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Wei-Min Li

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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate loading in an ALD reactor
    • Patent number 11,280,001
    • Issue date Mar 22, 2022
    • Picosun Oy
    • Vaino Kilpi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Enhanced thin film deposition
    • Patent number 10,964,534
    • Issue date Mar 30, 2021
    • ASM International
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    ALD method and apparatus
    • Patent number 10,619,241
    • Issue date Apr 14, 2020
    • Picosun Oy
    • Timo Malinen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Etch resistant alumina based coatings
    • Patent number 10,510,551
    • Issue date Dec 17, 2019
    • Pibond Oy
    • Juha T. Rantala
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Deposition reactor with plasma source
    • Patent number 10,494,718
    • Issue date Dec 3, 2019
    • Picosun Oy
    • Vaino Kilpi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Enhanced thin film deposition
    • Patent number 10,297,444
    • Issue date May 21, 2019
    • ASM International N.V.
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate loading in an ALD reactor
    • Patent number 10,161,038
    • Issue date Dec 25, 2018
    • Picosun Oy
    • Vaino Kilpi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomic layer deposition with plasma source
    • Patent number 9,868,131
    • Issue date Jan 16, 2018
    • Picosun Oy
    • Vaino Kilpi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Enhanced thin film deposition
    • Patent number 9,831,094
    • Issue date Nov 28, 2017
    • ASM International N.V.
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomic layer deposition of metal carbide films using aluminum hydro...
    • Patent number 9,631,272
    • Issue date Apr 25, 2017
    • ASM America, Inc.
    • Dong Li
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Etch resistant alumina based coatings
    • Patent number 9,564,339
    • Issue date Feb 7, 2017
    • Pibond Oy
    • Juha T. Rantala
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Enhanced thin film deposition
    • Patent number 9,127,351
    • Issue date Sep 8, 2015
    • ASM International N.V.
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomic layer deposition with plasma source
    • Patent number 9,095,869
    • Issue date Aug 4, 2015
    • Picosun Oy
    • Vaino Kilpi
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Enhanced thin film deposition
    • Patent number 8,993,055
    • Issue date Mar 31, 2015
    • ASM International N.V.
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Thin films
    • Patent number 7,981,791
    • Issue date Jul 19, 2011
    • ASM International N.V.
    • Suvi P. Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Low resistivity metal carbonitride thin film deposition by atomic l...
    • Patent number 7,638,170
    • Issue date Dec 29, 2009
    • ASM International N.V.
    • Wei-Min Li
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Thin films
    • Patent number 7,419,903
    • Issue date Sep 2, 2008
    • ASM International N.V.
    • Suvi P. Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Metal nitride carbide deposition by ALD
    • Patent number 7,410,666
    • Issue date Aug 12, 2008
    • ASM International N.V.
    • Kai Elers
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Metal nitride deposition by ALD with reduction pulse
    • Patent number 6,986,914
    • Issue date Jan 17, 2006
    • ASM International N.V
    • Kai Elers
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomic layer deposition methods for forming a multi-layer adhesion-...
    • Patent number 6,955,986
    • Issue date Oct 18, 2005
    • ASM International N.V.
    • Wei-Min Li
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Atomic layer deposition reactor
    • Patent number 6,820,570
    • Issue date Nov 23, 2004
    • Nobel Biocare Services AG
    • Olli Kilpela
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    ENHANCED THIN FILM DEPOSITION
    • Publication number 20190267231
    • Publication date Aug 29, 2019
    • ASM INTERNATIONAL N.V.
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE LOADING IN AN ALD REACTOR
    • Publication number 20190048465
    • Publication date Feb 14, 2019
    • Picosun Oy
    • Vaino Kilpi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ENHANCED THIN FILM DEPOSITION
    • Publication number 20180130666
    • Publication date May 10, 2018
    • ASM INTERNATIONAL N.V.
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Atomic Layer Deposition with Plasma Source
    • Publication number 20180099304
    • Publication date Apr 12, 2018
    • Picosun Oy
    • Vaino Kilpi
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    ALD METHOD AND APPARATUS
    • Publication number 20170342560
    • Publication date Nov 30, 2017
    • Picosun Oy
    • Timo MALINEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ETCH RESISTANT ALUMINA BASED COATINGS
    • Publication number 20170200615
    • Publication date Jul 13, 2017
    • PIBOND OY
    • Juha T. Rantala
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ATOMIC LAYER DEPOSITION OF GERMANIUM OR GERMANIUM OXIDE
    • Publication number 20170069490
    • Publication date Mar 9, 2017
    • Picosun Oy
    • Wei-Min LI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ENHANCED THIN FILM DEPOSITION
    • Publication number 20160118262
    • Publication date Apr 28, 2016
    • ASM INTERNATIONAL N.V.
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Atomic Layer Deposition with Plasma Source
    • Publication number 20150322569
    • Publication date Nov 12, 2015
    • Picosun Oy
    • Vaino Kilpi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE LOADING IN AN ALD REACTOR
    • Publication number 20150299859
    • Publication date Oct 22, 2015
    • Picosun Oy
    • Vaino KILPI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER DEPOSITION OF METAL CARBIDE FILMS USING ALUMINUM HYDRO...
    • Publication number 20140127405
    • Publication date May 8, 2014
    • ASM AMERICA, INC
    • Dong Li
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION REACTOR WITH PLASMA SOURCE
    • Publication number 20140087093
    • Publication date Mar 27, 2014
    • Picosun Oy
    • Vaino Kilpi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Atomic Layer Deposition with Plasma Source
    • Publication number 20140024223
    • Publication date Jan 23, 2014
    • Picosun Oy
    • Vaino Kilpi
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    ENHANCED THIN FILM DEPOSITION
    • Publication number 20130183445
    • Publication date Jul 18, 2013
    • ASM INTERNATIONAL N.V.
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ETCH RESISTANT ALUMINA BASED COATINGS
    • Publication number 20130143408
    • Publication date Jun 6, 2013
    • SILECS OY
    • Juha T Rantala
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    THIN FILMS
    • Publication number 20110256718
    • Publication date Oct 20, 2011
    • ASM INTERNATIONAL N.V.
    • Suvi P. Haukka
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    ATOMIC LAYER DEPOSITION OF METAL CARBIDE FILMS USING ALUMINUM HYDRO...
    • Publication number 20090315093
    • Publication date Dec 24, 2009
    • ASM AMERICA, INC
    • Dong LI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    THIN FILMS
    • Publication number 20090068832
    • Publication date Mar 12, 2009
    • ASM INTERNATIONAL N.V.
    • Suvi P. Haukka
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    LOW RESISTIVITY METAL CARBONITRIDE THIN FILM DEPOSITION BY ATOMIC L...
    • Publication number 20080317955
    • Publication date Dec 25, 2008
    • ASM INTERNATIONAL N.V.
    • Wei-Min Li
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Enhanced thin film deposition
    • Publication number 20070148350
    • Publication date Jun 28, 2007
    • Antti Rahtu
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Metal nitride carbide deposition by ALD
    • Publication number 20060078679
    • Publication date Apr 13, 2006
    • Kai Elers
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Methods of metallization for microelectronic devices utilizing meta...
    • Publication number 20060019493
    • Publication date Jan 26, 2006
    • Wei Min Li
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Thin films
    • Publication number 20050181555
    • Publication date Aug 18, 2005
    • Suvi P. Haukka
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    Atomic layer deposition reactor
    • Publication number 20050092249
    • Publication date May 5, 2005
    • Olli Kilpela
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method of producing adhesion-barrier layer for integrated circuits
    • Publication number 20040192021
    • Publication date Sep 30, 2004
    • Wei-Min Li
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Metal nitride deposition by ALD with reduction pulse
    • Publication number 20030082296
    • Publication date May 1, 2003
    • Kai Elers
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Atomic layer deposition reactor
    • Publication number 20030075273
    • Publication date Apr 24, 2003
    • Olli Kilpela
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...