Wolfgang Emer

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for adjusting a projection objective
- Patent number 10,018,918
- Issue date Jul 10, 2018
- Carl Zeiss SMT GmbH
- Wolfgang Emer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for measuring an angularly resolved intensity distribution a...
- Patent number 9,915,871
- Issue date Mar 13, 2018
- Carl Zeiss SMT GmbH
- Wolfgang Emer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical unit for projection lithography
- Patent number 9,753,375
- Issue date Sep 5, 2017
- Carl Zeiss SMT GmbH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for adjusting a projection objective
- Patent number 9,715,177
- Issue date Jul 25, 2017
- Carl Zeiss SMT GmbH
- Wolfgang Emer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 9,429,495
- Issue date Aug 30, 2016
- Carl Zeiss SMT GmbH
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring an angularly resolved intensity distribution a...
- Patent number 9,081,294
- Issue date Jul 14, 2015
- Carl Zeiss SMT GmbH
- Wolfgang Emer
- G01 - MEASURING TESTING
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 8,823,948
- Issue date Sep 2, 2014
- Carl Zeiss SMT GmbH
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 8,488,127
- Issue date Jul 16, 2013
- Carl Zeiss SMT GmbH
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for measuring wavefronts and for determining...
- Patent number 8,134,716
- Issue date Mar 13, 2012
- Carl Zeiss SMT GmbH
- Wolfgang Emer
- G01 - MEASURING TESTING
Information Patent Grant
Method for adjusting a projection objective
- Patent number 7,965,377
- Issue date Jun 21, 2011
- Carl Zeiss SMT GmbH
- Wolfgang Emer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 7,796,274
- Issue date Sep 14, 2010
- Carl Zeiss SMT AG
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
System for measuring the image quality of an optical imaging system
- Patent number 7,760,366
- Issue date Jul 20, 2010
- Carl Zeiss SMT AG
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
Optical measuring apparatus and operating method for imaging error...
- Patent number 7,436,521
- Issue date Oct 14, 2008
- Carl Zeiss SMT AG
- Wolfgang Emer
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for wavefront measurement of an optical imaging s...
- Patent number 7,417,745
- Issue date Aug 26, 2008
- Carl Zeiss SMT AG
- Helmut Haidner
- G01 - MEASURING TESTING
Information Patent Grant
Method for determining distortion and/or image surface
- Patent number 7,400,388
- Issue date Jul 15, 2008
- Carl Zeiss SMT AG
- Wolfgang Emer
- G01 - MEASURING TESTING
Information Patent Grant
Method for adjusting a projection objective
- Patent number 7,372,545
- Issue date May 13, 2008
- Carl Zeiss SMT AG
- Wolfgang Emer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for wavefront measurement of an optical imaging s...
- Patent number 7,268,890
- Issue date Sep 11, 2007
- Carl Zeiss SMT AG
- Wolfgang Emer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of determining optical properties and projection exposure sy...
- Patent number 7,230,220
- Issue date Jun 12, 2007
- Carl Zeiss SMT AG
- Steffen Lauer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining wavefront aberrations
- Patent number 7,209,241
- Issue date Apr 24, 2007
- Carl Zeiss SMT AG
- Wolfgang Emer
- G01 - MEASURING TESTING
Information Patent Grant
Method for determining wavefront aberrations
- Patent number 7,019,846
- Issue date Mar 28, 2006
- Carl Zeiss SMT AG
- Wolfgang Emer
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Method For Adjusting A Projection Objective
- Publication number 20190056670
- Publication date Feb 21, 2019
- Carl Zeiss SMT GMBH
- Wolfgang EMER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MEASURING AN ANGULARLY RESOLVED INTENSITY DISTRIBUTION A...
- Publication number 20180299787
- Publication date Oct 18, 2018
- Carl Zeiss SMT GMBH
- Wolfgang EMER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method For Adjusting A Projection Objective
- Publication number 20180024440
- Publication date Jan 25, 2018
- Carl Zeiss SMT GMBH
- Wolfgang EMER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MEASURING AN ANGULARLY RESOLVED INTENSITY DISTRIBUTION A...
- Publication number 20160011520
- Publication date Jan 14, 2016
- Carl Zeiss SMT GMBH
- Wolfgang EMER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY
- Publication number 20150015862
- Publication date Jan 15, 2015
- Carl Zeiss SMT GMBH
- Axel Scholz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM
- Publication number 20140347654
- Publication date Nov 27, 2014
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING AN ANGULARLY RESOLVED INTENSITY DISTRIBUTION A...
- Publication number 20140009764
- Publication date Jan 9, 2014
- Wolfgang EMER
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM
- Publication number 20130293869
- Publication date Nov 7, 2013
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR ADJUSTING A PROJECTION OBJECTIVE
- Publication number 20110216303
- Publication date Sep 8, 2011
- Carl Zeiss SMT GMBH
- Wolfgang EMER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM
- Publication number 20100315651
- Publication date Dec 16, 2010
- Carl Zeiss SMT AG
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
System for Measuring the Image Quality of an Optical Imaging System
- Publication number 20080252876
- Publication date Oct 16, 2008
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
Methods and Apparatus For Measuring Wavefronts and For Determining...
- Publication number 20080231840
- Publication date Sep 25, 2008
- CARL ZEISS SMT AG
- Wolfgang Emer
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM
- Publication number 20080180688
- Publication date Jul 31, 2008
- Carl Zeiss SMT AG
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND A DEVICE FOR MEASUREMENT OF SCATTERED RADIATION AT AN OP...
- Publication number 20080116402
- Publication date May 22, 2008
- Carl Zeiss SMT AG
- Wolfgang Emer
- G01 - MEASURING TESTING
Information Patent Application
Method of determining optical properties and projection exposure sy...
- Publication number 20060231731
- Publication date Oct 19, 2006
- Carl Zeiss SMT AG
- Steffen Lauer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for determining wavefront aberrations
- Publication number 20060164655
- Publication date Jul 27, 2006
- Carl Zeiss SMT AG
- Wolfgang Emer
- G02 - OPTICS
Information Patent Application
Optical measuring apparatus and operating method for an optical ima...
- Publication number 20060119838
- Publication date Jun 8, 2006
- Carl Zeiss SMT AG
- Wolfgang Emer
- G01 - MEASURING TESTING
Information Patent Application
Method for determining distortion and/or image surface
- Publication number 20060007429
- Publication date Jan 12, 2006
- Carl Zeiss SMT AG
- Wolfgang Emer
- G02 - OPTICS
Information Patent Application
Device and method for wavefront measurement of an optical imaging s...
- Publication number 20050200940
- Publication date Sep 15, 2005
- Carl Zeiss SMT AG
- Wolfgang Emer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device and method for wavefront measurement of an optical imaging s...
- Publication number 20050007602
- Publication date Jan 13, 2005
- Carl Zeiss SMT AG
- Helmut Haidner
- G01 - MEASURING TESTING
Information Patent Application
Method for determining wavefront aberrations
- Publication number 20040032579
- Publication date Feb 19, 2004
- Carl Zeiss SMT AG
- Wolfgang Emer
- G02 - OPTICS

Wolfgang Emer

Person

Patents Grantslast 30 patents

Method for adjusting a projection objective

Method for measuring an angularly resolved intensity distribution a...

Illumination optical unit for projection lithography

Method for adjusting a projection objective

System for measuring the image quality of an optical imaging system

Method for measuring an angularly resolved intensity distribution a...

System for measuring the image quality of an optical imaging system

System for measuring the image quality of an optical imaging system

Methods and apparatus for measuring wavefronts and for determining...

Method for adjusting a projection objective

System for measuring the image quality of an optical imaging system

System for measuring the image quality of an optical imaging system

Optical measuring apparatus and operating method for imaging error...

Device and method for wavefront measurement of an optical imaging s...

Method for determining distortion and/or image surface

Method for adjusting a projection objective

Device and method for wavefront measurement of an optical imaging s...

Method of determining optical properties and projection exposure sy...

Method for determining wavefront aberrations

Method for determining wavefront aberrations

Patents Applicationslast 30 patents

Method For Adjusting A Projection Objective

METHOD FOR MEASURING AN ANGULARLY RESOLVED INTENSITY DISTRIBUTION A...

Method For Adjusting A Projection Objective

METHOD FOR MEASURING AN ANGULARLY RESOLVED INTENSITY DISTRIBUTION A...

ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY

SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM

METHOD FOR MEASURING AN ANGULARLY RESOLVED INTENSITY DISTRIBUTION A...

SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM

METHOD FOR ADJUSTING A PROJECTION OBJECTIVE

SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM

System for Measuring the Image Quality of an Optical Imaging System

Methods and Apparatus For Measuring Wavefronts and For Determining...

SYSTEM FOR MEASURING THE IMAGE QUALITY OF AN OPTICAL IMAGING SYSTEM

METHOD AND A DEVICE FOR MEASUREMENT OF SCATTERED RADIATION AT AN OP...

Method of determining optical properties and projection exposure sy...

Method for determining wavefront aberrations

Optical measuring apparatus and operating method for an optical ima...

Method for determining distortion and/or image surface

Device and method for wavefront measurement of an optical imaging s...

Device and method for wavefront measurement of an optical imaging s...

Method for determining wavefront aberrations