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William F. Marx
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San Diego, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
EUV collector debris management
Patent number
8,075,732
Issue date
Dec 13, 2011
Cymer, Inc.
William N. Partlo
B08 - CLEANING
Information
Patent Grant
Systems and methods for reducing the influence of plasma-generated...
Patent number
7,732,793
Issue date
Jun 8, 2010
Cymer, Inc.
Alexander I. Ershov
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Systems and methods for cleaning a chamber window of an EUV light s...
Patent number
7,355,191
Issue date
Apr 8, 2008
Cymer, Inc.
Alexander N. Bykanov
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Systems and methods for reducing the influence of plasma-generated...
Patent number
7,196,342
Issue date
Mar 27, 2007
Cymer, Inc.
Alexander I. Ershov
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
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Patent Application
Systems and methods for reducing the influence of plasma-generated...
Publication number
20070187627
Publication date
Aug 16, 2007
Cymer, Inc.
Alexander I. Ershov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Systems and methods for cleaning a chamber window of an EUV light s...
Publication number
20060097203
Publication date
May 11, 2006
Cymer, Inc.
Alexander N. Bykanov
B08 - CLEANING
Information
Patent Application
EUV collector debris management
Publication number
20060091109
Publication date
May 4, 2006
William N. Partlo
B08 - CLEANING
Information
Patent Application
Systems and methods for reducing the influence of plasma-generated...
Publication number
20050269529
Publication date
Dec 8, 2005
Cymer, Inc.
Alexander I. Ershov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR