Wenjing ZHU

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Reticle shape regulation device and method, and exposure apparatus...
- Patent number 9,760,025
- Issue date Sep 12, 2017
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Xinxin Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Reticle Shape Regulation Device and Method, and Exposure Apparatus...
- Publication number 20160147163
- Publication date May 26, 2016
- SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
- Xinxin WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WARPED SILICON-CHIP ADSORPTION DEVICE AND ADSORPTION METHOD THEREOF
- Publication number 20150357217
- Publication date Dec 10, 2015
- SHANGHAI MICRO ELECTRONICS EQUIPMENT CO,, LTD
- Xinxin WANG
- H01 - BASIC ELECTRIC ELEMENTS