William Davis Lee

Person

Newburyport, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Drift tube, apparatus and ion implanter having variable focus elect...
- Patent number 11,825,590
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- William Davis Lee
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
RF quadrupole particle accelerator
- Patent number 11,818,830
- Issue date Nov 14, 2023
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ plasma cleaning of process chamber components
- Patent number 11,495,434
- Issue date Nov 8, 2022
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- B08 - CLEANING
Information Patent Grant
System, apparatus and method for variable length electrode in linea...
- Patent number 11,189,460
- Issue date Nov 30, 2021
- Applied Materials, Inc.
- Charles T. Carlson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ plasma cleaning of process chamber components
- Patent number 11,037,758
- Issue date Jun 15, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- B08 - CLEANING
Information Patent Grant
In-situ plasma cleaning of process chamber components
- Patent number 10,522,330
- Issue date Dec 31, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- B08 - CLEANING
Information Patent Grant
Charge integration based electrostatic clamp health monitor
- Patent number 10,324,121
- Issue date Jun 18, 2019
- Axcelis Technologies, Inc.
- Edward K. McIntyre
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective processing of a workpiece
- Patent number 10,081,861
- Issue date Sep 25, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for multilayer deposition
- Patent number 9,988,711
- Issue date Jun 5, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Parallelizing electrostatic acceleration/deceleration optical element
- Patent number 9,978,556
- Issue date May 22, 2018
- Varian Semiconductor Equipment Associates, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Platen assembly
- Patent number 9,960,060
- Issue date May 1, 2018
- Varian Semiconductor Equipment Associates, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective processing of a workpiece using ion beam implantation and...
- Patent number 9,899,188
- Issue date Feb 20, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Mark R. Amato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Constant mass flow multi-level coolant path electrostatic chuck
- Patent number 9,847,240
- Issue date Dec 19, 2017
- Axcelis Technologies, Inc.
- William Davis Lee
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Dual material repeller
- Patent number 9,824,846
- Issue date Nov 21, 2017
- Varian Semiconductor Equipment Associates, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid immersion doping
- Patent number 9,805,931
- Issue date Oct 31, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for in-situ cleaning in ion beam apparatus
- Patent number 9,761,410
- Issue date Sep 12, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlling contamination particle trajectory from a beam-line elec...
- Patent number 9,721,750
- Issue date Aug 1, 2017
- Varian Semiconductor Equipment Associates, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inert atmospheric pressure pre-chill and post-heat
- Patent number 9,711,324
- Issue date Jul 18, 2017
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for contamination control in ion beam apparatus
- Patent number 9,685,298
- Issue date Jun 20, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable electrode pattern for versatile electrostatic clamp operation
- Patent number 9,633,885
- Issue date Apr 25, 2017
- Axcelis Technologies, Inc.
- William Davis Lee
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Platen with multiple shaped grounding structures
- Patent number 9,624,574
- Issue date Apr 18, 2017
- Varian Semiconductor Equipment Associates, Inc.
- William Davis Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Light bath for particle suppression
- Patent number 9,583,308
- Issue date Feb 28, 2017
- Varian Semiconductor Equipment Associates, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor compression refrigeration chuck for ion implanters
- Patent number 9,558,980
- Issue date Jan 31, 2017
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-aperture extraction system for angled ion beam
- Patent number 9,478,399
- Issue date Oct 25, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implant assisted metal etching
- Patent number 9,435,038
- Issue date Sep 6, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Thomas Omstead
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for dynamic temperature control of an ion source
- Patent number 9,287,079
- Issue date Mar 15, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-resistivity Johnsen-Rahbek electrostatic clamp
- Patent number 9,281,227
- Issue date Mar 8, 2016
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bias electrodes for tandem accelerator
- Patent number 9,281,165
- Issue date Mar 8, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Gas coupled arc chamber cooling
- Patent number 9,275,820
- Issue date Mar 1, 2016
- Varian Semiconductor Equipment Associates, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-vacuum high speed pre-chill and post-heat stations
- Patent number 9,236,216
- Issue date Jan 12, 2016
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DRIFT TUBE, APPARATUS AND ION IMPLANTER HAVING VARIABLE FOCUS ELECT...
- Publication number 20230083050
- Publication date Mar 16, 2023
- Applied Materials, Inc.
- William Davis Lee
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
RF QUADRUPOLE PARTICLE ACCELERATOR
- Publication number 20220248523
- Publication date Aug 4, 2022
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU PLASMA CLEANING OF PROCESS CHAMBER COMPONENTS
- Publication number 20210013001
- Publication date Jan 14, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- B08 - CLEANING
Information Patent Application
IN-SITU PLASMA CLEANING OF PROCESS CHAMBER COMPONENTS
- Publication number 20200126757
- Publication date Apr 23, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR IN-SITU CLEANING IN ION BEAM APPARATUS
- Publication number 20170221678
- Publication date Aug 3, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dual Material Repeller
- Publication number 20170213684
- Publication date Jul 27, 2017
- Varian Semiconductor Equipment Associates, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARALLELIZING ELECTROSTATIC ACCELERATION/DECELERATION OPTICAL ELEMENT
- Publication number 20170169987
- Publication date Jun 15, 2017
- Varian Semiconductor Equipment Associates, Inc.
- William Davis LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU PLASMA CLEANING OF PROCESS CHAMBER ELECTROSTATIC ELEMENTS H...
- Publication number 20170092473
- Publication date Mar 30, 2017
- Varian Semiconductor Equipment Associates, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT BATH FOR PARTICLE SUPPRESSION
- Publication number 20170062173
- Publication date Mar 2, 2017
- Varian Semiconductor Equipment Associates, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid Immersion Doping
- Publication number 20170062221
- Publication date Mar 2, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROLLING CONTAMINATION PARTICLE TRAJECTORY FROM A BEAM-LINE ELEC...
- Publication number 20170032924
- Publication date Feb 2, 2017
- Varian Semiconductor Equipment Associates, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Selective Processing Of A Workpiece
- Publication number 20170025253
- Publication date Jan 26, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Mark R. Amato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU PLASMA CLEANING OF PROCESS CHAMBER COMPONENTS
- Publication number 20160365225
- Publication date Dec 15, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR MULTILAYER DEPOSITION
- Publication number 20160333464
- Publication date Nov 17, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Selective Processing Of A Workpiece
- Publication number 20160298229
- Publication date Oct 13, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-APERTURE EXTRACTION SYSTEM FOR ANGLED ION BEAM
- Publication number 20160284520
- Publication date Sep 29, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser-Induced Borane Production for Ion Implantation
- Publication number 20160175804
- Publication date Jun 23, 2016
- Axcelis Technologies, Inc.
- William Davis Lee
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PLATEN ASSEMBLY
- Publication number 20160104634
- Publication date Apr 14, 2016
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BIAS ELECTRODES FOR TANDEM ACCELERATOR
- Publication number 20160064186
- Publication date Mar 3, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Implant Assisted Metal Etching
- Publication number 20160060767
- Publication date Mar 3, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Thomas Omstead
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus For Dynamic Temperature Control Of An Ion Source
- Publication number 20160005564
- Publication date Jan 7, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Platen With Multiple Shaped Grounding Structures
- Publication number 20150322564
- Publication date Nov 12, 2015
- Varian Semiconductor Equipment Associates, Inc.
- William Davis Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Variable Electrode Pattern for Versatile Electrostatic Clamp Operation
- Publication number 20150228523
- Publication date Aug 13, 2015
- Axcelis Technologies, Inc.
- William Davis Lee
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Constant Mass Flow Multi-Level Coolant Path Electrostatic Chuck
- Publication number 20150228515
- Publication date Aug 13, 2015
- Axcelis Technologies, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi Fluid Cooling System for Large Temperature Range Chuck
- Publication number 20150228514
- Publication date Aug 13, 2015
- Axcelis Technologies, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas Coupled Arc Chamber Cooling
- Publication number 20150061490
- Publication date Mar 5, 2015
- Varian Semiconductor Equipment Associates, Inc.
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Resistivity Johnsen-Rahbek Electrostatic Clamp
- Publication number 20150002983
- Publication date Jan 1, 2015
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE CARRIER
- Publication number 20140361197
- Publication date Dec 11, 2014
- William Davis Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGE INTEGRATION BASED ELECTROSTATIC CLAMP HEALTH MONITOR
- Publication number 20140188416
- Publication date Jul 3, 2014
- Axcelis Technologies, Inc.
- Edward K. McIntyre
- G01 - MEASURING TESTING
Information Patent Application
IN-VACUUM HIGH SPEED PRE-CHILL AND POST-HEAT STATIONS
- Publication number 20140034846
- Publication date Feb 6, 2014
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS

William Davis Lee

Person

Patents Grantslast 30 patents

Drift tube, apparatus and ion implanter having variable focus elect...

RF quadrupole particle accelerator

In-situ plasma cleaning of process chamber components

System, apparatus and method for variable length electrode in linea...

In-situ plasma cleaning of process chamber components

In-situ plasma cleaning of process chamber components

Charge integration based electrostatic clamp health monitor

Selective processing of a workpiece

Apparatus and method for multilayer deposition

Parallelizing electrostatic acceleration/deceleration optical element

Platen assembly

Selective processing of a workpiece using ion beam implantation and...

Constant mass flow multi-level coolant path electrostatic chuck

Dual material repeller

Liquid immersion doping

Apparatus and method for in-situ cleaning in ion beam apparatus

Controlling contamination particle trajectory from a beam-line elec...

Inert atmospheric pressure pre-chill and post-heat

Apparatus and method for contamination control in ion beam apparatus

Variable electrode pattern for versatile electrostatic clamp operation

Platen with multiple shaped grounding structures

Light bath for particle suppression

Vapor compression refrigeration chuck for ion implanters

Multi-aperture extraction system for angled ion beam

Ion implant assisted metal etching

Apparatus for dynamic temperature control of an ion source

Multi-resistivity Johnsen-Rahbek electrostatic clamp

Bias electrodes for tandem accelerator

Gas coupled arc chamber cooling

In-vacuum high speed pre-chill and post-heat stations

Patents Applicationslast 30 patents

DRIFT TUBE, APPARATUS AND ION IMPLANTER HAVING VARIABLE FOCUS ELECT...

RF QUADRUPOLE PARTICLE ACCELERATOR

IN-SITU PLASMA CLEANING OF PROCESS CHAMBER COMPONENTS

IN-SITU PLASMA CLEANING OF PROCESS CHAMBER COMPONENTS

APPARATUS AND METHOD FOR IN-SITU CLEANING IN ION BEAM APPARATUS

Dual Material Repeller

PARALLELIZING ELECTROSTATIC ACCELERATION/DECELERATION OPTICAL ELEMENT

IN-SITU PLASMA CLEANING OF PROCESS CHAMBER ELECTROSTATIC ELEMENTS H...

LIGHT BATH FOR PARTICLE SUPPRESSION

Liquid Immersion Doping

CONTROLLING CONTAMINATION PARTICLE TRAJECTORY FROM A BEAM-LINE ELEC...

Selective Processing Of A Workpiece

IN-SITU PLASMA CLEANING OF PROCESS CHAMBER COMPONENTS

APPARATUS AND METHOD FOR MULTILAYER DEPOSITION

Selective Processing Of A Workpiece

MULTI-APERTURE EXTRACTION SYSTEM FOR ANGLED ION BEAM

Laser-Induced Borane Production for Ion Implantation

PLATEN ASSEMBLY

BIAS ELECTRODES FOR TANDEM ACCELERATOR

Ion Implant Assisted Metal Etching

Apparatus For Dynamic Temperature Control Of An Ion Source

Platen With Multiple Shaped Grounding Structures

Variable Electrode Pattern for Versatile Electrostatic Clamp Operation

Constant Mass Flow Multi-Level Coolant Path Electrostatic Chuck

Multi Fluid Cooling System for Large Temperature Range Chuck

Gas Coupled Arc Chamber Cooling

Multi-Resistivity Johnsen-Rahbek Electrostatic Clamp

WORKPIECE CARRIER

CHARGE INTEGRATION BASED ELECTROSTATIC CLAMP HEALTH MONITOR

IN-VACUUM HIGH SPEED PRE-CHILL AND POST-HEAT STATIONS