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Wilhelm Kegel
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Langenbruck, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Device and method for thermally treating semiconductor wafers
Patent number
7,151,060
Issue date
Dec 19, 2006
Mattson Thermal Products GmbH
Georg Roters
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for minimizing the vapor deposition of tungsten oxide during...
Patent number
7,094,637
Issue date
Aug 22, 2006
Infineon Technologies AG
Olaf Storbeck
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for improving thermal process steps
Patent number
6,706,616
Issue date
Mar 16, 2004
Infineon Technologies AG
Wilhelm Kegel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for increasing the capacitance in a storage trench
Patent number
6,699,747
Issue date
Mar 2, 2004
Infineon Technologies AG
Alexander Ruff
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Device and method for thermally treating semiconductor wafers
Publication number
20060105584
Publication date
May 18, 2006
Georg Roters
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for minimizing the vapor deposition of tungsten oxide during...
Publication number
20040121569
Publication date
Jun 24, 2004
Olaf Storbeck
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for increasing the capacitance in a storage trench and trenc...
Publication number
20030073283
Publication date
Apr 17, 2003
Infineon Technologies AG
Alexander Ruf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for increasing the capacitance in a storage trench and trenc...
Publication number
20010030352
Publication date
Oct 18, 2001
Alexander Ruf
H01 - BASIC ELECTRIC ELEMENTS