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last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,285,689
Issue date
Mar 15, 2016
ASML Netherlands B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus having an encoder type position sensor system
Patent number
8,836,913
Issue date
Sep 16, 2014
ASML Netherlands B.V.
Peter Paul Steijaert
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus having encoder type position sensor system
Patent number
8,760,615
Issue date
Jun 24, 2014
ASML Netherlands B.V.
Peter Paul Steijaert
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,749,762
Issue date
Jun 10, 2014
ASML Netherlands B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus having an encoder position sensor system
Patent number
8,687,166
Issue date
Apr 1, 2014
ASML Netherlands B.V.
Peter Paul Steijaert
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation system with contamination barrier
Patent number
8,129,702
Issue date
Mar 6, 2012
ASML Netherlands B.V.
Levinus Pieter Bakker
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Integrated circuit manufacturing methods with patterning device pos...
Patent number
7,804,584
Issue date
Sep 28, 2010
ASML Netherland B.V.
Petrus Rutgerus Bartray
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Contamination barrier with expandable lamellas
Patent number
7,737,425
Issue date
Jun 15, 2010
ASML Netherlands B.V.
Levinus Pieter Bakker
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Device manufacturing method, lithographic apparatus and device manu...
Patent number
7,630,060
Issue date
Dec 8, 2009
ASML Netherlands B.V.
Joost Jeroen Ottens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus, thermal conditioning system, and method for...
Patent number
7,545,478
Issue date
Jun 9, 2009
ASML Netherlands B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method for manufacturing a device
Patent number
7,542,127
Issue date
Jun 2, 2009
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method utilizing mo...
Patent number
7,522,258
Issue date
Apr 21, 2009
ASML Netherlands B.V.
Bernardus Antonius Johannes Luttikhuis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,489,388
Issue date
Feb 10, 2009
ASML Netherlands B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method and radiation c...
Patent number
7,470,916
Issue date
Dec 30, 2008
ASML Netherlands B.V.
Wilhelmus Josephus Box
F24 - HEATING RANGES VENTILATING
Information
Patent Grant
Lithographic apparatus with patterning device position determination
Patent number
7,471,373
Issue date
Dec 30, 2008
ASML Netherlands B.V.
Petrus Rutgerus Bartray
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
7,423,721
Issue date
Sep 9, 2008
ASML Netherlands B.V.
Antonius Johannes Josephus Van Dijsseldonk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation system and lithographic apparatus
Patent number
7,397,538
Issue date
Jul 8, 2008
ASML Netherlands B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and method of...
Patent number
7,391,502
Issue date
Jun 24, 2008
ASML Netherlands B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,375,794
Issue date
May 20, 2008
ASML Netherlands B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,362,415
Issue date
Apr 22, 2008
ASML Netherlands B.V.
Dominicus Jacobus Petrus Adrianus Franken
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus and device manufacturing method
Patent number
7,274,431
Issue date
Sep 25, 2007
ASML Netherlands B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Contamination barrier with expandable lamellas
Patent number
7,247,866
Issue date
Jul 24, 2007
ASML Netherlands B.V.
Levinus Pieter Bakker
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Lithographic apparatus and a method of compensating for thermal def...
Patent number
7,151,588
Issue date
Dec 19, 2006
ASML Netherlands B.V.
Dominicus Jacobus Petrus Adrianus Franken
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
7,116,399
Issue date
Oct 3, 2006
ASML Netherlands B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,106,416
Issue date
Sep 12, 2006
ASML Netherlands B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
6,977,713
Issue date
Dec 20, 2005
ASML Netherlands B.V.
Bernardus Antonius Johannes Luttikhuis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and method of...
Patent number
6,747,730
Issue date
Jun 8, 2004
ASML Netherlands B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20140375971
Publication date
Dec 25, 2014
ASML NETHERLANDS B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus Having an Encoder Type Position Sensor System
Publication number
20120075613
Publication date
Mar 29, 2012
ASML NETHERLANDS B.V.
Peter Paul STEIJAERT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION SYSTEM WITH CONTAMINATION BARRIER
Publication number
20100200772
Publication date
Aug 12, 2010
ASML NETHERLANDS B.V.
Levinus Pieter BAKKER
B82 - NANO-TECHNOLOGY
Information
Patent Application
Integrated Circuit Manufacturing Methods with Patterning Device Pos...
Publication number
20090061361
Publication date
Mar 5, 2009
ASML NETHERLANDS B.V.
Petrus Rutgerus Bartray
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus having encoder type position sensor system
Publication number
20090002653
Publication date
Jan 1, 2009
ASML NETHERLANDS B.V.
Peter Paul Steijaert
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus having encoder type position sensor system
Publication number
20080291413
Publication date
Nov 27, 2008
ASML NETHERLANDS B.V.
Peter Paul Steijaert
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device manufacturing method, lithographic apparatus and device manu...
Publication number
20080212053
Publication date
Sep 4, 2008
ASML NETHERLANDS B.V.
Joost Jeroen Ottens
B82 - NANO-TECHNOLOGY
Information
Patent Application
Contamination barrier with expandable lamellas
Publication number
20070222956
Publication date
Sep 27, 2007
ASML NETHERLANDS B.V.
Levinus Pieter Bakker
B82 - NANO-TECHNOLOGY
Information
Patent Application
Lithographic apparatus and method for manufacturing a device
Publication number
20070139629
Publication date
Jun 21, 2007
ASML NETHERLANDS B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Radiation system and lithographic apparatus
Publication number
20070115445
Publication date
May 24, 2007
ASML NETHERLANDS B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method and radiation c...
Publication number
20070084461
Publication date
Apr 19, 2007
ASML NETHERLANDS B.V.
Wilhelmus Josephus Box
F24 - HEATING RANGES VENTILATING
Information
Patent Application
Lithographic apparatus and device manufacturing method utilizing mo...
Publication number
20070002297
Publication date
Jan 4, 2007
ASML NETHERLANDS B.V.
Bernardus Antonius Johannes Luttikhuis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus
Publication number
20060126041
Publication date
Jun 15, 2006
ASML NETHERLANDS B.V.
Antonius Johannes Josephus Van Dijsseldonk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060119815
Publication date
Jun 8, 2006
Dominicus Jacobus Petrus Adrianus Franken
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060028627
Publication date
Feb 9, 2006
ASML NETHERLANDS B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050254028
Publication date
Nov 17, 2005
ASML NETHERLANDS B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, thermal conditioning system, and method for...
Publication number
20050248739
Publication date
Nov 10, 2005
ASML NETHERLANDS B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050151954
Publication date
Jul 14, 2005
ASML NETHERLANDS B.V.
Petrus Rutgerus Bartray
G02 - OPTICS
Information
Patent Application
Lithographic apparatus and a method of compensating for thermal def...
Publication number
20050140950
Publication date
Jun 30, 2005
ASML NETHERLANDS B.V.
Dominicus Jacobus Petrus Adrianus Franken
G02 - OPTICS
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050134827
Publication date
Jun 23, 2005
ASML NETHERLANDS B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050128448
Publication date
Jun 16, 2005
ASML NETHERLANDS B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050122490
Publication date
Jun 9, 2005
ASML NETHERLANDS B.V.
Bernardus Antonius Johannes Luttikhuis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050105070
Publication date
May 19, 2005
ASML NETHERLANDS B.V.
Pertrus Rutgerus Bartray
G02 - OPTICS
Information
Patent Application
Lithographic apparatus and integrated circuit manufacturing method
Publication number
20050024611
Publication date
Feb 3, 2005
ASML NETHERLANDS B.V.
Pertrus Rutgerus Bartray
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20050018154
Publication date
Jan 27, 2005
ASML NETHERLANDS B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic projection apparatus and device manufacturing method
Publication number
20050018157
Publication date
Jan 27, 2005
ASML NETHERLANDS B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Contamination barrier with expandable lamellas
Publication number
20040184014
Publication date
Sep 23, 2004
ASML NETHERLANDS B.V.
Levinus Pieter Bakker
B82 - NANO-TECHNOLOGY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and method of...
Publication number
20040165173
Publication date
Aug 26, 2004
ASML NETHERLANDS B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY