue date
Jul 18, 2023
Applied Materials, Inc.
Wei-Sheng Lei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser ablation system for package fabrication
Patent number
11,676,832
Issue date
Jun 13, 2023
Applied Materials, Inc.
Kurtis Leschkies
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Wafer dicing using femtosecond-based laser and plasma etch
Patent number
11,621,194
Issue date
Apr 4, 2023
Applied Materials, Inc.
Wei-Sheng Lei
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Additive manufacturing with a polygon scanner
Patent number
11,518,100
Issue date
Dec 6, 2022
Applied Materials, Inc.
Wei-Sheng Lei
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Methods and apparatus for controlling contact resistance in cobalt-...
Patent number
11,424,132
Issue date
Aug 23, 2022
Applied Materials, Inc.
Takashi Kuratomi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for selective deposition of tungsten atop a dielectric laye...
Patent number
11,417,568
Issue date
Aug 16, 2022
Applied Materials, Inc.
Wei Lei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser ablation for package fabrication
Patent number
11,400,545
Issue date
Aug 2, 2022
Applied Materials, Inc.
Kurtis Leschkies
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Information
Patent Grant
Wafer dicing using hybrid laser scribing and plasma etch approach w...
Patent number
11,355,394
Issue date
Jun 7, 2022
Applied Materials, Inc.
Wei-Sheng Lei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective deposition of titanium films
Patent number
11,286,556
Issue date
Mar 29, 2022
Applied Materials, Inc.
Byunghoon Yoon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High connectivity device stacking
Patent number
11,257,790
Issue date
Feb 22, 2022
Applied Materials, Inc.
Kurtis Leschkies
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for laser drilling blind vias
Patent number
11,232,951
Issue date
Jan 25, 2022
Applied Materials, Inc.
Wei-Sheng Lei
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Hybrid wafer dicing approach using a split beam laser scribing proc...
Patent number
11,217,536
Issue date
Jan 4, 2022
Applied Materials, Inc.
Jungrae Park
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Light-absorbing mask for hybrid laser scribing and plasma etch wafe...
Patent number
11,158,540
Issue date
Oct 26, 2021
Applied Materials, Inc.
Wenguang Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer dicing using femtosecond-based laser and plasma etch
Patent number
10,910,271
Issue date
Feb 2, 2021
Applied Materials, Inc.
Wei-Sheng Lei
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Wafer dicing using femtosecond-based laser and plasma etch
Patent number
10,714,390
Issue date
Jul 14, 2020
Applied Materials, Inc.
Wei-Sheng Lei
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Mitigation of particle contamination for wafer dicing processes
Patent number
10,661,383
Issue date
May 26, 2020
Applied Materials, Inc.
Wei-Sheng Lei
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Wafer dicing using femtosecond-based laser and plasma etch
Patent number
10,566,238
Issue date
Feb 18, 2020
Applied Materials, Inc.
Wei-Sheng Lei
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Hybrid wafer dicing approach using a multiple pass laser scribing p...
Patent number
10,535,561
Issue date
Jan 14, 2020
Applied Materials, Inc.
Jungrae Park
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Mitigation of particle contamination for wafer dicing processes
Patent number
10,363,629
Issue date
Jul 30, 2019
Applied Materials, Inc.
Wei-Sheng Lei
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Wafer dicing using femtosecond-based laser and plasma etch
Patent number
10,163,713
Issue date
Dec 25, 2018
Applied Materials, Inc.
Wei-Sheng Lei
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Ternary tungsten boride nitride films and methods for forming same
Patent number
9,969,622
Issue date
May 15, 2018
Lam Research Corporation
Wei Lei
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Hybrid wafer dicing approach using a split beam laser scribing proc...
Patent number
9,972,575
Issue date
May 15, 2018
Applied Materials, Inc.
Jungrae Park
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Hybrid wafer dicing approach using a rotating beam laser scribing p...
Patent number
9,852,997
Issue date
Dec 26, 2017
Applied Materials, Inc.
Jungrae Park
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Wafer coating
Patent number
9,768,014
Issue date
Sep 19, 2017
Applied Materials, Inc.
Jungrae Park
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
INTERRUPTION LAYER FILL FOR LOW RESISTANCE CONTACTS
Publication number
20240371771
Publication date
Nov 7, 2024
Applied Materials, Inc.
Sahil Jaykumar PATEL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYBRID MOLYBDENUM FILL SCHEME FOR LOW RESISTIVITY SEMICONDUCTOR APP...
Publication number
20240355673
Publication date
Oct 24, 2024
Applied Materials, Inc.
Wei LEI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LASER DICING SYSTEM FOR FILAMENTING AND SINGULATING OPTICAL DEVICES
Publication number
20240227081
Publication date
Jul 11, 2024
Applied Materials, Inc.
Mahendran CHIDAMBARAM
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Interlayer for Resistivity Reduction in Metal Deposition Applications
Publication number
20240194527
Publication date
Jun 13, 2024
Applied Materials, Inc.
Sahil Jaykumar PATEL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Buffer Layer for Dielectric Protection in Physical Vapor Deposition...
Publication number
20240145300
Publication date
May 2, 2024
Sahil PATEL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED PVD TUNGSTEN LINER AND SEAMLESS CVD TUNGSTEN FILL
Publication number
20240087955
Publication date
Mar 14, 2024
Applied Materials, Inc.
Yi XU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING METAL GAPFILL WITH LOW RESISTIVITY
Publication number
20240088071
Publication date
Mar 14, 2024
Applied Materials, Inc.
Yi XU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER SCRIBING TRENCH OPENING CONTROL IN WAFER DICING USING HYBRID...
Publication number
20240079273
Publication date
Mar 7, 2024
Applied Materials, Inc.
Jungrae Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH CONNECTIVITY DEVICE STACKING
Publication number
20240021582
Publication date
Jan 18, 2024
Applied Materials, Inc.
Kurtis LESCHKIES
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NITROGEN PLASMA TREATMENT FOR BOTTOM-UP GROWTH
Publication number
20240014072
Publication date
Jan 11, 2024
Applied Materials, Inc.
Tsung-Han YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TREATMENT OF TUNGSTEN SURFACE FOR TUNGSTEN GAP-FILL
Publication number
20230420295
Publication date
Dec 28, 2023
Applied Materials, Inc.
Tsung-Han YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF IN-SITU SELECTIVE METAL REMOVAL VIA GRADIENT OXIDATION FO...
Publication number
20230343644
Publication date
Oct 26, 2023
Applied Materials, Inc.
Chih-Hsun HSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GRADIENT OXIDATION AND ETCH FOR PVD METAL AS BOTTOM LINER IN BOTTOM...
Publication number
20230343643
Publication date
Oct 26, 2023
Applied Materials, Inc.
Chih-Hsun HSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF FIELD-SUPPRESSION CVD TUNGSTEN (W) FILL ON PVD W LINER
Publication number
20230326791
Publication date
Oct 12, 2023
Applied Materials, Inc.
Zhimin QI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LASER ABLATION SYSTEM FOR PACKAGE FABRICATION
Publication number
20230282498
Publication date
Sep 7, 2023
Applied Materials, Inc.
Kurtis LESCHKIES
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Information
Patent Application
INKJET INKS FOR DEPOSITION AND REMOVAL IN A LASER DICING PROCESS
Publication number
20230273355
Publication date
Aug 31, 2023
Applied Materials, Inc.
Yingdong LUO
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Information
Patent Application
WAFER DICING USING FEMTOSECOND-BASED LASER AND PLASMA ETCH
Publication number
20230207393
Publication date
Jun 29, 2023
Applied Materials, Inc.
Wei-Sheng Lei
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHODS AND APPARATUS FOR TUNGSTEN GAP FILL
Publication number
20230134230
Publication date
May 4, 2023
Applied Materials, Inc.
Wei Lei
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SINGULATION OF OPTICAL DEVICES FROM OPTICAL DEVICE SUBSTRATES VIA L...
Publication number
20230123795
Publication date
Apr 20, 2023
Applied Materials, Inc.
Wei-Sheng LEI
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LASER PROCESSING OF LITHIUM BATTERY WEB
Publication number
20230113276
Publication date
Apr 13, 2023
Applied Materials, Inc.
Wei-Sheng LEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TOP MAGNETS FOR DECREASED NON-UNIFORMITY IN PVD
Publication number
20230088552
Publication date
Mar 23, 2023
Applied Materials, Inc.
Borui Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ENHANCED STRESS TUNING AND INTERFACIAL ADHESION FOR TUNGSTEN (W) GA...
Publication number
20230023235
Publication date
Jan 26, 2023
Xi CEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER DICING GLASS WAFERS USING ADVANCED LASER SOURCES
Publication number
20230002268
Publication date
Jan 5, 2023
Applied Materials, Inc.
Wei-Sheng LEI
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHODS FOR SHAPING MAGNETIC FIELDS DURING SEMICONDUCTOR PROCESSING
Publication number
20220380888
Publication date
Dec 1, 2022
Goichi YOSHIDOME
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS OF MICRO-VIA FORMATION FOR ADVANCED PACKAGING
Publication number
20220375787
Publication date
Nov 24, 2022
Applied Materials, Inc.
Wei-Sheng LEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR CONTROLLING CONTACT RESISTANCE IN COBALT-TITANIUM STRUC...
Publication number
20220336227
Publication date
Oct 20, 2022
Applied Materials, Inc.
TAKASHI KURATOMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAP FILL METHODS USING CATALYZED DEPOSITION
Publication number
20220325410
Publication date
Oct 13, 2022
Applied Materials, Inc.
Byunghoon Yoon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS TO DICE OPTICAL DEVICES WITH OPTIMIZATION OF LASER PULSE SP...
Publication number
20220305588
Publication date
Sep 29, 2022
Applied Materials, Inc.
Wei-Sheng LEI
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LITHIUM METAL SURFACE MODIFICATION USING CARBONATE PASSIVATION
Publication number
20220181599
Publication date
Jun 9, 2022
Applied Materials, Inc.
Alejandro Sevilla
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH CONNECTIVITY DEVICE STACKING
Publication number
20220139884
Publication date
May 5, 2022
Applied Materials, Inc.
Kurtis LESCHKIES
H01 - BASIC ELECTRIC ELEMENTS